Substrate carrier with integrated electrostatic chuck
US-10304713-B2 · May 28, 2019 · US
Multi-depth film for optical devices
US11608558B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11608558-B2 |
| Application number | US-202016843347-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 8, 2020 |
| Priority date | Apr 11, 2019 |
| Publication date | Mar 21, 2023 |
| Grant date | Mar 21, 2023 |
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- Title
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- Abstract
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- Assignees and inventors
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- First independent claim
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Abstract
Official abstract text for this publication.
Embodiments of the present disclosure relate to forming multi-depth films for the fabrication of optical devices. One embodiment includes disposing a base layer of a device material on a surface of a substrate. One or more mandrels of the device material are disposed on the base layer. The disposing the one or more mandrels includes positioning a mask over of the base layer. The device material is deposited with the mask positioned over the base layer to form an optical device having the base layer with a base layer depth and the one or more mandrels having a first mandrel depth and a second mandrel depth.
First claim
Opening claim text (preview).
What is claimed is: 1. A method, comprising: disposing a base layer of a device material on a surface of a substrate, the base layer having a base layer depth; and disposing mandrels of the device material on the base layer, wherein the disposing the mandrels comprises: co-forming the mandrels by positing a mask over the base layer, the mask having: a first portion of a pattern of slots having a first masked depth, the first masked depth corresponding to one or more mandrels having a first mandrel depth; and a second portion of the pattern of slots having a second masked depth, the second masked depth corresponding to one or more mandrels having a second mandrel depth, wherein the first masked depth is greater than the second masked depth such that the first mandrel depth is greater than the second mandrel depth; and depositing the device material with the mask positioned over the base layer to form an optical device having the base layer with the base layer depth and the one or more mandrels having the first mandrel depth and the one or more mandrels having the second mandrel depth, wherein the first mandrel depth is greater than the second mandrel depth. 2. The method of claim 1 , wherein the device material is deposited by physical vapor deposition (PVD). 3. The method of claim 1 , wherein the device material is deposited by chemical vapor deposition (CVD). 4. The method of claim 1 , wherein the device material is deposited by atomic layer deposition (ALD). 5. The method of claim 1 , wherein the mandrels comprise titanium dioxide (TiO 2 ), zinc oxide (ZnO), tin dioxide (SnO 2 ), aluminum-doped zinc oxide (AZO), fluorine-doped tin oxide (FTO), cadmium stannate (tin oxide) (CTO), and zinc stannate aluminum-doped zinc oxide (AZO), fluorine-doped tin oxide (FTO), cadmium stannate (tin oxide) (CTO), zinc stannate (tin oxide) (SnZnQ3), silicon nitride (Si3N4), or amorphous silicon (a-Si) containing materials. 6. The method of claim 1 , wherein the device material of the one or more mandrels having the first mandrel depth is the same device material as the one or more mandrels having the second mandrel depth.
Assignees
Inventors
Classifications
involving loading and unloading of wafers · CPC title
Mechanical parts of transfer devices · CPC title
using vacuum or suction, e.g. Bernoulli chucks · CPC title
Mask-wafer alignment · CPC title
Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title
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Frequently asked questions
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- What does patent US11608558B2 cover?
- Embodiments of the present disclosure relate to forming multi-depth films for the fabrication of optical devices. One embodiment includes disposing a base layer of a device material on a surface of a substrate. One or more mandrels of the device material are disposed on the base layer. The disposing the one or more mandrels includes positioning a mask over of the base layer. The device material…
- Who is the assignee on this patent?
- Applied Materials Inc
- What technology area does this patent fall under?
- Primary CPC classification C23C14/042. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Mar 21 2023 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).