Thin film metrology
US-2023375330-A1 · Nov 23, 2023 · US
US11549795B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11549795-B2 |
| Application number | US-202117238351-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 23, 2021 |
| Priority date | Apr 23, 2021 |
| Publication date | Jan 10, 2023 |
| Grant date | Jan 10, 2023 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
Disclosed herein is a gauge for slurry coating thickness determination. The gauge includes a body and at least three probes extending from the body. The at least three probes provide a go-no-go indicator including a first demarcation that defines a minimum slurry coating thickness and a second demarcation that defines a maximum slurry coating thickness. A minimum no-go region is defined between the first demarcation and a probe tip, a maximum no-go region is defined between the second demarcation and the body, and a go region is defined between the first demarcation and the second demarcation.
Opening claim text (preview).
What is claimed is: 1. A gauge for slurry coating thickness determination, the gauge comprising: a body; and at least three probes extending from the body, the at least three probes providing a go-no-go indicator comprising a first demarcation that defines a minimum slurry coating thickness and a second demarcation that defines a maximum slurry coating thickness, wherein a minimum no-go region is defined between the first demarcation and a probe tip, a maximum no-go region is defined between the second demarcation and the body, and a go region is defined between the first demarcation and the second demarcation. 2. The gauge of claim 1 , wherein the probe tip of each of the at least three probes comprises a rounded profile. 3. The gauge of claim 1 , wherein the go region has a different color than the minimum no-go region and the maximum no-go region. 4. The gauge of claim 1 , wherein the go region has a different cross-sectional shape than the minimum no-go region and the maximum no-go region. 5. The gauge of claim 1 , wherein the go region has a different radial dimension than the minimum no-go region and the maximum no-go region. 6. The gauge of claim 1 , wherein the go region has a different surface texture than the minimum no-go region and the maximum no-go region. 7. The gauge of claim 1 , wherein the minimum no-go region, the maximum no-go region, and the go region are distributed between at least two of the at least three probes. 8. The gauge of claim 7 , wherein the at least three probes comprise: a go-probe having a first height offset with respect to at least one contact-probe configured to contact a solid surface of a component coated by a slurry; and a maximum-no-go-probe having a second height offset from the first height, wherein a tip of the go-probe comprises the first demarcation and a tip of the maximum-no-go-probe comprises the second demarcation. 9. The gauge of claim 1 , wherein the at least three probes comprise three pin gauges in a tripod distribution on a same surface of the body, and further wherein the at least three probes are rigid and statically coupled to the body. 10. A method for measuring a slurry coating thickness on a component, the method comprising: positioning at least two probe tips of a gauge comprising three or more probes on a solid surface of the component coated by a slurry, wherein the three or more probes extend from a body of the gauge; observing the slurry based on a go-no-go indicator after the at least two probe tips make contact with the solid surface of the component, wherein the go-no-go indicator comprises a first demarcation that defines a minimum slurry coating thickness and a second demarcation that defines a maximum slurry coating thickness, wherein a minimum no-go region is defined between the first demarcation and the probe tip, a maximum no-go region is defined between the second demarcation and the body, and a go region is defined between the first demarcation and the second demarcation; determining that the slurry coating thickness on the component exceeds a maximum thickness based on detecting the slurry level at the maximum no-go region; determining that the slurry coating thickness on the component is below a minimum thickness based on detecting the slurry level at the minimum no-go region; and determining that the slurry coating thickness on the component meets a target thickness based on detecting the slurry level at the go region. 11. The method of claim 10 , wherein the probe tip of each of the at least three probes comprises a rounded profile. 12. The method of claim 10 , wherein the go region has a different color than the minimum no-go region and the maximum no-go region. 13. The method of claim 10 , wherein the go region has a different cross-sectional shape than the minimum no-go region and the maximum no-go region. 14. The method of claim 10 , wherein the go region has a different radial dimension than the minimum no-go region and the maximum no-go region. 15. The method of claim 10 , wherein the go region has a different surface texture than the minimum no-go region and the maximum no-go region. 16. The method of claim 10 , wherein the at least three probes comprise: a go-probe having a first height offset with respect to at least one contact-probe configured to contact a solid surface of a component coated by a slurry; and a maximum-no-go-probe having a second height offset from the first height, wherein a tip of the go-probe comprises the first demarcation and a tip of the maximum-no-go-probe comprises the second demarcation. 17. The method of claim 10 , wherein the at least three probes comprise three pin gauges in a tripod distribution on a same surface of the body, and further wherein the at least three probes are rigid and statically coupled to the body. 18. A system for slurry coating thickness determination, the system comprising: a gauge comprising a body and at least three probes extending from the body, the at least three probes providing a go-no-go indicator comprising a first demarcation that defines a minimum slurry coating thickness and a second demarcation that defines a maximum slurry coating thickness, wherein a minimum no-go region is defined between the first demarcation and a probe tip, a maximum no-go region is defined between the second demarcation and the body, and a go region is defined between the first demarcation and the second demarcation; a camera configured to observe a component; and a controller coupled to the camera, the controller configured to: observe a slurry on the component based on the go-no-go indicator after at least two probe tips of the at least three probes make contact with a solid surface of the component coated by the slurry; determine that the slurry coating thickness on the component exceeds a maximum thickness based on detecting the slurry level at the maximum no-go region; determine that the slurry coating thickness on the component is below a minimum thickness based on detecting the slurry level at the minimum no-go region; and determine that the slurry coating thickness on the component meets a target thickness based on detecting the slurry level at the go region. 19. The system of claim 18 , wherein the controller is configured to position the gauge with respect to the component. 20. The system of claim 18 , wherein the controller is configured to trigger an alert based on determining the slurry coating thickness using one or more images captured by the camera.
of coating · CPC title
of coating · CPC title
Wireless transmission of information between a sensor or probe and a control or evaluation unit · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.