Spin coating device and method

Patent metadata

Field	Value
Publication number	US-11469121-B2
Application number	US-201816618309-A
Country	US
Kind code	B2
Filing date	May 25, 2018
Priority date	May 31, 2017
Publication date	Oct 11, 2022
Grant date	Oct 11, 2022

Abstract

A spin coating device and method. The spin coating device includes a rotatable rotary shaft and sucker fixed on an end portion of the shaft, and an electromagnetic induction device below the sucker which includes an annular magnet fixed below the sucker, coil group formed by a first and second coil, and strip-shaped magnet fixed at the rotary shaft. A base on the sucker has a notch. The unbalanced centrifugal force during rotation of the sucker causes vibration. The electromagnetic induction device enables the centrifugal force generated during rotation of the sucker to be in balance with the magnetic force generated by the electromagnetic induction device to adjust the levelness of the sucker surface. The device does not need manual manipulation, enables the sucker to be more stable, reduces damage to the equipment due to vibration, and improves the effect of photoresist spin-coating while saving time and labor.

First claim

What is claimed is:

1. A spin coating apparatus, comprising a rotatable shaft and a chuck secured at an end portion of the shaft, the shaft configured to, when rotating, drive the chuck to rotate, wherein an electromagnetic induction device is disposed under the chuck, so that a centrifugal force generated by a rotation of the chuck is brought in balance with a magnetic force generated by the electromagnetic induction device to adjust a surface levelness of the chuck, wherein the electromagnetic induction device comprises an annular magnet fixed to a lower surface of the chuck, one or more magnetic bars secured to the shaft and one or more coil groups disposed between the annular magnet and the one or more magnetic bars.

2. The spin coating apparatus of claim 1 , wherein the electromagnetic induction device comprises one or more electromagnetic elements and one or more magnetoelectric elements coupled to the one or more electromagnetic elements.

3. The spin coating apparatus of claim 2 , wherein the electromagnetic element comprises one or more first coils disposed in correspondence with an annular magnet fixed to a lower surface of the chuck, and wherein the magnetoelectric element comprises one or more magnetic bars secured to the shaft and one or more second coils provided in correspondence with the one or more magnetic bars.

4. The spin coating apparatus of claim 1 , wherein at least two coil groups are provided, which are uniformly distributed around the shaft.

5. The spin coating apparatus of claim 1 , wherein each of the coil groups comprises a first coil which is able to, when electrically powered, produce a magnetic force that interacts with the annular magnet; and a second coil configured to produce an electromagnetic induction with the one or more magnetic bars, wherein the first coil and the second coil in each of the coil groups are electrically coupled.

6. The spin coating apparatus of claim 5 , wherein at least one of the coil groups is disposed in positional correspondence with a notch of a substrate supported on the chuck, and wherein the first coil of the coil group that is disposed in positional correspondence with the notch has an opposite polarity to a portion of the annular magnet and the second coil of the coil group that is disposed in positional correspondence with the notch has an opposite polarity to a corresponding one of the magnetic bars.

7. The spin coating apparatus of claim 1 , wherein the one or more coil groups are fixed to a holder.

8. The spin coating apparatus of claim 1 , wherein eight coil groups are provided, and the eight coil groups are uniformly distributed around the shaft.

9. A spin coating method using the spin coating apparatus as defined in claim 1 , comprising:
providing a substrate to be coated on a chuck; and
upon rotation of the chuck driven by a shaft and upon a correspondingly generated centrifugal force causing different portions of the chuck to have different heights, exerting by an electromagnetic induction device a repulsive force to a portion of the chuck having a smaller height and an attractive force to another portion of the chuck having a greater height to adjust a surface levelness of the chuck.

Assignees

• Shanghai Micro Electronics Equipment Group Co Ltd

Inventors

• Lu Shiliang
• Ran hang
• Li Yihui
• Yan Xiaoping
• Zhao Jun
• Chen Shanshan

Classifications

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P72/0448 Primary

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H01L21/6715 Primary

  Electricity · mapped topic