Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample

Patent metadata

Field	Value
Publication number	US-11610755-B2
Application number	US-202117507342-A
Country	US
Kind code	B2
Filing date	Oct 21, 2021
Priority date	Apr 12, 2019
Publication date	Mar 21, 2023
Grant date	Mar 21, 2023

Abstract

A method of automatically focusing a charged particle beam on a surface region of a sample is provided. The method includes acquiring a plurality of images for a corresponding plurality of focusing strength values; calculating a plurality of sharpness values based on the plurality of images, the plurality of sharpness values are calculated with a sharpness function provided as a sum in a frequency space based on the plurality of images; and determining subsequent focusing strength values of the plurality of focusing strength values with a golden ratio search algorithm based one the calculated sharpness values.

First claim

The invention claimed is:

1. A method of focusing a charged particle beam on a surface region of a sample, comprising:
calculating a first sharpness value of a first image, wherein the first sharpness value is calculated with a sharpness function including a sum in a frequency space;
determining a second focusing strength value based on the calculated first sharpness value and based on a golden ratio or Fibonacci numbers; and
acquiring a second image for the second focusing strength value.

2. The method of claim 1 , wherein:
the first image is an image of a plurality of images and is for a first focusing strength value;
the first focusing strength value and the second focusing strength value are focusing strength values of a plurality of focusing strength values; and
the first sharpness value is a sharpness value of a plurality of sharpness values, and wherein a subsequent focusing strength value of the plurality of focusing strength values is based on four previous sharpness values of the plurality of sharpness values.

3. The method of claim 2 , wherein the plurality of focusing strength values are provided by one or more parameters of a charged particle beam device.

4. The method of claim 1 , wherein the sharpness function calculates the sharpness value based on a Fourier transform of an image.

5. The method of claim 4 , wherein the sharpness function calculates the sharpness value based on a discrete Fourier transform of the image.

6. The method of claim 4 , wherein the Fourier transform is filtered with a filter in the frequency space.

7. The method of claim 6 , wherein the filter is a bandpass filter.

8. The method of claim 4 , wherein the sharpness function is based on a limited range Discrete Fourier transform.

9. The method of claim 1 , wherein a number of iterations of the golden ratio or the Fibonacci numbers is predetermined by a starting range of focusing strength values and a focusing strength accuracy.

10. The method of claim 1 , further comprising:
controlling a start of scan deflectors at a predetermined starting time after determining the second focusing strength value and before acquiring the second image for the second focusing strength value.

11. The method of claim 10 , wherein the predetermined starting time is varied for acquiring at least a further image.

12. A method of calculating a converging set of sharpness values of images of a charged particle beam device, comprising:
providing a first focusing strength range and a focusing strength accuracy as input parameters to a convergence algorithm;
calculating a first focusing strength value based on a golden ratio or Fibonacci numbers and depending on the first focusing strength range;
calculating a second focusing strength value based on a golden ratio or Fibonacci numbers;
imaging a sample with the first focusing strength value and the second focusing strength value to obtain images;
calculating sharpness values from the images with a sharpness function, wherein the sharpness function is based on at least one of a Fourier transform of an image or a sum in a frequency space;
determining a second focusing strength range narrower than the first focusing strength range based on the sharpness values; and
iteratively replacing the first focusing strength range with the second focusing strength range and imaging the sample to obtain further images and calculating further sharpness values from the further images.

13. The method of claim 12 , wherein:
the first focusing strength range is provided by a first lower focusing strength value and a first upper focusing strength value; and
wherein iteratively replacing the first focusing strength range with the second focusing strength range includes replacing one of the first lower focusing strength value or the first upper focusing strength value with a neighboring focusing strength value selected from the first focusing strength value or the second focusing strength value.

14. The method of claim 13 , providing the first lower focusing strength value or the first upper focusing strength value based on the sharpness values as an output after a predetermined number of iterations.

15. The method of claim 12 , wherein the second focusing strength value is calculated depending on the first focusing strength range and the first focusing strength value.

16. A charged particle beam device for imaging a sample, comprising:
a charged particle source configured to emit a charged particle beam;
an objective lens configured to focus the charged particle beam propagating along an optical axis on the sample with a focusing strength value; and
a controller configured to adjust the focusing strength value according to a method of focusing the charged particle beam on a surface region of the sample, comprising:
calculating a first sharpness value of a first image, wherein the first sharpness value is calculated with a sharpness function including a sum in a frequency space;
determining a second focusing strength value based on the calculated first sharpness value and based on a golden ratio or Fibonacci numbers; and
acquiring a second image for the second focusing strength value.

17. The charged particle beam device of claim 16 , wherein the sample is provided on a large area substrate.

18. The charged particle beam device of claim 17 , wherein the sample is provided on the large area substrate for electron beam review of a surface portion of the sample during display manufacturing.

19. The charged particle beam device of claim 16 , wherein the sample is a wafer for semiconductor manufacturing.

20. The charged particle beam device of claim 19 , wherein the charged particle beam device is an EBI tool having two or more charged particle beams.

21. The charged particle beam device of claim 16 , wherein the charged particle beam device is configured to cover a focal range up to a few hundred μm.

22. A charged particle beam device for imaging a sample, comprising:
a charged particle source configured to emit a charged particle beam;
an objective lens configured to focus the charged particle beam propagating along an optical axis on the sample with a focusing strength value; and
a controller configured to adjust the focusing strength value according to a method of calculating a converging set of sharpness values of images of a charged particle beam device, comprising:
providing a first focusing strength range and a focusing strength accuracy as input parameters to a convergence algorithm;
calculating a first focusing strength value based on a golden ratio or Fibonacci numbers and depending on the first focusing strength range;
calculating a second focusing strength value based on a golden ratio or Fibonacci numbers;
imaging a sample with the first focusing strength value and the second focusing strength value to obtain images;
calculating sharpness values from the images with a sharpness function, wherein the sharpness function includes a Fourier transform of an image and/or wherein the sharpness function is provided as a sum in a frequency space;
determining a second focusing strength range narrower than the first focusing strength range based on the sharpness values; and
iteratively replacing the first focusing strength range with the second focusing strength range and imaging the sample to obtain further images and calculating further sharpness values from the further images.

Assignees

• Applied Materials Inc

Inventors

• Trauner Robert
• Schüler Bernhard
• Mueller Bernhard G
• Knaub Nikolai
• Virdi Kulpreet Singh

Classifications

• H10P72/0616

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10P72/0471

  comprising at least one ion or electron beam chamber · CPC title

• H01J2237/216

  Automatic focusing methods · CPC title

• G06T2207/30168

  Image quality inspection · CPC title

• G06T2207/30148

  Semiconductor; IC; Wafer · CPC title