Electromagnetic casting systems including furnaces and molds for producing silicon tubes

Patent metadata

Field	Value
Publication number	US-11534819-B2
Application number	US-201816753178-A
Country	US
Kind code	B2
Filing date	Oct 2, 2018
Priority date	Oct 5, 2017
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

A furnace for electromagnetic casting a tubular-shaped silicon ingot is provided. The furnace includes a mold, outer and inner induction coils and a support member. The mold includes an outer crucible and an inner crucible. The outer crucible is annular-shaped. The inner crucible is disposed in the outer crucible and spaced away from the outer crucible to provide a gap between the inner crucible and the outer crucible. The mold is configured to receive granular silicon in the gap. The outer induction coil disposed around the outer crucible. The inner induction coil disposed in the inner crucible. The outer induction coil and the inner induction coil are configured to heat and melt the granular silicon in the mold to form a tubular-shaped silicon ingot. The support member is configured to hold and move a seed relative to the mold during formation of the tubular-shaped silicon ingot on the seed.

First claim

What is claimed is:

1. A furnace for electromagnetic casting a tubular-shaped silicon ingot, the furnace comprising:
a mold comprising an outer crucible and an inner crucible, wherein the outer crucible is annular-shaped, wherein the inner crucible is disposed in the outer crucible and spaced away from the outer crucible to provide a gap between the inner crucible and the outer crucible, wherein the mold is configured to receive granular silicon in the gap, and
wherein
the inner crucible comprises a plurality of plates, the plurality of plates are
disposed to provide a tubular-shaped structure,
not spaced apart at a top of the tubular-shaped structure,
spaced apart at a bottom of the tubular-shaped structure such that gaps exist between adjacent ones of the plurality of plates at the bottom of the tubular-shaped structure, and
disconnected distinct plates that are able to move relative to each other;

an outer induction coil disposed around the outer crucible;
an inner induction coil disposed in the inner crucible, wherein the outer induction coil and the inner induction coil are configured to heat and melt the granular silicon in the mold to form the tubular-shaped silicon ingot; and
a support member configured to hold and move a seed relative to the mold during formation of the tubular-shaped silicon ingot on the seed.

2. The furnace of claim 1 , further comprising a plurality of heaters configured to heat the tubular-shaped silicon ingot subsequent to being pulled from the mold.

3. The furnace of claim 1 , further comprising:
a plurality of hoppers; and
a plurality of feeders supplying the granular silicon and a dopant to the plurality of hoppers,
wherein
the plurality of hoppers guide the granular silicon and the dopant into the gap in the mold, and
the outer crucible is funnel-shaped to guide the granular silicon and the dopant from the hoppers into the gap in the mold.

4. The furnace of claim 1 , wherein the plurality of plates are placed in a circle to provide a circular side wall.

5. The furnace of claim 4 , wherein the plurality of plates are spaced apart to allow the plates to deflect while experiencing contraction forces on the plates by the tubular-shaped silicon ingot during cooling of the tubular-shaped silicon ingot.

6. The furnace of claim 4 , wherein the plurality of plates comprise coolant channels configured to receive a coolant to cool the inner crucible.

7. The furnace of claim 1 , wherein the inner crucible has a closed bottom end.

8. The furnace of claim 1 , wherein the inner crucible has an open bottom end.

9. The furnace of claim 1 , wherein the inner crucible extends below a bottom of the outer crucible.

10. The furnace of claim 1 , wherein a sidewall of the inner crucible is tapered, such that a lower outer diameter of the inner crucible is less than an upper outer diameter of the inner crucible.

11. An electromagnetic casting system comprising:
the furnace of claim 1 ;
at least one sensor for detecting at least one parameter of the furnace; and
a control module configured to, based on the at least one parameter, control a pull rate of the support member away from the mold.

12. The electromagnetic casting system of claim 11 , wherein the control module is configured to, based on the at least one parameter, control (i) flow of the granular silicon into the mold, and (ii) current to the outer induction coil and the inner induction coil.

13. A mold for forming a tubular-shaped silicon ingot, the mold comprising:
an outer crucible, wherein the outer crucible is annular-shaped; and
an inner crucible disposed in the outer crucible, such that the outer crucible surrounds the inner crucible, wherein a gap exists between the outer crucible and the inner crucible, wherein the outer crucible and the inner crucible are configured to receive granular silicon in the gap,
wherein the inner crucible comprises a plurality of plates, wherein the plurality of plates comprise inner surfaces, sides, and outer surfaces, wherein the inner surfaces face each other and are disposed along an inner circular perimeter, wherein the plurality of plates are disposed to provide a tubular-shaped structure and are disconnected distinct plates that are able to move relative to each other, and
wherein the plurality of plates are disposed, such that the plurality of plates are not spaced apart at a top of the tubular-shaped structure and are spaced apart at a bottom of the tubular-shaped structure such that gaps exist between adjacent ones of the plurality of plates at the bottom of the tubular-shaped structure for displacement of the plurality of plates radially inward while experiencing contraction forces of the tubular-shaped silicon ingot on the outer surfaces during solidification of the tubular-shaped silicon ingot.

14. The mold of claim 13 , wherein the outer surfaces are disposed along an outer circular perimeter of the inner crucible.

15. The mold of claim 13 , wherein the gaps between the plurality of plates exist for a bottom portion of the inner crucible and do not exist for an upper portion of the inner crucible.

16. The mold of claim 13 , wherein the inner crucible has a closed bottom end.

17. The mold of claim 13 , wherein the inner crucible has an open bottom end.

18. The mold of claim 13 , wherein the inner crucible extends below a bottom of the outer crucible.

19. The mold of claim 13 , wherein the inner crucible comprises coolant channels for receiving a coolant to cool the inner crucible.

20. An electromagnetic casting system comprising:
the mold of claim 19 ;
a first sensor for detecting a first parameter of the mold; and
a control module configured to, based on the first parameter, control temperature and flow of coolant to the inner crucible.

21. The electromagnetic casting system of claim 20 , further comprising:
an outer induction coil surrounding the outer crucible;
an inner induction coil disposed in the inner crucible;
a support member configured to hold a seed; and
a second sensor configured to detect a second parameter,
wherein the control module is configured to, based on the first parameter and the second parameter, control (i) a pull rate of the support member away from the mold, (ii) flow of the granular silicon into the mold, and (ii) current to the outer induction coil and the inner induction coil.

22. The furnace of claim 1 , wherein the plurality of plates are separated to allow the plurality of plates to deflect radially.

23. The furnace of claim 1 , wherein widths of gaps between the adjacent ones of the plurality of plates increases from tops of the plurality of plates to bottoms of the plurality of the plates.

24. The mold of claim 13 , wherein the plurality of plates are separated to allow the plurality of plates to deflect radially.

25. The mold of claim 13 , wherein widths of gaps between the adjacent ones of the plurality of plates increases from tops of the plurality of plates to bottoms of the plurality of the plates.

Assignees

• Lam Res Corp

Inventors

• Peidous Igor
• Nithiananthan Vijay

Classifications

• C30B29/66

  Crystals of complex geometrical shape, e.g. tubes, cylinders · CPC title

• C30B11/002

  Crucibles or containers for supporting the melt · CPC title

• B22D27/003

  by using inert gases · CPC title

• B22D27/04

  Influencing the temperature of the metal, e.g. by heating or cooling the mould · CPC title

• B22D7/064

  Cooling the ingot moulds · CPC title