Method of manufacturing EUV photo masks
US-12085843-B2 · Sep 10, 2024 · US
US11500297B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11500297-B2 |
| Application number | US-201916257578-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 25, 2019 |
| Priority date | Sep 21, 2017 |
| Publication date | Nov 15, 2022 |
| Grant date | Nov 15, 2022 |
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A coupling arrangement including a first fitting, a second fitting, and a rotational coupler which when turned presses the first fitting against the second fitting, in which the fittings engage rotationally to inhibit relative rotation of the fittings. For example, one of the fittings may have protrusions and the other fitting may have recesses arranged to receive the protrusions.
Opening claim text (preview).
What is claimed is: 1. Apparatus comprising: a first coupling subassembly extending in an axial direction, the first coupling subassembly including a gland and an insert having an aperture and a substantially circular circumference except for at least one protrusion extending radially outwardly from the substantially circular circumference; a fitting having an internal thread and additionally at least one recess arranged and dimensioned to receive the at least one protrusion; and a rotational coupling element rotatably surrounding the gland and adapted to be engaged with the insert such that the rotational coupling element is rotatable with respect to the insert and axially engageable with the insert to apply an axial compressive force to the insert, the insert having a first configuration such that when the insert is received in the fitting when the insert and the fitting are brought into axial engagement by rotation of the rotational coupling element in a first direction, the at least one protrusion and the at least one recess at least partially rotationally engage to prevent axial rotation of the insert with respect to the fitting in the first direction and in a second direction opposed to the first direction. 2. Apparatus as claimed in claim 1 wherein the aperture is circular and the at least one protrusion extends radially with respect to a center of the aperture, the gland extending through the aperture. 3. Apparatus as claimed in claim 1 wherein the rotational coupling element comprises a coupling nut. 4. Apparatus comprising: a first rotational coupling element; a first fitting adapted to be axially engaged with the first rotational coupling element, the first fitting comprising an insert having an aperture and a substantially circular circumference except for at least one protrusion extending radially outwardly from the substantially circular circumference; a second rotational coupling element; and a second fitting adapted to be axially engaged with the second rotational coupling element and with the first fitting, the second fitting having an internal thread and additionally comprising at least one recess arranged and dimensioned to receive the at least one protrusion; the at least one protrusion having a first configuration and the at least one recess having a second configuration, the first and second configurations being such that the first fitting is received in the second fitting when the first fitting and the second fitting are brought into axial engagement by relative rotation of the first and second rotational coupling elements and the at least one protrusion and the at least one recess at least partially rotationally engage to prevent axial rotation of the first fitting with respect to the second fitting. 5. Apparatus as claimed in claim 4 wherein the aperture is circular and the at least one protrusion extends radially with respect to a center of the aperture, the gland extending through the circular aperture, and wherein the at least one recess is arranged and dimensioned to axially receive the at least one protrusion. 6. Apparatus as claimed in claim 4 wherein the first configuration is complementary to the second configuration. 7. Apparatus as claimed in claim 4 wherein the first rotational coupling element comprises an externally threaded sleeve and the second rotational coupling element comprises an internally threaded sleeve. 8. Apparatus comprising: a first rotational coupling element; a first fitting adapted to be axially engaged with the first rotational coupling element; a second rotational coupling element; a second fitting adapted to be axially engaged with the second rotational coupling element and with the first fitting; the first fitting having a first configuration and the second fitting having a second configuration, the first and second configurations being such that the first fitting is received in the second fitting when the first fitting and the second fitting are brought into axial engagement by relative rotation of the first and second rotational coupling elements and the first fitting and the second fitting at least partially rotationally engage to prevent axial rotation of the first fitting with respect to the second fitting, wherein the first fitting comprises a gland and an insert having an aperture and at least two protrusions, the gland extending through the aperture, and wherein the second fitting has at least two recesses arranged and dimensioned to receive the at least two protrusions. 9. Apparatus comprising: a first rotational coupling element; a first fitting adapted to be axially engaged with the first rotational coupling element; a second rotational coupling element; a second fitting adapted to be axially engaged with the second rotational coupling element and with the first fitting; the first fitting having a first configuration and the second fitting having a second configuration, the first and second configurations being such that the first fitting is received in the second fitting when the first fitting and the second fitting are brought into axial engagement by relative rotation of the first and second rotational coupling elements and the first fitting and the second fitting at least partially rotationally engage to prevent axial rotation of the first fitting with respect to the second fitting, wherein the first fitting comprises a gland and an insert having a circular aperture and at least two protrusions extending radially with respect to a center of the circular aperture, the gland extending through the circular aperture, and wherein the second fitting has at least two recesses arranged and dimensioned to receive the at least one protrusion. 10. Apparatus as claimed in claim 9 wherein the first configuration and the second configuration lack circular symmetry. 11. Apparatus comprising: a first rotational coupling element; a first fitting adapted to be axially engaged with the first rotational coupling element; a second rotational coupling element; a second fitting adapted to be axially engaged with the second rotational coupling element and with the first fitting; the first fitting having a first configuration and the second fitting having a second configuration, the first and second configurations being such that the first fitting is received in the second fitting when the first fitting and the second fitting are brought into axial engagement by relative rotation of the first and second rotational coupling elements and the first fitting and the second fitting at least partially rotationally engage to prevent axial rotation of the first fitting with respect to the second fitting, wherein the first configuration and the second configuration lack circular symmetry. 12. Apparatus comprising: a first coupling subassembly extending in an axial direction, the first coupling subassembly including a first fitting arranged at an axial end of the first coupling subassembly; and a rotational coupling element rotatably surrounding the first coupling subassembly and adapted to be engaged with the first fitting such that the rotational coupling element is rotatable with respect to the first fitting and axially engageable with the first fitting to apply an axial compressive force to the first fitting, the first fitting having a first configuration such that when the first fitting is received in a second fitting when the first fitting and the second fitting are brought into axial engagement by rotation of the rotational coupling element in a first direction, the first fitting and the second fitting at least partially rotationally engage to prevent axial rotation of the first fitting with respect to
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