System and method for wafer-scale fabrication of free standing mechanical and photonic structures by ion beam etching
US-10727072-B2 · Jul 28, 2020 · US
US11629049B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11629049-B2 |
| Application number | US-201917250087-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 24, 2019 |
| Priority date | May 25, 2018 |
| Publication date | Apr 18, 2023 |
| Grant date | Apr 18, 2023 |
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The present invention relates to a method for producing a molded body (10), comprising the following steps:a) providing a molding tool (40) which has at least one receptacle (12) in which at least one material (30) which comprises at least one shape-memory material (31) is introduced, wherein the shape-memory material (31) is present in a first state (111), wherein the material (30) at least partially fills the receptacle (12) of the molding tool (40) in such a manner that said material adjoins at least one surface of the receptacle (12);b) creating a molded body (10) in the receptacle (12) of the molding tool (40) from the material (30), wherein the shape-memory material (31) is present in a second state (112), wherein a form (11) is embossed into the molded body (10) during the second state (112);c) transferring the shape-memory material (31) to a third state (113), wherein the molded body (10) can be deformed during the third state (113) in such a manner that the molded body (10) is demolded from the receptacle (12) of the molding tool (40); andd) at least partially restoring the form (11) of the molded body (10) by transferring the shape-memory material (31) to a fourth state (114), wherein the molded body (10) at least partially resumes the form (11) according to step b) during the fourth state (114).
Opening claim text (preview).
The invention claimed is: 1. A method for producing a molded body, wherein the molded body comprises a micro-optical component having cavities or protruding structures on the surface of the molded body, the method comprising the following steps: a) providing a molding tool which has structures provided with undercuts giving rise in the molded body to cavities or protruding structures on the surface of the molded body, wherein the molding tool has at least one receptacle in which at least one material is being introduced, wherein the material comprises at least one shape-memory material, wherein the shape-memory material is present in a first state, wherein the material at least partially fills the receptacle of the molding tool in such a manner that said material adjoins at least one surface of the receptacle; b) creating a molded body in the receptacle of the molding tool from the material, wherein the shape-memory material is present in a second state, wherein a form is embossed into the molded body during the second state; c) transferring the shape-memory material from the second state to a third state, wherein the molded body can be deformed during the third state in such a manner that the molded body is demolded in demolding direction from the receptacle of the molding tool; and d) at least partially restoring the form of the molded body by transferring the shape-memory material from the third state to a fourth state, wherein the molded body at least partially resumes the form according to step b) during the fourth state. 2. The method of claim 1 , wherein the material provided during step a) comprises non-magnetic particles which are selected from microparticles or nanoparticles. 3. The method of claim 2 , wherein the particles comprise at least one of carbon, silicon dioxide or a metal. 4. The method of claim 2 , wherein the particles are optically active. 5. The method of claim 1 , wherein, at least one of during step a), or from step a) to step b), or during step b), the shape-memory material is transferred from the first state to the second state. 6. The method of claim 5 , wherein the shape-memory material is transferred from the first state to the second state by virtue of subjecting the molded body to an elevated temperature in comparison with the first state. 7. The method of claim 1 , wherein the shape-memory material is transferred from the second state to a third state during step c) by virtue of exposing the molded body to light, by virtue of subjecting the molded body to a reduced temperature in comparison with the second state or by virtue of subjecting the molded body to a reduced degree of action of force in comparison with the second state. 8. The method of claim 1 , wherein the shape-memory material is transferred into the fourth state during step d) by virtue of exposing the molded body to light, by virtue of subjecting the molded body to a changed temperature in comparison with the third state or by virtue of leaving the molded body under standard conditions. 9. The method of claim 1 , wherein the molded body, after a further deformation of the form that took place following step d) by virtue of transferring the shape-memory material into the fourth state again, at least partially resumes the form. 10. The method of claim 1 , wherein the shape-memory polymer is a thermoplastic polyurethane. 11. The method of claim 1 , wherein the method comprises a process of hot stamping or a process of thermal nanoimprinting. 12. The method of claim 1 , wherein at least one negative form in the molding tool that is determined by the at least one receptacle is reproduced dimensionally accurately on the molded body to be produced.
by wave energy or particle radiation {, e.g. for curing or vulcanising preformed articles (during moulding, e.g. in a mould B29C35/08)} · CPC title
having particular thermal properties · CPC title
characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor · CPC title
Lenses · CPC title
Moulding · CPC title
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