Method of forming a graphene device using polymer material as a support for a graphene film

Patent metadata

Field	Value
Publication number	US-11577960-B2
Application number	US-201615557039-A
Country	US
Kind code	B2
Filing date	Mar 9, 2016
Priority date	Mar 9, 2015
Publication date	Feb 14, 2023
Grant date	Feb 14, 2023

Abstract

The invention concerns a method of forming a graphene device, the method comprising: forming a graphene film (100) over a substrate; depositing, by gas phase deposition, a polymer material covering a surface of the graphene film (100); and removing the substrate from the graphene film (100), wherein the polymer material forms a support (102) for the graphene film (100).

First claim

The invention claimed is:

1. A method of forming a conductive graphene device, the method comprising:
forming a conductive graphene film over a substrate, the conductive graphene film consisting essentially of one to eight monolayers of carbon atoms, the conductive graphene film having a first surface and a second surface, the first surface covering the substrate;
gas phase depositing a graphene support layer of parylene over the second surface of the conductive graphene film, the graphene support layer of parylene supporting the conductive graphene film during the operation of the conductive graphene device;
removing the substrate from the conductive graphene film, thereby exposing the first surface of the conductive graphene film;
wherein the graphene support layer of parylene is deposited with a thickness of between 5 nm and 5 mm;
wherein the surface on which the conductive graphene film is formed comprises a mold having a shape of a three-dimensional form; and
wherein:
the mold is formed of a first material and at least one zone of a second material;
during the formation of the conductive graphene film, graphene selectively forms on the at least one zone of the second material and not on the first material; and
the graphene support layer of parylene is deposited over the conductive graphene film and at least a portion of the first material.

2. The method of claim 1 , further comprising, after removing the substrate from the conductive graphene film, performing a further gas phase deposition of parylene to encapsulate the conductive graphene film.

3. A method of forming a conductive graphene device, the method comprising:
forming a conductive graphene film over a substrate, the conductive graphene film consisting essentially of one to eight monolayers of carbon atoms, the conductive graphene film having a first surface and a second surface, the first surface covering the substrate;
gas phase depositing a graphene support layer of parylene over the second surface of the conductive graphene film, the graphene support layer of parylene supporting the conductive graphene film during the operation of the conductive graphene device;
removing the substrate from the conductive graphene film, thereby exposing the first surface of the conductive graphene film;
wherein the graphene support layer of parylene is deposited with a thickness of between 5 nm and 5 mm; and
wherein the conductive graphene film is deposited to form a conductive track having a meandering form in a detection zone.

4. A method of forming a conductive graphene device, the method comprising:
forming a conductive graphene film over a substrate, the conductive graphene film consisting essentially of one to eight monolayers of carbon atoms, the conductive graphene film having a first surface and a second surface, the first surface covering the substrate;
gas phase depositing a graphene support layer of parylene over the second surface of the conductive graphene film, the graphene support layer of parylene supporting the conductive graphene film during the operation of the conductive graphene device;
removing the substrate from the conductive graphene film, thereby exposing the first surface of the conductive graphene film;
wherein the graphene support layer of parylene is deposited with a thickness of between 5 nm and 5 mm; and
wherein the conductive graphene film is deposited in the form of a first plate of graphene formed in a detection zone and connected to a first conductive track, and wherein the method further comprises:
forming a further conductive graphene film covered by a further deposition of the parylene, wherein the further conductive graphene film is deposited in the form of a second plate of graphene; and
assembling the first and second conductive graphene films such that the first and second graphene plates form a capacitive interface in the detection zone separated by a layer of the parylene.

Assignees

• Centre Nat Rech Scient
• Univ Grenoble Alpes

Inventors

• Kalita Dipankar
• Bouchiat Vincent
• Marty Laetitia
• Bendiab Nedjma

Classifications

• C01B32/194

  After-treatment · CPC title

• G06F3/014

  Hand-worn input/output arrangements, e.g. data gloves · CPC title

• C01B32/186 Primary

  by chemical vapour deposition [CVD] · CPC title

• H01C17/06586

  composed of organic material · CPC title

• H01C17/0652

  containing carbon or carbides · CPC title