Plasma reactor with electrode array in ceiling
US-2018374685-A1 · Dec 27, 2018 · US
US11632829B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11632829-B2 |
| Application number | US-202016812274-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 7, 2020 |
| Priority date | Aug 5, 2016 |
| Publication date | Apr 18, 2023 |
| Grant date | Apr 18, 2023 |
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A defrosting system includes an RF signal source, an electrode proximate to a cavity within which a load to be defrosted is positioned, and a transmission path between the RF signal source and the electrode. The system also includes power detection circuitry coupled to the transmission path and configured repeatedly to take forward and reflected RF power measurements along the transmission path. A system controller repeatedly determines, based on the forward and reflected RF power measurements, a calculated rate of change, and repeatedly compares the calculated rate of change to a threshold rate of change. When the calculated rate of change compares favorably with the threshold rate of change, the RF signal source continues to provide the RF signal to the electrode until a determination is made that the defrosting operation is completed, at which time the RF signal source ceases to provide the RF signal to the electrode.
Opening claim text (preview).
What is claimed is: 1. A method of performing a thermal increase operation on a load that is positioned within a cavity of a thermal increase system, the method comprising: providing, by a radio frequency (RF) signal source through a transmission path, an RF signal to an electrode that is proximate to the cavity; repeatedly taking RF power measurements that indicate a magnitude of reflected RF power along the transmission path, and repeatedly determining, based on the RF power measurements, whether or not a variable impedance matching network that is electrically coupled between the RF signal source and the electrode is configured in a state that results in a relatively low reflected-to-forward power ratio; when a determination is made that the variable impedance matching network is not in the state that results in the relatively low reflected-to-forward power ratio, re-configuring the variable impedance matching network to reduce the magnitude of the reflected RF power; repeatedly determining a frequency at which the variable impedance matching network is being re-configured; and when a determination is made that the frequency is not greater than a threshold frequency, continuing to provide the RF signal to the electrode for a period of time. 2. The method as claimed in claim 1 , wherein repeatedly taking RF power measurements comprises: repeatedly taking forward RF power measurements and reflected RF power measurements along the transmission path. 3. The method as claimed in claim 2 , wherein repeatedly determining whether or not the variable impedance matching network is configured in the state that results in a relatively low reflected-to-forward power ratio comprises: calculating ratios of the reflected RF power measurements to the forward RF power measurements; comparing the ratios to a threshold; and when a ratio of a reflected RF power measurement to a forward RF power measurement is greater than the threshold, determining that the variable impedance matching network is not in the state that results in the relatively low reflected-to-forward power ratio. 4. The method as claimed in claim 3 , further comprising: while continuing to provide the RF signal until the determination is made, also continuing to calculate the ratios of the reflected RF power measurements to the forward RF power measurements, continuing to compare the ratios to the threshold, and continuing to re-configure the variable impedance matching network when the ratios are greater than the threshold. 5. The method as claimed in claim 1 , wherein continuing to provide the RF signal to the electrode for the period of time comprises: initializing a timer associated with monitoring an amount of time that the RF signal source is to continue to provide the RF signal; continuing to provide the RF signal to the electrode until a determination is made that the timer has expired; and when the determination is made that the timer has expired, ceasing provision of the RF signal to the electrode. 6. The method as claimed in claim 5 , further comprising: continuing to re-configure the variable impedance matching network during the period of time to reduce the magnitude of the reflected RF power; and pausing the timer while re-configuring the variable impedance matching network. 7. The method as claimed in claim 1 , further comprising: repeatedly comparing the frequency to the threshold frequency. 8. The method as claimed in claim 1 , wherein the threshold frequency is a frequency that is consistent with the load having a temperature that is within a plateau temperature range. 9. The method as claimed in claim 8 , wherein the plateau temperature range includes a range of temperatures between −16 degrees Celsius and −3 degrees Celsius. 10. The method as claimed in claim 9 , wherein the plateau temperature range includes a range of temperatures between −8 degrees Celsius and −4 degrees Celsius. 11. The method as claimed in claim 1 , wherein: the RF signal is an oscillating signal having a frequency between 3.0 megahertz and 300 megahertz. 12. The method as claimed in claim 11 , wherein: the RF signal is an oscillating signal having a frequency selected from 13.56 megahertz (+/−5 percent), 27.125 megahertz (+/−5 percent), and 40.68 megahertz (+/−5 percent). 13. A thermal increase system configured to perform a thermal increase operation on a load positioned within a cavity of the thermal increase system, the system comprising: a radio frequency (RF) signal source configured to produce an RF signal; a transmission path between the RF signal source and an electrode that is positioned proximate to the cavity, wherein the transmission path is configured to convey the RF signal from the RF signal source to the electrode; a variable impedance matching network along the transmission path; power detection circuitry coupled to the transmission path and configured repeatedly to take RF power measurements that indicate a magnitude of reflected RF power along the transmission path; and a system controller coupled to the power detection circuitry, wherein the system controller is configured to repeatedly determine, based on the RF power measurements, whether or not the variable impedance matching network is configured in a state that results in a relatively low reflected-to-forward power ratio, when a determination is made that the variable impedance matching network is not in the state that results in the relatively low reflected-to-forward power ratio, to re-configure the variable impedance matching network to reduce the magnitude of the reflected RF power, to repeatedly determine a frequency at which the variable impedance matching network is being re-configured, and when a determination is made that the frequency is not greater than a threshold frequency, to cause the RF signal source to cease providing the RF signal to the electrode after a period of time. 14. The system as claimed in claim 13 , wherein: the power detection circuitry is configured to repeatedly take RF power measurements by repeatedly taking forward RF power measurements and reflected RF power measurements along the transmission path; and the system controller is configured to repeatedly determine whether or not the variable impedance matching network is configured in the state that results in a relatively low reflected-to-forward power ratio by calculating ratios of the reflected RF power measurements to the forward RF power measurements, comparing the ratios to a threshold, and when a ratio of a reflected RF power measurement to a forward RF power measurement is greater than the threshold ratio, determining that the variable impedance matching network is not in the state that results in the relatively low reflected-to-forward power ratio. 15. The system as claimed in claim 13 , further comprising: a timer, wherein, when the system controller determines that the frequency is not greater than the threshold frequency, the system controller initializes the timer to indicate when the period of time has expired. 16. The system as claimed in claim 13 , wherein: the RF signal source is configured to produce the RF signal as an oscillating signal having a frequency between 3.0 megahertz and 300 megahertz. 17. The system as claimed in claim 16 , wherein: the RF signal is an oscillating signal having a frequency selected from 13.56 megahertz (+/−5 percent), 27.125 megahertz (+/−5 percent), and 40.68 megahertz (+/−5 percent). 18. The system as claimed in claim 13 , wherein the threshold frequen
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