Optical module

Patent metadata

Field	Value
Publication number	US-11513339-B2
Application number	US-201816492691-A
Country	US
Kind code	B2
Filing date	Mar 14, 2018
Priority date	Mar 14, 2017
Publication date	Nov 29, 2022
Grant date	Nov 29, 2022

Abstract

An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region which is penetrated by the movable mirror, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. A portion of the movable mirror is positioned in the space.

First claim

The invention claimed is:

1. An optical module comprising:
a support layer;
a device layer which is provided on the support layer; and
a movable mirror which is mounted in the device layer,
wherein the device layer has
a mounting region which is penetrated by the movable mirror, and
a driving region which is connected to the mounting region,

wherein a space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer,
wherein a portion of the movable mirror is positioned in the space, and
wherein the movable mirror is fixed to the mounting region such that the movable mirror penetrates the mounting region both in a driving state of the movable mirror and in a non-driving state of the movable mirror.

2. The optical module according to claim 1 , further comprising:
an intermediate layer which is provided between the support layer and the device layer,
wherein a first opening is formed in the intermediate layer,
wherein a recess portion or a second opening is formed in the support layer,
wherein the space includes a region inside the first opening and a region inside the recess portion, or a region inside the first opening and a region inside the second opening, and
wherein the portion of the movable mirror is positioned in the region inside the recess portion or the region inside the second opening.

3. The optical module according to claim 2 ,
wherein the support layer is a first silicon layer of an SOI substrate,
wherein the device layer is a second silicon layer of the SOI substrate, and
wherein the intermediate layer is an insulating layer of the SOI substrate.

4. The optical module according to claim 1 ,
wherein a recess portion or an opening is formed in the support layer,
wherein the space includes a region inside the recess portion or a region inside the opening, and
wherein the portion of the movable mirror is positioned in the region inside the recess portion or the region inside the opening.

5. The optical module according to claim 1 ,
wherein a recess portion is formed in the device layer,
wherein the space includes a region inside the recess portion,
wherein the portion of the movable mirror is positioned in the region inside the recess portion.

6. The optical module according to claim 1 ,
wherein a first recess portion is formed in the device layer,
wherein a second recess portion or an opening is formed in the support layer,
wherein the space includes a region inside the first recess portion and a region inside the second recess portion, or a region inside the first recess portion and a region inside the opening, and
wherein the portion of the movable mirror is positioned in the region inside the second recess portion or the region inside the opening.

7. The optical module according to claim 1 ,
wherein a mirror surface of the movable mirror is positioned on a side opposite to the support layer with respect to the device layer.

8. The optical module according to claim 1 , further comprising:
a fixed mirror which is mounted in at least one of the support layer, the device layer, and an intermediate layer which is provided between the support layer and the device layer; and
a beam splitter which is mounted in at least one of the support layer, the device layer, and the intermediate layer,
wherein the movable mirror, the fixed mirror, and the beam splitter are disposed such that an interference optical system is constituted.

9. The optical module according to claim 8 , further comprising:
a light incident unit which is disposed such that measurement light is incident on the interference optical system from outside; and
a light emission unit which is disposed such that the measurement light is emitted from the interference optical system to the outside.

10. An optical module comprising:
a support layer;
a device layer which is provided on the support layer;
a movable mirror which is mounted in the device layer;
a fixed mirror which is mounted in at least one of the support layer, the device layer, and an intermediate layer which is provided between the support layer and the device layer; and
a beam splitter which is mounted in at least one of the support layer, the device layer, and the intermediate layer,
wherein the movable mirror, the fixed mirror, and the beam splitter are disposed such that an interference optical system is constituted,
wherein the device layer has
a mounting region which is penetrated by the movable mirror, and
a driving region which is connected to the mounting region,

wherein a space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer, and
wherein a portion of the movable mirror is positioned in the space.

11. The optical module according to claim 10 , further comprising:
a light incident unit which is disposed such that measurement light is incident on the interference optical system from outside; and
a light emission unit which is disposed such that the measurement light is emitted from the interference optical system to the outside.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Suzuki Tomofumi
• Sugimoto Tatsuya
• KOTANI Kyosuke

Classifications

• G01J3/0205

  Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows · CPC title

• G01J3/4532

  Devices of compact or symmetric construction (G01J3/4531 takes precedence) · CPC title

• G01J3/0218

  using optical fibers · CPC title

• G02B26/0841 Primary

  the reflecting element being moved or deformed by electrostatic means · CPC title

• B81B3/004

  Angular deflection · CPC title