Module for a vacuum pumping and/or abatement system

Patent metadata

Field	Value
Publication number	US-11512688-B2
Application number	US-201816763525-A
Country	US
Kind code	B2
Filing date	Nov 9, 2018
Priority date	Nov 13, 2017
Publication date	Nov 29, 2022
Grant date	Nov 29, 2022

Abstract

A module for a vacuum pumping and/or abatement system. The module comprises a frame defining a space, a plurality of facilities inputs configured to receive facilities from a facilities supply, a plurality of facilities outputs configured to output the received facilities out of the module, and a plurality of facilities connection lines located at least partially within the space defined by the frame. The plurality of facilities connection lines connect the facilities inputs to the facilities outputs. The module further comprises a controller configured to control supply of facilities received at the facilities inputs out of the facilities outputs; and control operation of one or more vacuum pumping and/or abatement apparatuses remote from the module.

First claim

The invention claimed is:

1. A vacuum pumping and/or abatement system, the system comprising:
a facilities module; and
one or more other modules connected to the facilities module, wherein at least one of the one or more other modules comprises a vacuum pumping and/or abatement apparatus; and wherein the facilities module comprises:
a frame defining a space;
a plurality of facilities inputs configured to receive facilities from a facilities supply;
a plurality of facilities outputs configured to output the received facilities out of the facilities module;
a plurality of facilities connection lines located at least partially within the space defined by the frame, the plurality of facilities connection lines connecting the facilities inputs to the facilities outputs; and
a controller configured to:
control supply of facilities received at the facilities inputs out of the facilities outputs; and
control operation of one or more vacuum pumping and/or abatement apparatuses remote from the facilities module.

2. The system of claim 1 , wherein the facilities module has a width which is less than or equal to 0.5 m.

3. The system of claim 2 , wherein the facilities module has a width which is less than or equal to 0.15 m.

4. The system of claim 1 , wherein the facilities module further comprises a tool interface configured to receive a tool signal from a tool, and wherein at least some of the control performed by the controller is based on the tool signal.

5. The system of claim 1 , wherein the plurality of facilities inputs are located at or proximate to a common side of the facilities module.

6. The system of claim 1 , wherein the plurality of facilities outputs are each located at or proximate to a lateral side of the facilities module.

7. The system of claim 4 , wherein the tool interface is located at or proximate to a top side of the facilities module.

8. The system of claim 5 , wherein the common side is a top side of the facilities module.

9. The system of claim 1 , wherein the facilities module further comprises a user interface configured to:
display information associated with the vacuum pumping and/or abatement system;
receive a user input; and
send a signal to the controller based on the user input.

10. The system of claim 1 , wherein the facilities module further comprises a drawer slidably mounted to the frame and configured to slide in and out of an opening in the frame, and wherein the controller is mounted to the drawer such that the controller is able to slide out of the opening in the frame along with the drawer.

11. The system of claim 1 , wherein the frame comprises at least one foot which is configured to be adjusted to vary a height of the facilities module.

12. The system of claim 1 , wherein the facilities include one or more facilities selected from the group consisting of: facilities fluid, electrical power, electrical signals, and optical signals.

13. The system of claim 12 , wherein the facilities include facilities fluid selected from the group consisting of: liquid coolant, city water, de-ionised water, clean dry air, methane, oxygen, nitrogen, and hydrogen.

14. A method for installing the vacuum pumping and/or abatement system of claim 1 , the method comprising:
positioning the facilities module at a location;
positioning the one or more other modules of the vacuum pumping and/or abatement system adjacent to the facilities module;
connecting the plurality of facilities inputs of the facilities module to the facilities supply using a plurality of facilities input lines; and
connecting the plurality of facilities outputs of the facilities module to the one or more other modules using facilities distribution lines.

Assignees

• Edwards Ltd

Inventors

• Deo Hammond
• Shaw Helen

Classifications

• F04B39/123

  Fluid connections · CPC title

• C23C14/564

  Means for minimising impurities in the coating chamber such as dust, moisture, residual gases · CPC title

• F04C25/02

  for producing high vacuum (sealing arrangements F04C27/00; silencing F04C29/06) · CPC title

• F04B37/14 Primary

  to obtain high vacuum · CPC title

• C23C16/4412 Primary

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title