Ozonated water delivery system and method of use

Patent metadata

Field	Value
Publication number	US-11518696-B2
Application number	US-201916553033-A
Country	US
Kind code	B2
Filing date	Aug 27, 2019
Priority date	Aug 29, 2018
Publication date	Dec 6, 2022
Grant date	Dec 6, 2022

Abstract

The present application discloses a ozonated water delivery system which includes at least one contacting device in communication with at least one ultrapure water source configured to provide ultrapure water, at least one ultrapure water conduit coupled to the ultrapure water source, at least one solution in communication with the contacting device and the ultrapure water source via the ultrapure water conduit, one or more gas sources containing at least one gas in communication with at least one of the ultrapure water source, the ultrapure water conduit, and the solution conduit, at least one mixed gas conduit in communication with the at gas source and the contacting device and configured to provide at least one mixed gas to the contacting device, and at least one ozonated water output conduit may be in communication with the contacting device.

First claim

What is claimed:

1. An ozonated water delivery system, comprising:
a first contacting device;
at least one ultrapure water source configured to provide ultrapure water to the first contacting device;
at least one ultrapure water conduit coupled to the at least one ultrapure water source and the first contacting device;
at least one gas source providing at least one gas forming at least one solution when reacted with the ultrapure water;
at least one gas conduit in communication with the at least one gas source and at least one of the at least one ultrapure water source and the at least one ultrapure water conduit;
at least one solution conduit in communication with the first contacting device and the at least one ultrapure water source, the at least one solution conduit configured to receive the at least one solution and deliver the at least one solution to the first contacting device;
at least a second contacting device in communication with the first contacting device via at least one first contacting device conduit;
the at least one first contacting device conduit configured to transport ozonated water outputted from the first contacting device to the at least a second contacting device;
at least one mixed gas conduit in communication with the at least one gas source and the at least a second contacting device, the at least one mixed gas conduit configured to provide at least one mixed gas to the at least a second contacting device;
at least one off gas conduit in communication with the at least a second contacting device and the first contacting device, the at least one off gas conduit configured to direct a portion of the at least one mixed gas from the at least a second contacting device to the first contacting device; and
at least one ozonated water output conduit in communication with the at least a second contacting device.

2. The ozonated water delivery system of claim 1 , wherein the at least one of the first contacting device and the at least a second contacting device comprises at least one packed column contacting device.

3. The ozonated water delivery system of claim 1 , wherein the at least one of the first contacting device and the at least a second contacting device comprises at least one pack column contacting device including tower packing therein.

4. The ozonated water delivery system of claim 1 , wherein the at least one of the first contacting device and the at least a second contacting device comprises at least one membrane-based contacting device having at least one membrane module therein.

5. The ozonated water delivery system of claim 1 , further comprising at least one pump in communication with the first contacting device and the at least a second contacting device, the at least one pump configured to pump ozonated water outputted from the first contacting device to the at least a second contacting device.

6. The ozonated water delivery system of claim 1 , wherein the at least one gas source is configured to provide carbon dioxide to at least one of the at least one ultrapure water source, the at least one ultrapure water conduit, and the at least one solution conduit, thereby forming an aqueous carbon dioxide solution.

7. The ozonated water delivery system of claim 6 , wherein the at least one gas source is configured to flow carbon dioxide to at least one ultrapure water source, the at least one ultrapure water conduit, and the at least one solution conduit at a flow rate of about 0.01 SLPM to about 0.5 SLPM.

8. The ozonated water delivery system of claim 1 , wherein at least one mixed gas flowing from the at least one gas source to the at least a second contacting device via the at least one mixed gas conduit is comprised of oxygen, ozone, and carbon dioxide.

9. The ozonated water delivery system of claim 1 , wherein at least one mixed gas flowing from the at least one gas source to the at least a second contacting device via the at least one mixed gas conduit may include at least one gas selected from the group nitrogen, nitrogen dioxide, and dinitrogen dioxide.

10. The ozonated water delivery system of claim 1 , further comprising at least one of a processor, valve, mass flow controller, flow sensor, gauge, indicator, flow restrictor, pump, and sensor positioned on at least one of the at least one gas source, at least one ultrapure water source, at least one ultrapure water conduit, at least one solution conduit, a least one first contacting device conduit, at least one mixed gas conduit, at least one off gas conduit, and at least ozonated water outlet conduit.

Assignees

• Mks Instr Inc
• Mks Instr

Inventors

• Seiwert Heinrich Johannes
• Le Tiec Christiane
• Brammer Ulrich Alfred

Classifications

• B01F23/237613

  Ozone · CPC title

• C02F2201/782

  Ozone generators · CPC title

• C02F1/78 Primary

  with ozone {(C02F1/4672 takes precedence)} · CPC title

• C02F2103/04

  for obtaining ultra-pure water · CPC title

• B01F35/2132

  Concentration, pH, pOH, p(ION) or oxygen-demand (B01F35/2133 takes precedence) · CPC title