Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such method
US-10054863-B2 · Aug 21, 2018 · US
US11467338B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11467338-B2 |
| Application number | US-202016807232-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 3, 2020 |
| Priority date | Aug 31, 2017 |
| Publication date | Oct 11, 2022 |
| Grant date | Oct 11, 2022 |
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A method of making an optical fiber sensor device for distributed sensing includes generating a laser beam comprising a plurality of ultrafast pulses, and focusing the laser beam into a core of an optical fiber to form a nanograting structure within the core, wherein the nanograting structure includes a plurality of spaced nanograting elements each extending substantially parallel to a longitudinal axis of optical fiber. Also, an optical fiber sensor device for distributed sensing includes an optical fiber having a longitudinal axis, a core, and a nanograting structure within the core, wherein the nanograting structure includes a plurality of spaced nanograting elements each extending substantially parallel to the longitudinal axis of the optical fiber. Also, a distributed sensing method and system and an energy production system that employs such an optical fiber sensor device.
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What is claimed: 1. A method of making an optical fiber sensor device structured for distributed sensing, comprising: generating a laser beam comprising a plurality of ultrafast pulses; and focusing the laser beam into a core of an optical fiber to form a nanograting structure within the core, wherein the nanograting structure includes a plurality of spaced nanograting elements each extending substantially parallel to a longitudinal axis of optical fiber, wherein the nanograting elements each extend in a first direction that is substantially parallel to the longitudinal axis of the optical fiber, wherein the nanograting elements are spaced in a periodic manner from one another and aligned and positioned immediately adjacent one another in a second direction that is substantially perpendicular to the first direction, and wherein there is no spacing between or within any of the nanograting elements in the first direction such that the core does not include any grating elements therein spaced from one another in the first direction. 2. The method according to claim 1 , wherein the plurality of ultrafast pulses comprises a plurality of femtosecond ultrafast pulses. 3. The method according to claim 2 , wherein each of the femtosecond ultrafast pulses is a sub-μJ laser pulse. 4. The method according to claim 1 , further comprising causing the laser beam and the optical fiber to be moved relative to one another during focusing such that the nanograting structure is formed within a longitudinally extending portion of the core. 5. The method according to claim 4 , wherein a position of the laser beam in a longitudinal direction is stationary and wherein the optical fiber is caused to move relative to the laser beam. 6. The method according to claim 4 , wherein the optical fiber is stationary and wherein the laser beam is caused to move relative to the optical fiber. 7. The method according to claim 1 , wherein a portion of the core surrounding the nanograting structure has a first refractive index and wherein each nanograting element has a second refractive index that is lower than the first refractive index. 8. The method according to claim 7 , wherein the second refractive index is 99% to 90% of the first refractive index. 9. The method according to claim 1 , wherein each nanograting element is generally planar and has a length that extends in the first direction, a width that extends in the second direction, and a height that extends in a third direction that is substantially perpendicular to the longitudinal axis of the optical fiber. 10. The method according to claim 9 , wherein the optical fiber sensor device is designed for use with an interrogating light having a wavelength, and wherein a spacing between each pair of immediately adjacent nanograting elements is less than or equal to one-fifth of the wavelength of the interrogating light. 11. The method according to claim 9 , wherein the optical fiber sensor device is designed for use with an interrogating light having a wavelength, and wherein a spacing between each pair of immediately adjacent nanograting elements is less than or equal to one-tenth of the wavelength of the interrogating light. 12. The method according to claim 9 , wherein a spacing between each immediately adjacent pair of nanograting elements is 750 nm or less. 13. The method according to claim 1 , wherein the optical fiber is a single-crystal optical fiber. 14. The method according to claim 13 , wherein the optical fiber is a sapphire: optical fiber. 15. The method according to claim 1 , further comprising annealing the optical fiber sensor device after the formation of the nanograting structure in the presence of a reactive gas. 16. The method according to claim 15 , wherein the reactive gas is hydrogen. 17. The method according to claim 15 , wherein the annealing is performed at a temperature that is greater than or equal to 700° C. 18. The method according to claim 17 , wherein the annealing is performed at a temperature that is greater than or equal to 800° C. 19. The method according to claim 15 , wherein the annealing causes a plurality of voids to be formed within the core. 20. The method according to claim 15 , wherein the annealing causes a plurality of voids to be formed at least partially within each of the nanograting elements. 21. The method according to claim 20 , wherein each of the voids is spherical.
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