Polishing system with support post and annular platen or polishing pad

Patent metadata

Field	Value
Publication number	US-11511388-B2
Application number	US-201916706465-A
Country	US
Kind code	B2
Filing date	Dec 6, 2019
Priority date	Aug 31, 2016
Publication date	Nov 29, 2022
Grant date	Nov 29, 2022

Abstract

A polishing system includes a platen having a top surface to support an annular polishing pad, a carrier head to hold a substrate in contact with the annular polishing pad, a support structure extending above the platen and to which one or more polishing system components are secured, and a support post. The platen is rotatable about an axis of rotation that passes through approximately a center of the platen. The first support post has an upper end coupled to and supporting the support structure and a lower portion that is supported on the platen or that extends through an aperture in the platen.

First claim

What is claimed is:

1. A polishing system, comprising:
a platen having a top surface to support an annular polishing pad, the platen rotatable about an axis of rotation that passes through approximately a center of the platen;
a carrier head to hold a substrate in contact with the annular polishing pad;
a support structure extending above the platen and to which one or more components of the polishing system are secured;
a first support post having an upper end coupled to and supporting the support structure and a lower portion that is supported on the platen at the axis of rotation or that extends through an aperture in the platen at the axis of rotation.

2. The polishing system of claim 1 , wherein the one or more components comprise one or more of the carrier head, a conditioner head, a polishing liquid delivery system, or a pad cleaner.

3. The polishing system of claim 1 , comprising an actuator on the support structure to move the one or more components laterally across the platen.

4. The polishing system of claim 1 , comprising a second support post positioned to a side of the platen, the second support post having an upper end coupled to and supporting the support structure and a lower end on a stationary support.

5. The polishing system of claim 4 , wherein the stationary support comprises a frame supporting the platen, and wherein the first support post extends through the aperture in the platen and the lower portion is secured to the frame.

6. The polishing system of claim 5 , comprising an in-situ monitoring system having a probe positioned in the aperture and configured to monitor a portion of the substrate that overhangs an edge of the aperture.

7. The polishing system of claim 5 , comprising a ring bearing supporting the platen on the frame.

8. The polishing system of claim 1 , wherein the lower portion of the first support post is supported on the platen.

9. The polishing system of claim 8 , comprising a rotary bearing coupling the platen to the first support post or coupling the first support post to the support structure.

10. The polishing system of claim 8 , wherein the platen comprises a recess in the top surface of the platen in approximately the center of the platen, the recess extending partially but not entirely through the platen, and the lower portion of the first support post extends into the recess.

11. The polishing system of claim 10 , comprising an in-situ monitoring system having a probe positioned in the recess and configured to monitor a portion of the substrate that overhangs an edge of the aperture.

12. The polishing system of claim 10 , comprising a conduit through the platen for liquid polishing residue to drain from the recess.

13. The polishing system of claim 7 , wherein the lower portion of the first support post is supported on a surface substantially coplanar with the top surface of the platen for supporting the polishing pad.

Assignees

• Applied Materials Inc

Inventors

• Butterfield Paul D
• Osterheld Thomas H
• Oh Jeonghoon
• Chang Shou-Sung
• Zuniga Steven M
• Redeker Fred C

Classifications

• B24B49/12

  involving optical means · CPC title

• B24B37/205

  provided with a window for inspecting the surface of the work being lapped · CPC title

• B24B41/02

  Frames; Beds; Carriages · CPC title

• B24B37/30

  for single side lapping of plane surfaces · CPC title

• B24B53/02

  of plane surfaces on abrasive tools (B24B53/017 takes precedence) · CPC title