Automatic optical inspection device and method

Patent metadata

Field	Value
Publication number	US-11549891-B2
Application number	US-201716306433-A
Country	US
Kind code	B2
Filing date	Jul 31, 2017
Priority date	May 31, 2016
Publication date	Jan 10, 2023
Grant date	Jan 10, 2023

Abstract

An automatic optical inspection (AOI) device and method are disclosed. The device is adapted to inspect an object under inspection (OUI) (102) carried on a workpiece stage (101) and includes: a plurality of detectors (111, 112) for capturing images of the OUI (102); a plurality of light sources (121, 122) for illuminating the OUI (102) in different illumination modes; and a synchronization controller (140) signal-coupled to both the plurality of detectors (111, 112) and the plurality of light sources (121, 122). The synchronization controller (140) is configured to directly or indirectly control the plurality of detectors (111, 112) and the plurality of light sources (121, 122) based on the position of the OUI (102) so that each of them is individually activated and deactivated according to a timing profile, that each of the detectors (111, 112) is able to capture images of the OUI (102) in an illumination mode provided by a corresponding one of the light sources (121, 122), and that when any one of the light sources (121, 122) is illuminating the OUI (102), only the one of the detectors (111, 112) corresponding to this light source (121, 122) is activated. Through the timing control over the multiple light sources (121, 122) and detectors (111, 112) by the synchronization controller (140), inspection with multiple measurement configurations can be accomplished within a single scan, resulting in a significant improvement in inspection efficiency.

First claim

What is claimed is:

1. An automatic optical inspection device for inspecting an object under inspection carried on a workpiece stage, comprising:
the workpiece stage being able to send out a first signal during movement for scanning;
a plurality of detectors for capturing images of the object under inspection;
a plurality of light sources for illuminating the object under inspection with different illumination modes; and
a synchronization controller signal-coupled to the plurality of detectors and the plurality of light sources, the synchronization controller configured to directly or indirectly control the plurality of detectors and the plurality of light sources based on a position of the object under inspection so that each of the plurality of detectors and the plurality of light sources is individually activated and deactivated according to a corresponding timing sequence, such that: each of the plurality of detectors is able to capture images of the object under inspection in an illumination mode provided by a corresponding one of the plurality of light sources; and when one of the plurality of light sources is illuminating the object under inspection, only one of the plurality of detectors corresponding to the one of the plurality of light sources is activated,
wherein each of the plurality of detectors is able to send a fourth signal to the synchronization controller when activated, wherein the synchronization controller is configured to receive the first signal sent by the workpiece stage and to provide a plurality of second signals to the plurality of detectors, and wherein the synchronization controller is further configured to, after receipt of the fourth signal, produce and send a third signal to a corresponding one of the plurality of light sources to activate the corresponding one of the plurality of light sources.

2. The automatic optical inspection device of claim 1 , wherein the synchronization controller is further signal-coupled to the workpiece stage, and wherein the position of the object under inspection is obtained from the first signal sent by the workpiece stage to the synchronization controller.

3. The automatic optical inspection device of claim 1 , further comprising a master computer signal-coupled to each of the plurality of detectors, the plurality of light sources, the workpiece stage and the synchronization controller.

4. The automatic optical inspection device of claim 1 , wherein the synchronization controller is configured to control the activation and deactivation of each of the plurality of detectors by sending the plurality of second signals to the plurality of detectors.

5. The automatic optical inspection device of claim 1 , wherein the plurality of light sources comprises at least two of a bright-field light source, a dark-field light source and an infrared light source.

6. The automatic optical inspection device of claim 1 , wherein the plurality of light sources are pulsed light generators.

7. The automatic optical inspection device of claim 6 , wherein the pulsed light generators are flickering LEDs or flickering Xe lamps.

8. The automatic optical inspection device of claim 5 , wherein the infrared light source is an infrared LED that emits light with a wavelength of 780 nm or longer.

9. The automatic optical inspection device of claim 1 , wherein the object under inspection is a wafer, an LED substrate or a TFT panel.

10. The automatic optical inspection device of claim 1 , wherein a number of the plurality of detectors is equal to a number of the plurality of light sources.

11. An automatic optical inspection (AOI) method for inspecting an object under inspection carried on a workpiece stage, comprising:
providing the workpiece stage being able to send out a first signal during movement for scanning;
providing a plurality of detectors for capturing images of the object under inspection, a plurality of light sources for illuminating the object under inspection with different illumination modes and a synchronization controller signal-coupled to the plurality of detectors and the plurality of light sources; and
directly or indirectly controlling, by the synchronization controller, the plurality of detectors and the plurality of light sources based on a position of the object under inspection so that each of the plurality of detectors and the plurality of light sources is individually activated and deactivated according to a corresponding timing sequence, such that: each of the plurality of detectors is able to capture images of the object under inspection in an illumination mode provided by a corresponding one of the plurality of light sources; and when one of the plurality of light sources is illuminating the object under inspection, only one of the plurality of detectors corresponding to the one of the plurality of light sources is activated,
wherein each of the plurality of detectors is able to send a fourth signal to the synchronization controller when activated, wherein the synchronization controller is configured to receive the first signal sent by the workpiece stage and provide a plurality of second signals to the plurality of detectors, and wherein the synchronization controller is further configured to, after receipt of the fourth signal, produce and send a third signal to a corresponding one of the plurality of light sources to activate the corresponding one of the plurality of light sources.

12. The automatic optical inspection method of claim 11 , comprising the steps of:
S 1 ) moving the object under inspection to a measurement position and sending the first signal to the synchronization controller, by the workpiece stage on which the object under inspection is carried;
S 2 ) sending the second signal to a first detector of the plurality of detectors by the synchronization controller, thereby triggering an activation of the first detector;
S 3 ) sending a third signal to a first light source of the plurality of light sources by the synchronization controller, emitting a first pulsed light by the first light source during the activation of the first detector, and obtaining images of the object under inspection by the first detector under an illumination of the first light source;
S 4 ) subsequent to completion of the illumination of the first light source, sending another second signal to a second detector of the plurality of detectors by the synchronization controller, thereby triggering an activation of the second detector;
S 5 ) after the first detector is deactivated, sending another third signal to a second light source of the plurality of light sources by the synchronization controller, emitting a second pulsed light by the second light source during the activation of the second detector, and obtaining images of the object under inspection by the second detector under an illumination of the second light source; and
S 6 ) moving the object under inspection to a new measurement position and sending another first signal to the synchronization controller by the workpiece stage, and repeating steps S 2 )-S 6 ) until images of the object under inspection have been captured at all measurement positions by the plurality of detectors under the illumination of the plurality of light sources.

13. The automatic optical inspection method of claim 11 , further comprising: providing a master computer signal-coupled to each of the plurality of detectors, the plurality of light sources, the workpiece stage and the synchronization controller; and setting parameters of the synchronization controller, parameters of the plurality of detectors, brightness levels of the plurality of light sources and controlling a mo

Assignees

• Shanghai Micro Electronics Equipment Group Co Ltd

Inventors

• Lu Hailiang
• Jia Junwei
• Zhang Pengli
• Zhou Hongji
• Xu Wen
• Wang Fan

Classifications

• G01N2021/8838

  Stroboscopic illumination; synchronised illumination · CPC title

• G01N2021/8825

  Separate detection of dark field and bright field · CPC title

• G01N2021/9513

  Liquid crystal panels · CPC title

• G01N2201/0696

  Pulsed · CPC title

• G01N21/8806 Primary

  Specially adapted optical and illumination features · CPC title