Terahertz device

Patent metadata

Field	Value
Publication number	US-11569184-B2
Application number	US-202217719056-A
Country	US
Kind code	B2
Filing date	Apr 12, 2022
Priority date	Sep 2, 2019
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

A terahertz device of the present invention includes a terahertz element generating an electromagnetic wave, a dielectric including a dielectric material and surrounding the terahertz element, a gas space including a gas, and a reflecting film serving as a reflecting portion. The reflecting film includes a portion opposing the terahertz element through the dielectric and the gas space and reflecting the electromagnetic wave toward a direction, wherein the electromagnetic wave is generated from the terahertz element and transmitted through the dielectric and the gas space. In addition, the refractive index of the dielectric is lower than the refractive index of the terahertz element and is higher than the refractive index of the gas in the gas space.

First claim

What is claimed is:

1. A terahertz device, comprising:
a terahertz element, generating an electromagnetic wave;
a dielectric, including a dielectric material and surrounding the terahertz element;
a gas space, in which a gas exists; and
a reflecting portion, including a portion opposing the terahertz element through the dielectric and the gas space, and reflecting the electromagnetic wave toward a direction, wherein the electromagnetic wave is generated from the terahertz element and transmitted through the dielectric and the gas space, wherein
an element refractive index, which is a refractive index of the terahertz element, is greater than a gas refractive index, which is a refractive index of the gas,
a dielectric refractive index, which is a refractive index of the dielectric, is less than the element refractive index and greater than the gas refractive index, and
the terahertz device includes an antenna base that has an antenna surface facing the terahertz element through the dielectric and the gas space, and wherein
the reflecting portion is a reflective film formed on the antenna surface,
the terahertz element includes:
an element main surface, having an oscillation point as a surface intersecting a thickness direction of the terahertz element; and
an element back surface, being a surface opposite to the element main surface, and wherein

the dielectric includes:
a dielectric main surface, facing the reflective film in the thickness direction of the terahertz element; and
a dielectric back surface, being a surface opposite to the dielectric main surface, wherein a conductive portion electrically connected to the terahertz element is disposed in the dielectric.

2. The terahertz device of claim 1 , wherein the
the dielectric has a protruding portion projecting laterally from the antenna base and viewed along the thickness direction of the terahertz element,
an electrode electrically connected to the conductive portion is disposed on a portion of the dielectric main surface or the dielectric back surface corresponding to the protruding portion, and
the conductive portion electrically connects the terahertz element and the electrode.

3. The terahertz device of claim 2 , wherein
when a protruding direction of the protruding portion is set as a first direction, and a direction orthogonal to both the first direction and the thickness direction of the terahertz element is set as a second direction, the conductive portion extends in the first direction in a manner of overlapping both the terahertz element and the electrode and viewed along the thickness direction of the terahertz element.

4. The terahertz device of claim 3 , wherein
the terahertz element includes a pad,
the conductive portion includes:
an element opposing portion, opposing the pad in the thickness direction of the terahertz element; and
a bump, disposed between the pad and the element opposing portion, and

the terahertz element is flip-chip mounted on the element opposing portion with the bump interposed in between.

5. The terahertz device of claim 4 , wherein
the conductive portion includes:
an electrode opposing portion, opposing the electrode in the thickness direction of the terahertz element; and
a connecting portion, connecting the element opposing portion and the electrode opposing portion, and extending in the first direction, and

when the second direction is a width direction of the conductive portion, at least a part of the connecting portion narrower than the element opposing portion is formed.

6. The terahertz device of claim 5 , wherein the electrode opposing portion wider than the connecting portion is formed.

7. The terahertz device of claim 5 , wherein the connecting portion includes:
a connecting body portion, formed to be narrower than the element opposing portion; and
an element side taper portion, connecting the connecting body portion and the element opposing portion, and formed to have a width that gradually increases from the connecting body portion toward the element opposing portion.

8. The terahertz device of claim 7 , wherein
the connecting body portion is formed to be narrower than the electrode opposing portion, and
the connecting portion includes an electrode side taper portion, connecting the connecting body portion and the electrode opposing portion, and formed to have a width that gradually increases from the connecting body portion toward the electrode opposing portion.

9. The terahertz device of claim 4 , wherein
the conductive portion includes a first conductive portion and a second conductive portion, and
the first conductive portion and the second conductive portion extend in a direction away from the terahertz element and viewed along the thickness direction of the terahertz element.

10. The terahertz device of claim 9 , wherein
the dielectric includes a first protruding portion and a second protruding portion arranged apart in the first direction, as the protruding portion,
the terahertz element includes a first pad and a second pad arranged apart and opposite in the first direction, as the pad,
the terahertz device includes a first electrode formed on a portion on the dielectric main surface or the dielectric back surface corresponding to the first protruding portion, and a second electrode formed on a portion on the dielectric main surface or the dielectric back surface corresponding to the second protruding portion, as the electrode,
the first conductive portion extends in the first direction in a manner of opposing both of the first pad and the first electrode, and
the second conductive portion extends in the first direction in a manner of opposing both of the second pad and the second electrode.

11. The terahertz device of claim 10 , wherein
the first conductive portion includes:
a first element opposing portion, as the element opposing portion opposing the first pad in the thickness direction of the terahertz element; and
a first bump, as the bump disposed between the first pad and the first element opposing portion,

the second conductive portion includes:
a second element opposing portion, as the element opposing portion opposing the second pad in the thickness direction of the terahertz element; and
a second bump, as the bump disposed between the second pad and the second element opposing portion,

the first pad and the second pad extend in the second direction,
the first element opposing portion and the second element opposing portion extend in the second direction,
the first bump is arranged in plural in the second direction, and
the second bump is arranged in plural in the second direction.

12. The terahertz device of claim 4 , wherein
the conductive portion includes a first conductive portion and a second conductive portion, and
the first conductive portion and the second conductive portion extend in the first direction in a manner of being arranged in the second direction.

13. The terahertz device of claim 12 , wherein
the dielectric includes a first protruding portion and a second protruding portion arranged apart in the first direction, as the protruding portion,
the terahertz element includes a first pad and a second pad arranged apart in the second direction, as the pad,
the terahertz device includes a first electrode and a second electrode formed on the dielectric main surface or the dielectric back surface, as the electrode,
the first electrode and the second electrode are arranged in the second direction on either a part corresponding to the first protruding portion or a part corresponding to the second protruding portion,
the first conductiv

Assignees

• Rohm Co Ltd

Inventors

• Tsuruda Kazuisao

Classifications

• H10W72/551

  Materials of bond wires · CPC title

• H01Q19/13 Primary

  the primary radiating source being a single radiating element, e.g. a dipole, a slot, a waveguide termination (H01Q19/15 takes precedence) · CPC title

• H01L2223/6677

  Electricity · mapped topic

• H01L29/882

  Electricity · mapped topic

• H01Q1/2283

  mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package · CPC title