Fluorine-containing compound, substrate for patterning, photodegradable coupling agent, patterning method, and compound

Patent metadata

Field	Value
Publication number	US-11518731-B2
Application number	US-201816193526-A
Country	US
Kind code	B2
Filing date	Nov 16, 2018
Priority date	Aug 27, 2013
Publication date	Dec 6, 2022
Grant date	Dec 6, 2022

Abstract

A method for producing a fluorine-containing compound represented by General formula (1), wherein X represents a halogen atom or an alkoxy group, R1 represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, Rf1 and Rf2 are each independently a fluorinated alkoxy group, and n represents an integer of 0 or more.

First claim

What is claimed is:

1. A method for producing a fluorine-containing compound represented by the following General formula (1):

wherein
X represents a halogen atom or an alkoxy group,
R 1 represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms,
R f1 and R f2 are each independently a fluorinated alkoxy group, and
n represents an integer of 0 or more,

the method comprising:
performing a first reaction represented by following formula 1:

after the first reaction, performing a second reaction represented by following formula 1-1:

after the second reaction, performing a third reaction represented by following formula 1-2:

after the third reaction, performing a fourth reaction represented by following formula 1-3:

after the fourth reaction, performing a fifth reaction represented by following formula 2:

wherein
R f1′ and R f2′ are each independently a fluorinated alkyl group,
X represents a halogen atom or an alkoxy group,
R 1 represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms,
R f1 and R f2 are each independently a fluorinated alkoxy group, and
n represents an integer of 0 or more.

2. The method for producing a fluorine-containing compound according to claim 1 , wherein the fluorine-containing compound is a photodegradable coupling agent.

3. The method of producing the fluorine-containing compound according to claim 1 , wherein the fifth reaction represented by the formula 2 is conducted with dry-tetrahydrofuran (dry-THF).

Assignees

• Univ Kanagawa
• Nikon Corp

Inventors

• Yamaguchi Kazuo
• Kawakami Yusuke

Classifications

• G03F7/0755

  Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds (G03F7/0752 takes precedence) · CPC title

• C07C205/36

  to carbon atoms of the same non-condensed six-membered aromatic ring or to carbon atoms of six-membered aromatic rings being part of the same condensed ring system · CPC title

• C07D207/46

  with hetero atoms directly attached to the ring nitrogen atom · CPC title

• C07F7/1804 Primary

  Compounds having Si-O-C linkages (Si-O-acyl linkages C07F7/1896) · CPC title

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title