Piezoelectric micromachined ultrasound transducer device with piezoelectric barrier layer

Patent metadata

Field	Value
Publication number	US-11623246-B2
Application number	US-201916269892-A
Country	US
Kind code	B2
Filing date	Feb 7, 2019
Priority date	Feb 26, 2018
Publication date	Apr 11, 2023
Grant date	Apr 11, 2023

Abstract

A piezoelectric micromachined ultrasound transducer (PMUT) device may include a plurality of layers including a structural layer, a piezoelectric layer, and electrode layers located on opposite sides of the piezoelectric layer. Conductive barrier layers may be located between the piezoelectric layer and the electrodes to the prevent diffusion of the piezoelectric layer into the electrode layers.

First claim

What is claimed is:

1. A piezoelectric micromachined ultrasound transducer (PMUT) device, comprising:
a structural layer;
an electrical component layer parallel to the structural layer;
a first electrode located between the structural layer and the electrical component layer, wherein the first electrode includes a first planar surface parallel to the structural layer;
a second electrode located between the structural layer and the electrical component layer, wherein the second electrode includes a second planar surface parallel to the first planar surface;
a piezoelectric layer located between the first planar surface and the second planar surface, wherein the piezoelectric layer extends parallel to the first planar surface, wherein the piezoelectric layer generates a mechanical response in response to a signal applied between the first electrode and the second electrode, and
wherein the piezoelectric layer generates an electrical signal between the first electrode and the second electrode in response to a mechanical stress applied to the piezoelectric layer; and
one or more barrier layers, comprising:
a first barrier layer covering the first planar surface that prevents diffusion of the piezoelectric layer into the first electrode; and
a second barrier layer covering the second planar surface that prevents diffusion of the piezoelectric layer into the second electrode.

2. The PMUT device of claim 1 , wherein at least one of the first barrier layer or the second barrier layer comprises a strontium ruthenium trioxide (SrRuO 3 ) film.

3. The PMUT device of claim 1 , wherein the first electrode and the second electrode each comprise a platinum, molybdenum, or aluminum material.

4. The PMUT device of claim 1 , wherein the first barrier layer is in contact with the piezoelectric layer and located between the piezoelectric layer and the first electrode, wherein the second barrier layer is in contact with the piezoelectric layer and located between the piezoelectric layer and the second electrode, wherein the first barrier layer and the second barrier layer cover a first portion of the piezoelectric layer, and wherein the one or more barrier layers further comprise:
at least one additional barrier layer in contact with the piezoelectric layer, wherein the at least one additional barrier layer covers a second portion of the piezoelectric layer.

5. The PMUT device of claim 4 , wherein the first barrier layer, the second barrier layer, and the at least one additional barrier layer surround the piezoelectric layer.

6. The PMUT device of claim 5 , wherein the first barrier layer, the second barrier layer, and the at least one additional barrier layer completely surround the piezoelectric layer.

7. The PMUT device of claim 4 , wherein the first barrier layer and the second barrier layer comprise a conductive layer, and wherein the at least one additional barrier layer comprises an insulating layer.

8. The PMUT device of claim 7 , wherein the first barrier layer is in contact with the first electrode and the second barrier layer is in contact with the second electrode.

9. The PMUT device of claim 7 , further comprising a first electrical connection from the electrical component layer and the first electrode and a second electrical connection between the electrical component layer and the second electrode, wherein the at least one additional barrier layer is located between the piezoelectric layer and each of the first electrical connection and the second electrical connection.

10. The PMUT device of claim 9 , wherein the at least one additional barrier layer comprises:
a first additional barrier layer in contact with the first electrical connection; and
a second additional barrier layer in contact with the second electrical connection.

11. The PMUT device of claim 4 , further comprising an insulating buffer layer in contact with the first electrode and a silicon layer and a standoff in contact with the second electrode.

12. The PMUT device of claim 11 , wherein the first barrier layer prevents diffusion from the piezoelectric layer into the silicon layer and the second barrier layer prevents diffusion from the piezoelectric layer into the standoff.

13. The PMUT device of claim 12 , wherein the at least one additional barrier layer further prevents diffusion from the piezoelectric layer into the silicon layer.

14. The PMUT device of claim 11 , wherein the first barrier layer and the first electrode overlap the piezoelectric layer and the silicon layer, and wherein the second barrier layer and the second electrode overlap the piezoelectric layer and the standoff.

15. The PMUT device of claim 1 , wherein the electrical component layer comprises a CMOS layer.

16. The PMUT device of claim 1 , wherein the piezoelectric layer comprises lead zirconate titanate (PZT), lead magnesium niobite-lead zirconate titanate (PMN-PZT), or lead zinc niobite-lead titanate (PZN-PT).

17. The PMUT device of claim 1 , wherein the one or more barrier layers comprises Al 2 O 3 , TiO 2 , SiO 2 , Ir, LNO, Si 3 N 4 , YSZ, MgO, TiO x , or ZrO 2 .

18. A piezoelectric micromachined ultrasound transducer (PMUT) device, comprising:
a structural layer;
an electrical component layer parallel to the structural layer;
a first electrode disposed adjacent to and over the structural layer, wherein the first electrode includes a first planar surface parallel to the structural layer;
a second electrode disposed adjacent to and over the structural layer, wherein the second electrode includes a second planar surface parallel to the first planar surface;
a piezoelectric layer located between the first planar surface and the second planar surface, extending parallel to the first planar surface, wherein the piezoelectric layer generates a mechanical response in response to a signal applied between the first electrode and the second electrode, and wherein the piezoelectric layer generates an electrical signal between the first electrode and the second electrode in response to a mechanical stress applied to the piezoelectric layer; and
one or more barrier layers, comprising:
a first barrier layer covering the first planar surface that prevents diffusion of the piezoelectric layer into the first electrodes; and
a second barrier layer covering the second planar surface that prevents diffusion of the piezoelectric layer into the second electrode.

19. A method for fabricating a piezoelectric micromachined ultrasound transducer (PMUT) device, comprising:
providing a structural layer;
depositing a first conducting layer over the structural layer, wherein the first conducting layer includes a first planar surface parallel to the structural layer;
depositing a first barrier layer over the first conducting layer;
depositing a piezoelectric layer over the first barrier layer;
depositing a second barrier layer over the piezoelectric layer;
depositing a second conducting layer over the structural layer, wherein the second conducting layer includes a second planar surface parallel to the first planar surface, and wherein the piezoelectric layer extends parallel to the first planar surface;
patterning the second conducting layer;
etching the piezoelectric layer based at least in part on the patterning of the second conducting layer; and
depositing a third barrier layer over the second conducting layer, the piezoelectric layer, and the first conducting layer.

Assignees

• Invensense Inc

Inventors

• Mehdizadeh Emad
• Kim Bongsang
• Chang Chienliu
• Baldasarre Leonardo
• Apte Nikhil
• Jiang Xiaoyue
• Chan Mei-Lin

Classifications

• H10N30/06

  Forming electrodes or interconnections, e.g. leads or terminals · CPC title

• G06V40/1306

  non-optical, e.g. ultrasonic or capacitive sensing · CPC title

• B06B2201/55

  Piezoelectric transducer · CPC title

• H10N30/878

  the principal material being non-metallic, e.g. oxide or carbon based · CPC title

• B06B1/0644 Primary

  using a single piezoelectric element (B06B1/0688 takes precedence) · CPC title