Methods and systems for acquiring 3D diffraction data

Patent metadata

Field	Value
Publication number	US-11456149-B2
Application number	US-202016835218-A
Country	US
Kind code	B2
Filing date	Mar 30, 2020
Priority date	Mar 30, 2020
Publication date	Sep 27, 2022
Grant date	Sep 27, 2022

Abstract

Diffraction patterns of a sample at various tilt angles are acquired by irradiating a region of interest using a first charged particle beam. Sample images are acquired by irradiating the region of interest using a second charged particle beam. The first and second charged particle beams are formed by splitting charged particles generated by a charged particle source.

First claim

What is claimed is:

1. A method for imaging a sample with charged particle beams, comprising:
splitting a charged particle beam generated from a charged particle source into a first charged particle beam and a second charged particle beam;
acquiring a diffraction pattern by irradiating a region of interest (ROI) of the sample with the first charged particle beam; and
acquiring a sample image by irradiating the ROI with a second charged particle beam.

2. The method of claim 1 , further comprising adjusting a position of the sample relative to the first charged particle beam and the second charged particle beam based on the sample image.

3. The method of claim 2 , further comprising tilting the sample about an axis within a sample plane; acquiring another sample image by irradiating the tilted sample with the second charged particle beam; and adjusting the sample position by comparing the sample images acquired before and after tilting the sample.

4. The method of claim 2 , wherein adjusting the sample position includes translating the sample relative to the first charged particle beam and the second charged particle beam in a plane perpendicular to an emission axis of the charged particle source.

5. The method of claim 1 , wherein the first charged particle beam and the second charged particle beam irradiate the ROI at different incident angles.

6. The method of claim 1 , wherein the first charged particle beam is a parallel beam when irradiating the ROI, and the second charged particle beam is a non-parallel beam when irradiating the ROI.

7. The method of claim 1 , wherein the first charged particle beam and the second charged particle beam have different focal planes near a sample plane.

8. The method of claim 1 , wherein the diffraction pattern and the sample image are acquired using a detector positioned downstream of the sample.

9. The method of claim 1 , further comprising splitting the charged particle beam generated by the charged particle source with a bifocal beamformer, and adjusting focal properties of the first charged particle beam and the second charged particle beam differently with the bifocal beamformer.

10. The method of claim 9 , further comprising deflecting the second charged particle beam away from the first charged particle beam with the bifocal beamformer.

11. A method for imaging a sample with charged particle beams, comprising:
acquiring a first diffraction pattern and a first sample image by simultaneously irradiating a region of interest (ROI) with a first charged particle beam and a second charged particle beam, wherein the first diffraction pattern is acquired by irradiating the ROI with the first charge particle beam and the first sample image is acquired by irradiating the ROI with the second charged particle beam, and wherein the first charged particle beam and the second charged particle beam are formed by splitting a charged particle beam generated by a charged particle source.

12. The method of claim 11 , further comprising adjusting a position of the sample relative to the first charged particle beam and the second charged particle beam based on the first sample image.

13. The method of claim 12 , wherein adjusting the sample position includes shifting the first charged particle beam and the second charged particle beam in a plane orthogonal to an emission axis of the charged particle source.

14. The method of claim 11 , further comprising continuously tilting the sample about an axis orthogonal to an emission axis of the charged particle source; acquiring a second diffraction pattern and a second sample image of the tilted sample; and adjusting a position of the sample by comparing the second sample image with the first sample image.

15. The method of claim 11 , further comprising continuously tilting the sample about an axis orthogonal to an emission axis of the charged particle source; and acquiring a second diffraction pattern by irradiating the ROI with only the first charged particle beam.

16. A system for imaging a sample, comprising:
an optical column including a charged particle source and a bifocal beamformer, wherein the bifocal beam former splits a charged particle beam generated from the charged particle source into a first charged particle beam and a second charged particle beam;
a sample positioned in a sample chamber coupled to the optical column;
a detector positioned downstream of the sample; and
a controller with computer readable instructions stored in a non-transitory memory, the controller is configured to:
irradiate a region of interest (ROI) of the sample with the first charged particle beam and acquire a diffraction pattern with the detector; and
irradiate the ROI with the second charged particle beam and acquire a sample image with the detector.

17. The system of claim 16 , wherein the system further includes a sample holder for tilting the sample about an axis orthogonal to a primary axis of the optical column, and the controller is further configured to tilt the sample with the sample holder and acquire a plurality of diffraction patterns and a plurality of sample images at different tilt angles.

18. The system of claim 17 , wherein the controller is further configured to determine a crystal shift based on the plurality of sample images; and adjust a sample position relative to the first charged particle beam and the second charged particle beam based on the crystal shift.

19. The system of claim 17 , wherein the controller is further configured to remove one or more diffraction patterns from the plurality of diffraction patterns based on the plurality of sample images to form a diffraction tilt series.

Assignees

• Fei Co

Inventors

• Buijsse Bart
• Henstra Alexander
• Deng Yuchen

Classifications

• H01J37/222 Primary

  Image processing arrangements associated with the tube · CPC title

• H01J37/32715

  Workpiece holder · CPC title

• H01J2237/2803

  characterised by the imaging method · CPC title

• H01J37/295

  Electron or ion diffraction tubes · CPC title

• H01J37/2955

  using scanning ray · CPC title