Tomographic method of determining a 3D map of a charge collection efficiency and an apparatus for performing the method

Patent metadata

Field	Value
Publication number	US-11461939-B2
Application number	US-202117533921-A
Country	US
Kind code	B2
Filing date	Nov 23, 2021
Priority date	Nov 27, 2020
Publication date	Oct 4, 2022
Grant date	Oct 4, 2022

Abstract

A tomographic method of determining a 3D map of a charge collection efficiency in a charge carrier-separating sample. The method includes positioning the sample in a beam path, scanning the sample to measure the beam induced current and/or voltage for a plurality of locations, assigning a coordinate location for each of the plurality of locations, and applying a tomographic image reconstruction algorithm to generate a 3D map of the charge collection efficiency based on the assigned coordinate locations.

First claim

The invention claimed is:

1. A tomographic method of determining a three-dimensional (3D) map of a charge collection efficiency in a volume of investigation of a sample, in which the sample has a charge carrier selecting structure, the method comprising the steps of:
electrically contacting the sample to allow a measurement of a beam induced current and/or voltage,
arranging the sample in a beam path of a probe beam, wherein the probe beam propagates in a beam-direction which defines an axis in a laboratory frame coordinate system,
scanning the volume of investigation with an analyzing spot of the probe beam and simultaneously measuring the beam induced current and/or voltage, wherein a position of the sample arranged on a sample stage is defined by coordinates z, y and r and a value of the beam induced current and/or voltage is determined for every position of the sample during the scanning action, wherein coordinate z corresponds to a point in a z-axis in the vertical direction, coordinate y corresponds to a point in a y-axis in the horizontal direction, and coordinate r corresponds to the sample stage rotation point in an axis along the direction of the z-axis and v-axis,
assigning every coordinate point (z, y, r) in the laboratory frame coordinate system, at which the analyzing spot of the probe beam hits the sample to a value of the beam induced current and/or voltage, which is measured for this point (z, y, r),
reconstructing the 3D map of the charge collection efficiency by processing the values of the beam induced current and/or voltage determined for the coordinates (z, y, r) in the laboratory frame coordinate system with a tomographic image reconstruction algorithm so as to determine the 3D map of the charge collection efficiency in a coordinate system of the sample.

2. The tomographic method according to claim 1 , wherein the step of scanning includes: scanning the sample by performing a translational movement between the sample and the probe beam while keeping a spatial configuration between the sample and the beam-direction constant, and the method further includes:
determining a two-dimensional (2D) map of the beam induced current and/or voltage by assigning a respective one of the values of the measured beam induced current and/or voltage to the corresponding position, at which the beam induced current and/or voltage is measured,
changing the spatial configuration between the sample and the beam-direction by performing a rotational movement and repeating the steps of scanning and determining of the 2D-map for a plurality of different spatial configurations,
reconstructing the 3D map of the charge collection efficiency by processing the set of 2D-maps with a tomographic image reconstruction algorithm.

3. The tomographic method according to claim 2 , wherein the step of reconstructing further includes the step of additionally including at least one parameter of a material of the sample when reconstructing the 3D map of the charge collection efficiency from the set of 2D-maps.

4. The tomographic method according to claim 1 , further comprising the steps of:
arranging the sample on a sample stage, wherein the beam-direction defines an x-axis in depth direction of the laboratory frame coordinate system and the sample stage is configured to provide the translational movement of the sample in the z-axis in the vertical direction and the y-axis in the horizontal direction of the laboratory frame coordinate system and the sample stage is configured to provide a rotational movement of the sample about a sample stage rotation axis
scanning the volume of investigation in that the sample stage performs a translational movement of the sample in the z-direction and the y-direction of the laboratory frame coordinate system and in particular the rotational movement about the sample stage rotation axis.

5. The tomographic method according to claim 1 , further comprising the steps of:
measuring the beam induced current and/or voltage and an additional measurement modality when scanning the volume of investigation,
correcting a measurement value for the beam induced current and/or voltage using a measurement value of the additional measurement modality, which is determined in a combined analysis,
wherein the additional measurement modality is one or more item selected from the following list: fluorescence, transmittance, reflectance, scattering, diffraction, excited optical luminescence, coherent diffraction imaging.

6. The tomographic method according to claim 1 , further including the step of applying a variable bias voltage on the sample, wherein the bias voltage is changed during the step of scanning.

7. The tomographic method according to claim 1 , wherein the probe beam is an X-ray beam, an ion beam, an electron beam or a laser beam.

8. The tomographic method according to claim 1 , wherein the sample is a semiconductor device, a solar cell, a photon detector, an X-ray detector or a CCD-device and the charge collection efficiency is determined by measuring an output current and/or an output voltage of the solar cell, of the device or of the detector as the beam induced current and/or voltage.

9. An apparatus for determining a 3D map of a charge collection efficiency in a volume of investigation of a sample having a charge carrier selecting structure, the apparatus being configured to perform the method according to claim 1 .

Assignees

• Univ Arizona State
• Deutsches Elektronen Synchrotron Desy

Inventors

• Stueckelberger Michael E
• Yang Xiaogang
• Bertoni Mariana I

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• G06T12/00 Primary

  Tomographic reconstruction from projections · CPC title

• G06T7/55

  from multiple images · CPC title

• G01N2223/6116

  semiconductor wafer · CPC title

• G01N23/046 Primary

  using tomography, e.g. computed tomography [CT] · CPC title