Sensor module for scanning electron microscopy applications

Patent metadata

Field	Value
Publication number	US-11610757-B2
Application number	US-202017000231-A
Country	US
Kind code	B2
Filing date	Aug 21, 2020
Priority date	Aug 28, 2019
Publication date	Mar 21, 2023
Grant date	Mar 21, 2023

Abstract

A scanning electron microscopy (SEM) system is disclosed. The SEM system includes an electron source configured to generate an electron beam and a set of electron optics configured to scan the electron beam across the sample and focus electrons scattered by the sample onto one or more imaging planes. The SEM system includes a first detector module positioned at the one or more imaging planes, wherein the first detector module includes a multipixel solid-state sensor configured to convert scattered particles, such as electrons and/or x-rays, from the sample into a set of equivalent signal charges. The multipixel solid-state sensor is connected to two or more Application Specific Integrated Circuits (ASICs) configured to process the set of signal charges from one or more pixels of the sensor.

First claim

What is claimed:

1. A scanning electron microscopy system comprising:
an electron source configured to generate an electron beam;
a set of electron optics configured to scan the electron beam across a sample and focus electrons scattered by the sample onto one or more imaging planes; and
a first detector module positioned at the one or more imaging planes,
wherein the first detector module includes a multipixel solid-state sensor configured to convert scattered particles from the sample into a set of equivalent signal charges,
wherein the multipixel solid-state sensor is connected to two or more Application Specific Integrated Circuits (ASICs) configured to process the set of signal charges from one or more pixels of the sensor, wherein each ASIC includes a plurality of clusters, wherein each cluster includes at least four pixels, wherein a respective ASIC is configured to:
detect a charge collected by a respective cluster in a first time interval, wherein the first time interval is synchronized to a scan clock to generate a first electrical signal corresponding to the charge collected by the respective cluster in the first time interval, and convert the first electrical signal into a first digital signal; and
detect a charge collected by the respective cluster in a second time interval, wherein the second time interval is synchronized to the scan clock to generate a second electrical signal corresponding to the charge collected in the second time interval, and convert the second electrical signal into a second digital signal, wherein converting the second electrical signal starts before converting the first electrical signal is completed.

2. The scanning electron microscopy system of claim 1 , wherein a respective pixel of the multipixel solid-state sensor comprises a floating diffusion capacitive node to collect the equivalent signal charges and generate an equivalent voltage, a reset stage to control the voltage of the floating diffusion node, and an amplifier to drive the voltage at the floating diffusion node to an input of the two or more ASICs.

3. The scanning electron microscopy system of claim 2 , wherein the respective pixel of the multipixel solid-state sensor of the first detector module comprises a second contact connected to the reset stage of the respective pixel and controlled by the two or more ASICs.

4. The scanning electron microscopy system of claim 1 , wherein the electron source comprises a multi-beam electron source configured to generate a second electron beam, wherein the set of electron optics is further configured to scan the second beam across the sample.

5. The scanning electron microscopy system of claim 4 , wherein the set of electron optics are further configured to focus electrons scattered by the sample from the first beam to a first pixel of the multipixel sensor, and to focus electrons second scattered by the sample from the second beam to a second pixel of the multi-pixel solid-state sensor.

6. The scanning electron microscopy system of claim 1 , wherein the first detector module includes a multipixel solid-state sensor layer and an ASIC layer fabricated on different wafers and directly connected by at least one of microsolder bumps or direct bond interface connections of 100-200 μm pitch, wherein one or more ASICs are attached to a substrate and at least one of inputs or outputs of the one or more ASICs are connected to electrical traces on the substrate by wire bonds.

7. The scanning electron microscopy system of claim 1 , wherein the multipixel solid-state sensor and the two or more ASICs are connected via a Through-Silicon-Interposer (TSI).

8. The scanning electron microscopy system of claim 1 , wherein the two or more ASICs further comprise Through-Silicon-Vias (TSV) to connect one or more inputs and one or more outputs of the two or more ASICs to traces on a substrate.

9. The scanning electron microscopy system of claim 1 , further comprising: at least a second detector module substantially coplanar to the first detector module, wherein the first detector module and the at least the second detector module are configured to form an aperture for the electron beam, and the set of electron optics are configured such that the electron beam passes through the aperture.

10. The scanning electron microscopy system of claim 1 , wherein at least one of the two or more ASICs comprises a Look-Up-Table (LUT) configured to store a first threshold and a second threshold, and a comparator configured to compare signal charges to the first threshold and to the second threshold, wherein the comparator is configured to generate results indicative of whether each signal charge is within the first threshold and the second threshold.

11. The scanning electron microscopy system of claim 1 , wherein the first detector module comprises one or more screens, wherein the one or more screens are formed from at least one of beryllium, carbon, boron, magnesium, or aluminum.

12. The scanning electron microscopy system of claim 1 , wherein the first detector module is configured to detect backscattered electrons from the sample.

13. The scanning electron microscopy system of claim 1 , wherein the first detector module is configured to detect secondary electrons from the sample.

14. The scanning electron microscopy system of claim 1 , wherein the first detector module is configured to detect x-rays from the sample.

15. A scanning electron microscopy system comprising:
an electron source configured to generate an electron beam;
a set of electron optics configured to scan the electron beam across a sample and focus electrons scattered by the sample onto one or more imaging planes; and
a first detector module positioned at the one or more imaging planes,
wherein the first detector module includes one or more multipixel Application Specific Integrated Circuits (ASICs), wherein each pixel of the one or more multipixel ASICs comprises a photodiode configured to convert particles scattered by the sample into equivalent electrical signals, and each pixel of the one or more multipixel ASICs includes circuitry to process the equivalent electrical signals, wherein each multipixel ASIC includes a plurality of clusters, wherein each cluster includes at least four pixels, wherein a respective ASIC is configured to:
detect charge collected by a respective cluster in a first time interval, wherein the first time interval is synchronized to a scan clock to generate a first electrical signal corresponding to the charge collected by the respective cluster in the first time interval, and convert the first electrical signal into a first digital signal; and
detect a charge collected by the respective cluster in a second time interval, wherein the second time interval is synchronized to the scan clock to generate a second electrical signal corresponding to the charge collected in the second time interval, and convert the second electrical signal into a second digital signal, wherein converting the second electrical signal starts before converting the first electrical signal is completed.

16. The scanning electron microscopy system of claim 15 , wherein the electron source comprises a multi-beam electron source configured to generate a second electron beam, wherein the set of electron optics is further configured to scan the second beam across the sample.

17. The scanning electron microscopy system of claim 16 , wherein the set of electron optics are further configured to focus electrons scattered by the sample from the first beam to a first pixel, and to focus electrons second scattered by the

Assignees

• Kla Corp

Inventors

• Trimpl Marcel

Classifications

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/3177

  Multi-beam, e.g. fly's eye, comb probe · CPC title

• H01J37/265

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title

• H01J2237/2446

  Position sensitive detectors · CPC title