Compositions and methods for reducing interaction between abrasive particles and a cleaning brush

Patent metadata

Field	Value
Publication number	US-11446708-B2
Application number	US-201816172139-A
Country	US
Kind code	B2
Filing date	Oct 26, 2018
Priority date	Dec 4, 2017
Publication date	Sep 20, 2022
Grant date	Sep 20, 2022

Abstract

Described are methods for removing abrasive particles from a polymeric surface, such as from a polymeric surface of a cleaning brush used in a post chemical-mechanical processing cleaning step, as well as related cleaning solutions.

First claim

We claim:

1. A method of removing abrasive particles from a post-chemical-mechanical-processing (post-CMP) cleaning brush, the method comprising:
providing a post-CMP cleaning brush having a polymeric surface and having abrasive particle residue at the polymeric surface, the polymeric surface including polymer made from monomer that comprises a vinyl alcohol monomer and the abrasive particle residue comprising abrasive particles having hydrogen bonding groups at surfaces of the particles,
providing a cleaning solution having a pH in a range from 1 to 4, the cleaning solution comprising:
cleaning agent and
particle removal agent, and

removing the abrasive particle residue from the polymeric surface by contacting the polymeric surface with the cleaning solution.

2. The method of claim 1 , wherein the cleaning solution has a pH in a range from about 2 to 3.5.

3. The method of claim 1 , wherein the particle removal agent includes one or more hydrogen bonding groups.

4. The method of claim 3 , wherein the hydrogen bonding groups are: a carboxylic acid, an amino group, an alcohol, a phosphine, phosphate, phosphonate, an alkanolamine, a carbamide, a urea, urethane, ester, a betaine, a silanol group or a sulfur-containing group.

5. The method of claim 3 , wherein the particle removal agent is: a carboxylic acid compound, an amino acid compound, a polyol with at least 3 hydroxy groups, a polyalkyleneoxide homo- or copolymer, an amine-containing homopolymer or copolymer.

6. The method of claim 5 , wherein the particle removal agent is: lactic acid, maleic acid, urea, glycolic acid, sorbitol, borax (i.e., sodium borate), proline, a betaine, glycine, histidine, TRIS (tris(hydroxymethyl) aminomethane), dimethyl sulfoxide, sulfolane, glycerol, sorbitol, xylitol, fructose, mannitol, arabinol, and dextran or a combination thereof.

7. The method of claim 1 , wherein the abrasive particles exhibit a positive charge at the pH of the cleaning solution.

8. The method of claim 1 , wherein the hydrogen bonding group is a silanol (SiOH) group.

9. The method of claim 1 , wherein the abrasive particles are selected from: silica particles, ceria particles, ceria oxide particles, alumina particles, titanium dioxide, zirconia, diamonds or silicon carbide particles or a combination thereof.

10. The method of claim 1 , wherein the cleaning agent comprises one or more of a chelating agent and an organic solvent.

11. The method of claim 1 , wherein the cleaning agent comprises citric acid, monoethanol amine, polyacrylic acid, or a combination thereof.

Assignees

• Entegris Inc

Inventors

• White Daniela

Classifications

• H10P72/0412

  using mainly scrubbing means, e.g. brushes · CPC title

• B08B1/52

  using fluids · CPC title

• C11D7/3245

  Aminoacids · CPC title

• C11D7/5004

  Organic solvents · CPC title

• B08B3/04

  Cleaning involving contact with liquid · CPC title