Coating apparatus and movable electrode arrangement, movable support arrangement, and application thereof

Patent metadata

Field	Value
Publication number	US-11555247-B2
Application number	US-202017251778-A
Country	US
Kind code	B2
Filing date	Jan 4, 2020
Priority date	Sep 20, 2019
Publication date	Jan 17, 2023
Grant date	Jan 17, 2023

Abstract

A coating apparatus and movable electrode arrangement, movable support arrangement, and application thereof are disclosed. The coating apparatus includes a reactor chamber body and a movable support arrangement. The reactor chamber body has a reactor chamber. The movable support arrangement is received in the reactor chamber and includes one or more electrodes and a movable support. The movable support is adapted for rotating relative to the reactor chamber body. At least one of the electrodes is arranged on the movable support so as for rotating together with the movable support. One or more workpieces to be coated are adapted for being held on the movable support to move together with the movable support.

First claim

What is claimed is:

1. A coating apparatus for coating one or more workpieces, comprising:
a reactor chamber body having a reactor chamber and a feed inlet communicating with said reactor chamber;
a feeding arrangement communicatively connected to said feed inlet for feeding a reactant gas in said reactor chamber;
a gas extracting arrangement communicatively connected with said reactor chamber body for extracting the reactant gas; and
a movable support arrangement, which is movably received in said reactor chamber, comprising:
one or more electrodes; and
a movable support, arranged in a movable manner relative to the reactor chamber body, wherein said one or more electrodes are arranged on said movable support in a manner that said one or more electrodes are movable together with said movable support for forming an ionized environment when said one or more electrodes are electrified for ionizing the reactant gas in said reactor chamber for depositing on one or more surfaces of the one or more workpieces, which are supported on said movable support and moved together with said movable support, for forming coating layers on the one or more surfaces of the one or more workpieces;
wherein said movable support arrangement further comprises one or more carriers adapted for holding the one or more workpieces thereon and arranged at said movable support in such a manner that said one or more carriers are movable relative to said one or more electrodes so as for moving the one or more workpieces for relative movement with respect to said one or more electrode.

2. The coating apparatus, as recited in claim 1 , wherein said one or more carriers are rotatable around a first axis of said movable support while each of said one or more carriers is rotatable around a second axis at the same time so as for moving the one or more workpieces placed on said one or more carriers respectively for relative rotation movement with respect to said one or more electrodes.

3. The coating apparatus, as recited in claim 1 , wherein said movable support arrangement further comprises one or more carrier supports movably arranged at said movable support, wherein at least one of said one or more carriers is mounted to one of said one or more carrier supports so that said one or more carriers are driven to move relative to said moveable support by said one or more carrier supports respectively while said movable support is movable relative to said reactor chamber body.

4. The coating apparatus, as recited in claim 2 , wherein said movable support arrangement further comprises one or more carrier supports rotatably mounted to said movable support, wherein each of said one or more carrier supports is rotatable about said second axis that is a central axis of said respective carrier support, wherein at least one of said one or more carriers is mounted to each of said one or more carrier supports in such manner that said one or more carriers are driven to rotate by said one or more carrier supports respectively relative to said movable support, while said movable support is able to be revolved about said first axis relative to said reactor chamber body at the same time.

5. The coating apparatus, as recited in claim 1 , wherein each of said one or more electrodes is arranged at a circumferential direction of said movable support and has an electrical discharge surface arranged facing towards a central axis of said movable support.

6. The coating apparatus, as recited in claim 3 , wherein each of said one or more electrodes is arranged at a circumferential direction of said movable support and has an electrical discharge surface arranged facing towards a central axis of said movable support.

7. The coating apparatus, as recited in claim 4 , wherein each of said one or more electrodes is arranged at a circumferential direction of said movable support and has an electrical discharge surface arranged facing towards a central axis of said movable support.

8. The coating apparatus, as recited in claim 1 , wherein each of said one or more electrodes has an electrical discharge surface arranged for facing towards at least one of said one or more carriers.

9. The coating apparatus, as recited in claim 4 , wherein each of said one or more electrodes has an electrical discharge surface arranged for facing towards at least one of said one or more carriers.

10. The coating apparatus, as recited in claim 1 , wherein each of said one or more electrodes is arranged at a radial direction of said movable support.

11. The coating apparatus, as recited in claim 3 , wherein each of said one or more electrodes is arranged between two adjacent carrier supports of said one or more carrier supports and faces towards said two adjacent carrier supports.

12. The coating apparatus, as recited in claim 4 , wherein each of said one or more electrodes is arranged between two adjacent carrier supports of said one or more carrier supports and faces towards said two adjacent carrier supports.

13. The coating apparatus, as recited in claim 3 , wherein two adjacent electrodes of said one or more electrodes form a V-shaped configuration with a V-shaped opening facing outwards, wherein said two adjacent electrodes are respectively and correspondingly facing towards two adjacent carrier supports of said one or more carrier supports.

14. The coating apparatus, as recited in claim 4 , wherein two adjacent electrodes of said one or more electrodes form a V-shaped configuration with a V-shaped opening facing outwards, wherein said two adjacent electrodes are respectively and correspondingly facing towards two adjacent carrier supports of said one or more carrier supports.

15. The coating apparatus, as recited in claim 1 , wherein said movable support further comprises one or more electrical conducting members arranged corresponding to said one or more electrodes respectively, wherein each of said electrical conducting members and one of said one or more electrodes are two opposing electrodes.

16. The coating apparatus, as recited in claim 2 , wherein said movable support further comprises one or more electrical conducting members arranged corresponding to said one or more electrodes respectively, wherein each of said electrical conducting members and one of said one or more electrodes are two opposing electrodes.

17. The coating apparatus, as recited in claim 3 , wherein said movable support further comprises one or more electrical conducting members arranged corresponding to said one or more electrodes respectively, wherein each of said electrical conducting members and one of said one or more electrodes are two opposing electrodes.

18. The coating apparatus, as recited in claim 4 , wherein said movable support further comprises one or more electrical conducting members arranged corresponding to said one or more electrodes respectively, wherein each of said electrical conducting members and one of said one or more electrodes are two opposing electrodes.

19. The coating apparatus, as recited in claim 7 , wherein said movable support further comprises one or more electrical conducting members arranged corresponding to said one or more electrodes respectively, wherein each of said electrical conducting members and one of said one or more electrodes are two opposing electrodes.

20. The coating apparatus, as recited in claim 9 , wherein said movable support further comprises one or more electrical conducting members arranged corresponding to said one or more electrodes respectively, wherein each of said electrical

Assignees

• Jiangsu Favored Nanotechnology Co Ltd

Inventors

• Zong Jian

Classifications

• C23C16/458 Primary

  characterised by the method used for supporting substrates in the reaction chamber · CPC title

• H01J37/32733

  Means for moving the material to be treated · CPC title

• H01J37/32715

  Workpiece holder · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/455

  characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber · CPC title