Liquid discharge apparatus, imprint apparatus, and method

Patent metadata

Field	Value
Publication number	US-11517922-B2
Application number	US-201816203941-A
Country	US
Kind code	B2
Filing date	Nov 29, 2018
Priority date	Dec 4, 2017
Publication date	Dec 6, 2022
Grant date	Dec 6, 2022

Abstract

A liquid discharge apparatus includes: a discharge head including a discharge portion configured to discharge a liquid; a cap configured to cap the discharge portion; a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap in a state in which the cap caps the discharge portion; an open/close unit configured to open/close a second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state when a negative pressure state of the interior of the cap, which is generated by suction by the suction unit, is canceled; and a filter arranged in the second fluid passage.

First claim

What is claimed is:

1. A liquid discharge apparatus comprising:
a discharge head including a discharge portion configured to discharge a liquid;
a cap including a bottom wall portion which faces the discharge portion, a first side wall portion and a second side wall portion both extending from the bottom wall portion, and configured to cap the discharge portion, wherein the first side wall portion is thicker than the second side wall portion;
a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap so as to generate a negative pressure state of the interior of the cap in a state in which the cap caps the discharge portion;
a second fluid passage including an outlet passage portion which connects with an opening in the first side wall portion, and a midway portion which connects with the outlet passage portion and extends toward the bottom wall portion, wherein the outlet passage portion and the midway portion form a bent passage,
an open/close unit configured to open/close the second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state so as to introduce outer air into the interior of the cap under the negative pressure state through the second fluid passage when the negative pressure state is canceled; and
a filter arranged in the midway portion and configured to prevent a foreign matter in the outer air from entering the interior of the cap.

2. The liquid discharge apparatus according to claim 1 , wherein the filter is arranged between the bottom wall portion of the cap and the open/close unit.

3. The liquid discharge apparatus according to claim 1 , wherein the filter captures the foreign matter whose particle size is not less than 10 nm.

4. The liquid discharge apparatus according to claim 1 , further comprising a flow velocity reducing portion arranged in the second fluid passage and configured to reduce a flow velocity of a fluid flowing through the second fluid passage.

5. The liquid discharge apparatus according to claim 4 , wherein the flow velocity reducing portion is a portion of which a sectional-area increases toward the opening in the first side wall portion.

6. The liquid discharge apparatus according to claim 1 , wherein if the open/close unit is in the open state, the interior of the cap communicates with outer air through the second fluid passage.

7. An imprint apparatus comprising a liquid discharge apparatus for discharging a resin onto a substrate, the liquid discharge apparatus including:
a discharge head including a discharge portion configured to discharge a liquid;
a cap including a bottom wall portion which faces the discharge portion, a first side wall portion and a second side wall portion both extending from the bottom wall portion, and configured to cap the discharge portion, wherein the first side wall portion is thicker than the second side wall portion;
a suction unit configured to suck an interior of the cap through a first fluid passage communicating with the interior of the cap so as to generate a negative pressure state of the interior of the cap in a state in which the cap caps the discharge portion;
a second fluid passage including an outlet passage portion which connects with an opening in the first side wall portion, and a midway portion which connects with the outlet passage portion and extends toward the bottom wall portion, wherein the outlet passage portion and the midway portion form a bent passage, an open/close unit configured to open/close the second fluid passage communicating with the interior of the cap, the open/close unit being set in an open state so as to introduce outer air into the interior of the cap under the negative pressure state through the second fluid passage when the negative pressure state is canceled; and a filter arranged in the midway portion and configured to prevent a foreign matter in the outer air from entering the interior of the cap.

8. The liquid discharge apparatus according to claim 1 , wherein the second fluid passage is bent in the first side wall portion.

9. The liquid discharge apparatus according to claim 1 , wherein the outlet passage portion extends toward the bottom wall portion.

10. The imprint apparatus according to claim 7 , wherein the filter is arranged between the bottom wall portion of the cap and the open/close unit.

11. The imprint apparatus according to claim 7 , wherein the filter captures the foreign matter whose particle size is not less than 10 nm.

12. The imprint apparatus according to claim 7 , further comprising a flow velocity reducing portion arranged in the second fluid passage and configured to reduce a flow velocity of a fluid flowing through the second fluid passage.

13. The imprint apparatus according to claim 12 , wherein the flow velocity reducing portion is a portion of which a sectional-area increases toward the opening in the first side wall portion.

14. The imprint apparatus according to claim 7 , wherein if the open/close unit is in the open state, the interior of the cap communicates with outer air through the second fluid passage.

15. The imprint apparatus according to claim 7 , wherein the second fluid passage is bent in the first side wall portion.

16. The imprint apparatus according to claim 7 , wherein the outlet passage portion extends toward the bottom wall portion.

Assignees

• Canon Kk

Inventors

• Arai Tsuyoshi

Classifications

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• B05B15/40

  Filters located upstream of the spraying outlets · CPC title

• B05B1/28 Primary

  with integral means for shielding the discharged liquid or other fluent material, e.g. to limit area of spray; with integral means for catching drips or collecting surplus liquid or other fluent material · CPC title

• B05B1/323

  the valve member being actuated by the pressure of the fluid to be sprayed (single unit outlet valves actuated by the pressure of the fluid to be sprayed B05B11/0062) · CPC title

• G03F7/2002

  with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image · CPC title