Dicing apparatus and dicing method
US-9010225-B2 · Apr 21, 2015 · US
US11504869B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11504869-B2 |
| Application number | US-202117187538-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 26, 2021 |
| Priority date | Mar 6, 2019 |
| Publication date | Nov 22, 2022 |
| Grant date | Nov 22, 2022 |
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A workpiece processing device includes a workpiece supporting unit configured to support a workpiece so that the workpiece is rotatable around a first axis parallel to a central axis of the workpiece, a cutting unit having a blade configured to cut a surface of the workpiece, a detecting unit configured to calculate a position of a vertex of the surface in a direction along a second axis which is perpendicular to the first axis and parallel to the blade, and a control unit configured to control the workpiece supporting unit so that a cutting position on the surface is located at a vertex in the direction along the second axis, and relatively move the workpiece supporting unit and the cutting unit so that an incision direction of the blade is on a plane defined by the central axis and the cutting position, thereby forming a groove at the cutting position.
Opening claim text (preview).
The invention claimed is: 1. A workpiece processing device for processing a workpiece having an outwardly-convex curved-surface-shape surface that is non-cylindrical shape surface, comprising: a workpiece supporting unit, including a rotary table, configured to support the workpiece so that the workpiece is rotatable around a first axis; a cutting unit having a blade configured to cut, the surface of the workpiece supported by the workpiece supporting unit; a sensor unit, including a sensor, configured to measure the surface of the workpiece; and a processor, including processing circuitry operatively connected to the workpiece supporting unit, the cutting unit, and the sensor unit, configured to: calculate the outwardly-convex curved-surface-shape surface that is non-cylindrical shape surface of the workpiece on a plane perpendicular to the first axis based on a measurement result of the surface of the workpiece; and rotate the workpiece around the first axis based on the calculated outwardly-convex curved-surface-shape surface that is non-cylindrical shape surface of the workpiece and a cutting position at which a groove is formed on the surface of the workpiece so that the cutting position matches a vertex in a direction along a second axis which is perpendicular to the first axis and parallel to the blade, and relatively move the workpiece supporting unit and the cutting unit, thereby forming a groove at the cutting position, the processor being configured to form the groove at the cutting position in a state that an incision direction of the blade and the first axis being capable of deviating from each other. 2. The workpiece processing device according to claim 1 , wherein the processor is further configured to: calculate a normal line to the surface of the workpiece at the cutting position based on the outwardly-convex curved-surface-shape surface that is non-cylindrical shape surface of the workpiece, and rotate the workpiece around the first axis so that the normal line is parallel to a direction along a second axis which is perpendicular to the first axis and parallel to the blade, and relatively move the workpiece supporting unit and the cutting unit, thereby forming a groove at the cutting position. 3. The workpiece processing device according to claim 1 , wherein the processor is further configured to: calculate a tangent line to the surface of the workpiece at the cutting position based on the outwardly-convex curved-surface-shape surface that is non-cylindrical shape surface of the workpiece, and rotate the workpiece around the first axis so that the tangent line is perpendicular to a direction along a second axis which is perpendicular to the first axis and parallel to the blade, and relatively move the workpiece supporting unit and the cutting unit, thereby forming a groove at the cutting position. 4. The workpiece processing device according to claim 1 , further comprising a fixing surface on which the workpiece is fixed in the workpiece supporting unit, the fixing surface configured to be movable to adjust a cut-feeding direction of the blade.
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