Mist generator, film formation apparatus, and method of forming film using the film formation apparatus

Patent metadata

Field	Value
Publication number	US-11534791-B2
Application number	US-202015931968-A
Country	US
Kind code	B2
Filing date	May 14, 2020
Priority date	Jun 3, 2019
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

A mist generator may include a reservoir storing a solution, a plurality of ultrasonic vibrators, a mist delivery path, and a mist collector. The plurality of ultrasonic vibrators may be disposed under the reservoir and configured to apply ultrasonic vibration to the solution stored in the reservoir to generate mist of the solution in the reservoir. The mist delivery path may be configured to deliver the mist from an inside of the reservoir to an outside of the reservoir. The mist collector may be disposed above the solution in the reservoir, wherein an upper end of the mist collector may be connected to an upstream end of the mist delivery path, a lower end of the mist collector may include an opening, and a width of the mist collector may increase from the upper end toward the opening. The plurality of ultrasonic vibrators may be located directly under the opening.

First claim

What is claimed is:

1. A mist generator comprising:
a reservoir storing a solution and having a cylindrical shape;
a plurality of ultrasonic vibrators disposed under the reservoir and configured to apply ultrasonic vibration to the solution stored in the reservoir to generate mist of the solution in the reservoir;
a mist delivery path configured to deliver the mist from an inside of the reservoir to an outside of the reservoir;
a mist collector disposed above the solution in the reservoir, wherein an upper end of the mist collector is connected to an upstream end of the mist delivery path, a lower end of the mist collector including an opening, and a width of the mist collector increases from the upper end toward the opening; and
a plurality of carrier gas supply paths configured to discharge carrier gas into the reservoir,
wherein
the plurality of ultrasonic vibrators is located directly under the opening,
a discharge port of each of the plurality of carrier gas supply paths is located on a peripheral side of the reservoir that is radially outward from the opening,
the plurality of carrier gas supply paths extends along a tangential direction of an inner lateral surface of the reservoir, and discharges the carrier gas along the inner lateral surface of the reservoir in a circumferential direction of the reservoir, and
the carrier gas discharged from the plurality of carrier gas supply paths flows into the mist collector while flowing vortically along the inner lateral surface of the reservoir.

2. The mist generator of claim 1 , wherein
the discharge port of each of the plurality of carrier gas supply paths is located above the opening.

3. The mist generator of claim 1 , wherein
a relationship of h≥H is satisfied, where h is a distance from the ultrasonic vibrators to a liquid surface of the solution and H is a distance from the liquid surface to the opening.

4. The mist generator of claim 1 , wherein a perpendicular line to a vibration surface of each ultrasonic vibrator of the plurality of ultrasonic vibrators is inclined toward a center of the opening.

5. A film formation apparatus comprising:
the mist generator of claim 1 ; and
a furnace configured to house a substrate so as to heat the substrate,
wherein
a downstream end of the mist delivery path is connected to the furnace, and
the film formation apparatus supplies the mist of the solution to a surface of the substrate to grow a film on the surface of the substrate.

6. A method of forming a film on the surface of the substrate using the film formation apparatus of claim 5 , wherein
the plurality of ultrasonic vibrators includes a first ultrasonic vibrator and a second ultrasonic vibrator,
the method comprises:
activating the first ultrasonic vibrator; and
activating the second ultrasonic vibrator after activating the first ultrasonic vibrator.

7. The method of claim 6 , further comprising:
stopping the first ultrasonic vibrator after activating the second ultrasonic vibrator; and
stopping the second ultrasonic vibrator after stopping the first ultrasonic vibrator.

Assignees

• Nagaoka Tatsuji
• Nishinaka Hiroyuki
• Yoshimoto Masahiro
• Denso Corp
• Nat Univ Corp Kyoto Inst Technology

Inventors

• Nagaoka Tatsuji
• Nishinaka Hiroyuki
• Yoshimoto Masahiro

Classifications

• H10P14/265 Primary

  using solutions · CPC title

• C30B25/14 Primary

  Feed and outlet means for the gases; Modifying the flow of the reactive gases · CPC title

• B05B7/0012

  Apparatus for achieving spraying before discharge from the apparatus · CPC title

• C30B25/20

  the substrate being of the same materials as the epitaxial layer · CPC title

• C23C16/4486 Primary

  by producing an aerosol and subsequent evaporation of the droplets or particles · CPC title