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Dicing apparatus and dicing method
US9010225B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9010225-B2 |
| Application number | US-80991908-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 11, 2008 |
| Priority date | Dec 21, 2007 |
| Publication date | Apr 21, 2015 |
| Grant date | Apr 21, 2015 |
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Abstract
Official abstract text for this publication.
A dicing apparatus according to a first aspect of the present invention includes: a work table on which a work is mounted; a processing device which processes the work; an imaging device which images the work on the work table; a plurality of moving device which move the work table, the processing device, and the imaging device relatively to each other; and an alignment camera which is provided on the same moving device as the work table so as to face the imaging device, and which performs imaging in the direction toward the portion where the imaging device is provided. According to the dicing apparatus configured in this way, it is possible to easily measure the relative position of the imaging device and the processing device without processing a dummy work, and it is possible to perform excellent dicing processing without lowering the efficiency of the dicing apparatus.
First claim
Opening claim text (preview).
The invention claimed is: 1. A dicing apparatus, comprising: a work table on which a work is mounted; a processing device which processes the work; an imaging device which images the work on the work table; a plurality of moving devices which move the work table, the processing device, and the imaging device relatively to each other; an alignment camera which is provided on the same moving device as the work table so as to face the imaging device, and which performs imagin…
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Classifications
Cross-Sectional Technologies · mapped topic
- B24B49/12Primary
Operations & Transport · mapped topic
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
Operations & Transport · mapped topic
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Frequently asked questions
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- What does patent US9010225B2 cover?
- A dicing apparatus according to a first aspect of the present invention includes: a work table on which a work is mounted; a processing device which processes the work; an imaging device which images the work on the work table; a plurality of moving device which move the work table, the processing device, and the imaging device relatively to each other; and an alignment camera which is provided…
- Who is the assignee on this patent?
- Hojo Yoshitami, Tokyo Seimitsu Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification B24B49/12. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Apr 21 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).