OLED anode structures including amorphous transparent conducting oxides and OLED processing method comprising the same

Patent metadata

Field	Value
Publication number	US-11527732-B1
Application number	US-202217828360-A
Country	US
Kind code	B1
Filing date	May 31, 2022
Priority date	May 31, 2022
Publication date	Dec 13, 2022
Grant date	Dec 13, 2022

Abstract

Exemplary methods of backplane processing are described. The methods may include forming a first metal oxide material on a substrate. The methods may include forming a metal layer over the first metal oxide material. The metal layer may be or include silver. The methods may include forming an amorphous protection material over the metal layer. The amorphous protection material may include a second metal oxide material. The methods may include forming a second metal oxide material over the amorphous protection material. The second metal oxide material may include a crystalline material having one or more grain boundaries. The grain boundaries may include one or more voids.

First claim

The invention claimed is:

1. An OLED device comprising:
a substrate;
an anode comprising:
a first portion of a first metal oxide material overlying the substrate, wherein the first metal oxide material comprises indium tin oxide (ITO);
a metal material overlying the first portion of the first metal oxide material;
a protective barrier overlying the metal material, wherein the protective barrier comprises an amorphous protection material; and
a second portion of the first metal oxide material overlying the protective barrier;

an OLED material electrically connected to the anode; and
a cathode electrically connected to the OLED material.

2. The OLED device of claim 1 , wherein the protective barrier further comprises a second metal oxide material between the metal material and the amorphous protection material.

3. The OLED device of claim 2 , wherein the second metal oxide material is the same metal oxide as the first metal oxide material.

4. The OLED device of claim 2 , wherein at least a portion of the second metal oxide material is crystallized.

5. An OLED device processing method comprising:
forming an anode on a substrate, wherein forming the anode comprises:
forming a first metal oxide material on the substrate;
forming a metal layer over the first metal oxide material;
forming an amorphous protection material over the metal layer, wherein the amorphous protection material comprises a second metal oxide; and
forming a second metal oxide material over the amorphous protection material, wherein the second metal oxide material comprises a crystalline material having one or more grain boundaries, wherein the grain boundaries comprise one or more voids;

forming an OLED material, wherein the OLED material is electrically connected to the anode; and
forming a cathode, wherein the cathode is electrically connected to the OLED material.

6. The OLED device processing method of claim 5 , wherein the first metal oxide material, the second metal oxide material, or both comprise indium tin oxide (ITO).

7. The OLED device processing method of claim 5 , wherein the metal layer comprises silver.

8. The OLED device processing method of claim 5 , wherein the second metal oxide of the amorphous protection material comprises indium zinc oxide (IZO), indium tin zinc oxide (ITZO), indium gallium zinc oxide (IGZO).

9. The OLED device processing method of claim 5 , wherein a thickness of the amorphous protection material is less than or about 50 nm.

10. The OLED device processing method of claim 5 , wherein the amorphous protection material is characterized by a volumetric crystallinity of less than or about 10 vol. %.

11. The OLED device processing method of claim 5 , wherein the amorphous protection material is deposited via physical vapor deposition.

12. The OLED device processing method of claim 5 , further comprising:
subsequent to forming the second metal oxide material, exposing the substrate to an etchant, wherein the amorphous protection material reduces an amount of etchant interacting with the metal layer.

13. The OLED device processing method of claim 5 , further comprising:
subsequent to forming the metal layer, forming a third metal oxide material over the metal layer.

14. The OLED device processing method of claim 13 , wherein the third metal oxide material is the same material as the first metal oxide material, the second metal oxide material, or both.

15. The OLED device processing method of claim 13 , wherein a combined thickness of the amorphous protection material, the second metal oxide material, the third metal oxide material is less than or about 100 nm.

16. The OLED device processing method of claim 15 , wherein the third metal oxide material comprises at least a portion of crystallized material.

17. A OLED device processing method comprising:
forming an anode on a substrate, wherein forming the anode comprises:
forming a first metal oxide material on the substrate;
forming a metal layer over the first metal oxide material, wherein the metal layer comprises silver;
forming a protective barrier over the metal layer, wherein the protective barrier comprises an amorphous protection material overlying the metal layer; and
forming a second metal oxide material over the amorphous protection material;

forming an OLED material, wherein the OLED material is electrically connected to the anode; and
forming a cathode, wherein the cathode is electrically connected to the OLED material.

18. The OLED device processing method of claim 17 , wherein the protective barrier further comprises a third metal oxide material between the metal layer and the amorphous protection material.

19. The OLED device processing method of claim 18 , wherein the third metal oxide material is a crystalline material.

20. The OLED device processing method of claim 17 , wherein the protective barrier is characterized by a thickness of less than or about 100 nm.

Assignees

• Applied Materials Inc

Inventors

• Chen Chung-Chia
• Lin Yu-Hsin
• Lee Jungmin
• Kato Takuji
• Haas Dieter
• Kim Si Kyoung
• Choung Ji Young

Classifications

• H01L2251/303

  Electricity · mapped topic

• H01L2251/308

  Electricity · mapped topic

• H01L51/5206

  Electricity · mapped topic

• H01L51/0017

  Electricity · mapped topic

• H01L2251/306

  Electricity · mapped topic