Controls interface solution for energy savings

Patent metadata

Field	Value
Publication number	US-9740184-B2
Application number	US-94642310-A
Country	US
Kind code	B2
Filing date	Nov 15, 2010
Priority date	Nov 16, 2009
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

Methods and apparatus for enhanced control over electronic device manufacturing systems are provided herein. In some embodiments, the integrated sub-fab system may employ Ethernet and/or RS232 Serial communications through an open platform of apparatus to achieve a reduced carbon footprint during electronic device manufacturing. For this example, the system could include a process tool set and controller linked by sensors or software interconnect with one or more sub-fab or local factory auxiliary systems that can be operated in one or more states of energy consumption. These one or more auxiliary systems can be switched between different levels of energy consumption, as required by the process, via the controller. For many auxiliary components or systems the integrated sub-fab system utilizes existing signal outputs, for others they may employ secondary sensors or monitors.

First claim

What is claimed is:

1. An apparatus for providing a fail-safe communications standard for a power managed sub-fab, comprising:
a sub-fab configured to:
operate in a low power state based upon one or more commands received from a sub-fab front end controller;
tabulate an energy consumed by the sub-fab during sub-fab operation;
receive heartbeat signals sent from the sub-fab front end controller at regular intervals; and
operate in a full power operational state in response to failing to receive any heartbeat signals for a specified timeout interval,
wherein the sub-fab is further configured to reset setpoints to default values associated with an entry to the full power operational state for at least one of process gas, fuel, cool dry air (CDA), water, temperature, pressure, throttle valve position, or bypass valve position in response to failing to receive any heartbeat signals for the specified timeout interval.

2. The apparatus of claim 1 , wherein the specified timeout interval is two seconds.

3. The apparatus of claim 1 , wherein the sub-fab is further configured to re-enter the low power state in response to receiving any heartbeat signals after the sub-fab begins operating in the full power operational state.

4. The apparatus of claim 1 , wherein the heartbeat signals are only sent when the sub-fab is configured to operate in the low power state.

5. A method for providing a fail-safe communications standard for a power managed sub-fab, comprising:
operating the sub-fab in a low power state based upon one or more commands received from a sub-fab front end controller;
tabulating an energy consumed by the sub-fab during sub-fab operation;
receiving heartbeat signals sent from the sub-fab front end controller at regular intervals;
determining whether any heartbeat signals from the sub-fab front end controller has been received within a specified timeout interval; and
operating the sub-fab in a full power operational state in response to a failure to receive any heartbeat signals within the specified timeout interval,
resetting setpoints to default values associated with an entry to the full power operational state for at least one of process gas, fuel, cool dry air (CDA), water, temperature, pressure, throttle valve position, or bypass valve position in response to failing to receive any heartbeat signals for the specified timeout interval.

6. The method of claim 5 , wherein the specified timeout interval is two seconds.

7. The method of claim 5 , wherein the sub-fab is further configured to re-enter the low power state in response to receiving any heartbeat signals after the sub-fab begins operating in the full power operational state.

8. The method of claim 5 , wherein the heartbeat signals are only sent when the sub-fab is configured to operate in the low power state.

9. A system for providing a fail-safe communications standard for a power managed sub-fab, comprising:
a sub-fab front end controller configured to:
send one or more commands to a sub-fab to configure the sub-fab to operate in one or more low power states;
tabulate an energy consumed by the sub-fab during sub-fab operation; and
send heartbeat signals to the sub-fab to indicate that the sub-fab is still in communication with the sub-fab front end controller at regular intervals; and

a sub-fab configured to:
operate in the one or more low power states as configured by the sub-fab front end controller;
receive the heartbeat signals from the sub-fab front end controller at regular intervals; and
operate in a full power operational state and reset setpoints to default values associated with an entry to the full power operational state for at least one of process gas, fuel, cool dry air (CDA), water, temperature, pressure, throttle valve position, or bypass valve position in response to a failure to receive any heartbeat signals within a specified timeout interval.

10. The system of claim 9 , wherein the specified timeout interval is two seconds.

11. The system of claim 9 , wherein the sub-fab is further configured to re-enter one of the one or more low power states in response to receiving any heartbeat signals after the sub-fab begins operating in the full power operational state.

12. The system of claim 9 , wherein the heartbeat signals are only sent when the sub-fab is configured to operate in the one or more low power states.

Assignees

• Loldj Youssef A
• Cayer Maxime
• Tong Tony
• Gelo Miroslav
• Applied Materials Inc

Inventors

• Loldj Youssef A
• Cayer Maxime
• Tong Tony
• Gelo Miroslav

Classifications

• G05B19/042 Primary

  using digital processors (G05B19/05 takes precedence) · CPC title

• G05B2219/45031

  Manufacturing semiconductor wafers · CPC title

• Y02P80/10

  Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier · CPC title

• G05B2219/23316

  Standby, inactive, sleep or active, operation mode · CPC title

• G05B2219/25286

  Switch on power, awake controlled machine from standby if command signal · CPC title