Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production

Patent metadata

Field	Value
Publication number	US-11512409-B2
Application number	US-201716642183-A
Country	US
Kind code	B2
Filing date	Aug 30, 2017
Priority date	Aug 30, 2017
Publication date	Nov 29, 2022
Grant date	Nov 29, 2022

Abstract

The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: —providing a single crystalline diamond substrate or layer; —providing a first adhesion layer on the substrate or layer; —providing a second adhesion layer on the first adhesion layer: —providing a mask layer on the second adhesion layer; —forming at least one indentation or a plurality of indentations through the mask layer and the first and second adhesion layers to expose a portion or portions of the single crystalline diamond substrate or layer; and—etching the exposed portion or portions of the single crystalline diamond substrate or layer and etching entirely through the single crystalline diamond substrate or layer.

First claim

The invention claimed is:

1. Single crystalline diamond part production method including the steps of:
providing a single crystalline diamond substrate or layer;
providing a first adhesion layer on the single crystalline diamond substrate or layer;
providing a second adhesion layer on the first adhesion layer;
providing a mask layer on the second adhesion layer;
forming at least one indentation or a plurality of indentations through the mask layer and the first and second adhesion layers to expose a portion or portions of the single crystalline diamond substrate or layer;
etching the exposed portion or portions of the single crystalline diamond substrate or layer by exposing the indentation in the mask layer and the first and second adhesion layers as well as the exposed portion or portions of the single crystalline diamond substrate or layer to plasma etching and etching entirely through the single crystalline diamond substrate or layer; wherein the etching of the exposed portion or portions of the single crystalline diamond substrate or layer is carried out using plasma etching and using physical etching via acceleration of plasma created ions against the exposed portion or portions of the single crystalline diamond substrate or layer; and
releasing a free-standing single crystalline diamond part, so that the single crystalline diamond part is completely detached from any surrounding material or support material.

2. Method according to claim 1 , wherein the first adhesion layer is provided directly on a surface of the single crystalline diamond substrate or layer.

3. Method according to claim 1 , wherein the second adhesion layer is provided directly on the first adhesion layer.

4. Method according to claim 1 , wherein the first and second adhesion layers comprise or consist of different materials.

5. Method according to claim 1 , wherein the mask layer and/or the first adhesion layer and/or the second adhesion layer comprises or consists solely of a material that etches slower than single crystalline diamond.

6. Method according to claim 1 , wherein the mask layer and/or the first adhesion layer and/or the second adhesion layer comprises or consists solely of a material that etches slower than single crystalline diamond exposed to an oxygen based plasma etch.

7. Method according to claim 1 , wherein the single crystalline diamond substrate or layer is etched entirely through a thickness of between 1 μm and 1 mm.

8. Method according to claim 1 , wherein the produced single crystalline diamond part has a thickness between 1 μm and 1 mm.

9. Method according to claim 1 , wherein the etching of the exposed portion or portions of the single crystalline diamond substrate or layer is carried out using an oxygen based plasma etch.

10. Method according to claim 1 , wherein the etching of the exposed portion or portions of the single crystalline diamond substrate or layer is carried out using an oxygen based plasma etch and physical etching via acceleration of plasma created ions against the exposed portion or portions of the single crystalline diamond substrate or layer.

11. Method according to claim 1 , wherein the at least one indentation or the plurality of indentations define a single crystalline diamond part profile in the mask layer that is to be transferred to the single crystalline diamond substrate or layer.

12. Method according to claim 1 , further including the step of providing a sacrificial layer on the single crystalline diamond substrate or layer wherein the sacrificial layer comprises or consists solely of the same material as the first adhesion layer.

13. Method according to claim 1 , wherein the single crystalline diamond substrate or layer is attached to a substrate, or the method further includes the step of attaching the single crystalline diamond substrate or layer to a support prior to forming the at least one indentation or plurality of indentations.

14. Method according to claim 1 , further including the step of wet-etching sidewalls of the mask layer defining the at least one indentation or the plurality of indentations to smoothen the sidewalls prior to etching the exposed portion or portions of the single crystalline diamond substrate or layer.

15. Method according to claim 1 , wherein the single crystalline diamond part is released by removal of a sacrificial layer or removal of an attachment layer of the single crystalline diamond substrate or layer to a substrate.

16. Method according to claim 1 , further including the step of providing a profile forming layer on the mask layer for forming the at least one indentation or the plurality of indentations in the mask layer.

17. Method according to the previous claim 16 , further including the step of removing outer sections of the profile forming layer so that a central section of the profile forming layer remains on the mask layer for forming the at least one indentation or the plurality of indentations in an inner area of the mask layer.

Assignees

• Ecole Polytechnique Fed Lausanne Epfl

Inventors

• Quack Niels
• Toros Adrien
• Kiss Marcell
• Graziosi Teodoro
• Gallo Pascal

Classifications

• B81C1/00619

  Forming high aspect ratio structures having deep steep walls · CPC title

• B81C2201/0132

  Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling · CPC title

• B81C1/00396

  Mask characterised by its composition, e.g. multilayer masks · CPC title

• B81C1/00476

  removing a sacrificial layer (B81C1/00912 takes precedence) · CPC title

• C30B29/66 Primary

  Crystals of complex geometrical shape, e.g. tubes, cylinders · CPC title