Physical vapor deposition of piezoelectric films

Patent metadata

Field	Value
Publication number	US-11489105-B2
Application number	US-201916691569-A
Country	US
Kind code	B2
Filing date	Nov 21, 2019
Priority date	Nov 12, 2019
Publication date	Nov 1, 2022
Grant date	Nov 1, 2022

Abstract

A method of fabricating a piezoelectric layer includes depositing a piezoelectric material onto a substrate in a first crystallographic phase by physical vapor deposition while the substrate remains at a temperature below 400° C., and thermally annealing the substrate at a temperature above 500° C. to convert the piezoelectric material to a second crystallographic phase. The physical vapor deposition includes sputtering from a target in a plasma deposition chamber.

First claim

What is claimed is:

1. A method of fabricating a piezoelectric layer, comprising:
depositing a piezoelectric material onto a substrate in a first crystallographic phase by physical vapor deposition while the substrate remains at a temperature below 400° C., wherein the physical vapor deposition includes sputtering from a target in a plasma deposition chamber;
maintaining the target at a temperature below 150° C. during the physical vapor deposition of the piezoelectric material; and
thermally annealing the substrate at a temperature above 500° C. to convert the piezoelectric material to a second crystallographic phase.

2. The method of claim 1 , wherein the second crystallographic phase is a perovskite phase.

3. The method of claim 2 , wherein the first crystallographic phase is an amorphous or a quasi-crystalline phase.

4. The method of claim 1 , wherein the piezoelectric material is selected from a group consisting of lead magnesium niobate-lead titanate (PMNPT), lead yttrium niobate-lead titanate (PYNPT), lead zirconate titanate (PZT), lead zirconium niobate-lead titanate (PZN-PT), and lead indium niobate-lead titanate (PIN-PT).

5. The method of claim 4 , wherein the piezoelectric material is lead magnesium niobate-lead titanate (PMNPT).

6. The method of claim 5 , wherein the PMNPT is (1−X)[Pb(Mg(1−Y)NbY)O3]-X[PbTiO3], where X is about 0.25 to 0.40 and Y is about 0.75 to 0.60.

7. The method of claim 6 , wherein thermally annealing the substrate comprises thermally annealing the substrate at a temperature of 500-800° C.

8. The method of claim 1 , comprising depositing the piezoelectric material to a thickness of 50 nm to 10 microns.

9. The method of claim 1 , wherein the physical vapor deposition includes applying power to the target at a power less than 1.5 W/cm2 of the target.

10. The method of claim 1 , wherein the physical vapor deposition includes alternating between deposition phases in which power is applied to the target and cooling phases in which power is not applied to the target, each deposition phase lasting at least 30 seconds and each cooling phase lasting at 30 seconds.

11. The method of claim 10 , wherein the cooling phases are longer than the deposition phases.

12. The method of claim 10 , wherein each deposition phase lasts at most five minutes.

13. The method of claim 10 , wherein each deposition phase lasts at most ten minutes.

14. The method of claim 1 , comprising maintaining a temperature of the substrate below 400° C. during the physical vapor deposition.

15. The method of claim 1 , comprising maintaining a temperature of the substrate by cooling a pedestal in the chamber that supports the substrate with a chiller.

16. A method of fabricating a piezoelectric layer, comprising:
depositing a piezoelectric material composed of lead magnesium niobate-lead titanate (PMNPT) onto a substrate in an amorphous phase by physical vapor deposition while the substrate remains at a temperature below 300° C., wherein the physical vapor deposition includes sputtering from a target in a plasma deposition chamber; and
thermally annealing the substrate at a temperature above 500° C. to convert the piezoelectric material to a perovskite phase, wherein the annealing includes raising the temperature of the substrate at a rate sufficient that substantially no pyrochlore phase crystal is formed in the piezoelectric material.

Assignees

• Applied Materials Inc

Inventors

• Sangle Abhijeet Laxman
• Sharma Vijay Bhan
• Kadam Ankur
• Ramakrishnan Bharatwaj
• Sivaramakrishnan Visweswaren
• Xue Yuan

Classifications

• C23C14/06

  characterised by the coating material ({C23C14/0021} , C23C14/04 take precedence) · CPC title

• C23C14/3485

  using pulsed power to the target · CPC title

• C23C14/10

  Glass or silica · CPC title

• C23C14/54

  Controlling or regulating the coating process · CPC title

• C23C14/351

  using a magnetic field in close vicinity to the substrate · CPC title