Magnetic sensor

Patent metadata

Field	Value
Publication number	US-11567148-B2
Application number	US-201816615062-A
Country	US
Kind code	B2
Filing date	May 21, 2018
Priority date	May 23, 2017
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

An object of the present invention is to reduce leakage magnetic flux in a magnetic sensor provided with a sensor substrate and an external magnetic member. A magnetic sensor includes: a sensor substrate having an element forming surface on which magnetic sensing elements are formed, first and second side surfaces, and a back surface; a first external magnetic member provided between the first and second magnetic sensing elements; and a second external magnetic member having first and second parts and covering the first side surface and second side surface, respectively. The first and second parts of the second external magnetic member protrude from the element forming surface. According to the present invention, since the first and second parts of the second external magnetic member protrude from the element forming surface, leakage of magnetic flux between the first and second external magnetic members is reduced.

First claim

What is claimed is:

1. A magnetic sensor comprising:
a sensor substrate having an element forming surface on which a plurality of magnetic sensing elements including first and second magnetic sensing elements arranged in a first direction are formed, a back surface positioned on an opposite side of the element forming surface, and first and second side surfaces substantially perpendicular to the element forming surface and the back surface and positioned opposite to each other;
a first external magnetic member provided on the element forming surface and disposed between the first and second magnetic sensing elements in a plan view; and
a second external magnetic member having a first part covering the first side surface and a second part covering the second side surface,
wherein the first magnetic sensing element is positioned between the first external magnetic member and the first part of the second external magnetic member in a plan view,
wherein the second magnetic sensing element is positioned between the first external magnetic member and the second part of the second external magnetic member in a plan view,
wherein the first part of the second external magnetic member has a first protruding part protruding beyond the element forming surface toward a side where the first external magnetic member is disposed, the first protruding part being disposed on the side, relative to the element forming surface,
wherein the second part of the second external magnetic member has a second protruding part protruding beyond the element forming surface toward the side where the first external magnetic member is disposed, the second protruding part being disposed on the side, relative to the element forming surface,
wherein the first protruding part has a first overhanging part extending toward the first external magnetic member to cover the element forming surface, and
wherein the second protruding part has a second overhanging part extending toward the first external magnetic member to cover the element forming surface.

2. The magnetic sensor as claimed in claim 1 , wherein a protruding amount of each of the first protruding part and the second protruding part from the element forming surface is equal to or less than a distance between the first external magnetic member and each of the first protruding part and the second protruding part in the first direction along the element forming surface.

3. The magnetic sensor as claimed in claim 1 , wherein each of the first and second parts of the second external magnetic member has a tapered shape in which a thickness thereof gradually increases from an element forming surface side toward a back surface side.

4. The magnetic sensor as claimed in claim 1 , wherein the second external magnetic member further has a third part that covers the back surface.

5. The magnetic sensor as claimed in claim 1 , wherein the first and second parts of the second external magnetic member are formed separately from each other so that the back surface of the sensor substrate is exposed without being covered with the second external magnetic member.

6. The magnetic sensor as claimed in claim 1 , wherein each of the first and second overhanging parts has a shape in which a width thereof is reduced toward the first external magnetic member.

7. The magnetic sensor as claimed in claim 1 , wherein each of the first and second overhanging parts has a shape in which a thickness thereof is reduced toward the first external magnetic member.

8. The magnetic sensor as claimed in claim 1 , further comprising first, second and third magnetic films formed so as to overlap the element forming surface of the sensor substrate in a plan view,
wherein the first magnetic sensing element is provided on a magnetic path formed by a first gap between the first and second magnetic films,
wherein the second magnetic sensing element is provided on a magnetic path formed by a second gap between the first and third magnetic films, and
wherein the first external magnetic member is provided on the first magnetic film.

9. The magnetic sensor as claimed in claim 8 , wherein the first overhanging part covers at least a part of the second magnetic film, and the second overhanging part covers at least a part of the third magnetic film.

10. The magnetic sensor as claimed in claim 2 , wherein each of the first and second parts of the second external magnetic member has a tapered shape in which a thickness thereof gradually increases from an element forming surface side toward a back surface side.

11. The magnetic sensor as claimed in claim 6 , wherein each of the first and second overhanging parts has a shape in which a thickness thereof is reduced toward the first external magnetic member.

Assignees

• Tdk Corp

Inventors

• Lin Chengbin

Classifications

• G01R33/072 Primary

  Constructional adaptation of the sensor to specific applications · CPC title

• G01R33/093

  using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00) · CPC title

• G01R33/0011 Primary

  comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor · CPC title

• G01R33/091

  Constructional adaptation of the sensor to specific applications · CPC title

• G01R33/06

  using galvano-magnetic devices · CPC title