Graphite crucible and silicon single crystal manufacturing apparatus
US-8992682-B2 · Mar 31, 2015 · US
US11608567B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11608567-B2 |
| Application number | US-202016943892-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 30, 2020 |
| Priority date | Jul 31, 2019 |
| Publication date | Mar 21, 2023 |
| Grant date | Mar 21, 2023 |
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The present invention relates to a crucible for an ingot growing apparatus capable of increasing the life span of a graphite crucible. One embodiment of the present invention provides a crucible for an ingot growing apparatus including: a quartz crucible containing a silicon melt and having a lower surface part with a curved shape; a graphite crucible accommodating the quartz crucible and having a body shape divided into at least two parts with respect to a lower surface thereof; and an inner supporter supported between the lower surface of the quartz crucible and the graphite crucible.
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What is claimed is: 1. A crucible for an ingot growing apparatus comprising: a quartz crucible consisting of a cylindrical side surface part and a lower surface part with a curved shape connected to a lower end of the side surface part of the quartz crucible; a graphite crucible accommodating the quartz crucible and consisting of a cylindrical side surface part and a lower surface part connected orthogonally to a lower end of the cylindrical side surface part of the graphite crucible; an outer supporter supporting a lower portion of the graphite crucible; and an inner supporter supported between the lower surface part of the quartz crucible and the lower surface part of the graphite crucible, wherein the graphite crucible is divided into at least two parts vertically, the outer supporter has a plate shape that supports the lower surface of the graphite crucible, and the inner supporter has a disk shape with a predetermined height higher than a height of the lower surface part of the quartz crucible at least and has a rounded upper surface groove on which the entire lower surface part of the quartz crucible is seated. 2. The crucible for the ingot growing apparatus of claim 1 , wherein the side surface part of the graphite crucible is supporting a side surface of the quartz crucible and a side surface of the inner supporter. 3. The crucible for the ingot growing apparatus of claim 1 , further comprising a gas discharge flow path for discharging a gas generated between the quartz crucible and the graphite crucible to the outside of the graphite crucible. 4. The crucible for the ingot growing apparatus of claim 3 , wherein the gas discharge flow path is provided in plural by a predetermined distance along a circumferential direction of the graphite crucible. 5. The crucible for the ingot growing apparatus of claim 4 , wherein the gas discharge flow path includes a slit formed on an inner circumferential surface of the graphite crucible or an outer circumferential surface of the inner supporter. 6. The crucible for the ingot growing apparatus of claim 5 , wherein the gas discharge flow path includes an outlet passing through the lower surface part of the graphite crucible so as to communicate with the slit. 7. The crucible for the ingot growing apparatus of claim 6 , wherein the outlet is provided outside the outer supporter.
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