Bis(diazadiene)cobalt compounds, method of making and method of use thereof

Patent metadata

Field	Value
Publication number	US-11440929-B2
Application number	US-201916429343-A
Country	US
Kind code	B2
Filing date	Jun 3, 2019
Priority date	Jun 19, 2018
Publication date	Sep 13, 2022
Grant date	Sep 13, 2022

Abstract

Described herein are cobalt compounds, processes for making cobalt compounds, cobalt compounds used as precursors for depositing cobalt-containing films (e.g., cobalt, cobalt oxide, cobalt nitride, cobalt silicide etc.); and cobalt films. Examples of cobalt precursor compounds are bis(diazadiene)cobalt compounds. Examples of surfaces for deposition of metal-containing films include, but are not limited to, metals, metal oxides, metal nitrides, and metal silicates; silicon, silicon oxide and silicon nitride. Alkylated diazadiene ligands are used to form cobalt complexes which are used for selective deposition on certain surfaces and/or superior film properties such as uniformity, continuity, and low resistance.

First claim

The invention claimed is:

1. A bis(diazadiene)cobalt compound having a structure selected from the group consisting of:
(a)

wherein R is tert-amyl;
wherein the bis(diazadienecobalt) compound comprises a non-volatile residue of less than, or equal to, 1.1 weight percent.

2. The bis(diazadiene)cobalt compound of claim 1 has a melting point less than, or equal to, 80° C.

3. The bis(diazadiene)cobalt compound of claim 1 exists at least in a liquid phase at a temperature greater than, or equal to, 40° C.

4. A method of synthesizing a bis(diazadiene)cobalt compound, comprising:
adding a first alkyl amine to a diketone compound in a mixture of an organic solvent and water to obtain a diazadiene ligand;
reacting the diazadiene ligand with a cobalt halide in the presence of a reducing co-reagent to form a bis(diazadiene)cobalt compound;
wherein the bis(diazadiene)cobalt compound has a structure selected from the group consisting of:
(a)

wherein R is tert-amyl;
wherein the bis(diazadiene)cobalt compound comprises a non-volatile residue of less than, or equal to, 1.1 weight percent.

5. The method of claim 4 , wherein the first alkyl amine is tert-amyl; the cobalt halide is selected from the group consisting of cobalt chloride, cobalt bromide, and cobalt iodide; and the organic solvent is selected from the group consisting of hydrocarbon solvents, hexanes, tetrahydrofuran, diethyl ether, toluene, and combinations thereof.

6. The method of claim 4 , the bis(diazadiene)cobalt compound has a melting point less than, or equal to, 80° C.

7. The method of claim 4 , wherein the bis(diazadiene)cobalt compound exists at least in a liquid phase at a temperature greater than, or equal to, 40° C.

8. A cobalt containing film deposited by using a bis(diazadiene)cobalt compound having a structure selected from the group consisting of:
(a)

wherein R is tert-amyl; and
wherein the bis(diazadiene)cobalt compound comprises a non-volatile residue of less than, or equal to, 1.1 weight percent;
wherein the cobalt containing film is selected from a group consisting of cobalt film, cobalt oxide film, cobalt silicide film, and cobalt nitride film; and
wherein the cobalt containing film is deposited by using a method selected from a group consisting of thermal CVD, thermal ALD, plasma-enhanced ALD (PEALD), plasma enhanced chemical vapor deposition (PECVD), and plasma enhanced cyclic chemical vapor deposition (PECCVD).

9. The cobalt containing film of claim 8 , wherein the bis(diazadiene)cobalt compound has a melting point less than or equal to 80° C.

10. The cobalt containing film of claim 8 , wherein the cobalt containing film contains less than 2.5 atomic percent of carbon or nitrogen.

11. The cobalt containing film of claim 8 , wherein the bis(diazadiene)cobalt compound exists at least in a liquid phase at a temperature greater than, or equal to, 40° C.

12. A container comprising a bis(diazadiene)cobalt compound having a structure selected from the group consisting of:
(a)

wherein R is tert-amyl;
wherein the bis(diazadiene)cobalt compound comprises a non-volatile residue of less than, or equal to, 1.1 weight percent.

13. The container of claim of 12 , wherein the bis(diazadiene)cobalt compound has a melting point less than or equal to 80° C.

14. The container of claim 12 is maintained at a delivery temperature, and the melting point of the bis(diazadiene)cobalt compound is lower than the delivery temperature.

15. The container of claim of 26 , wherein the bis(diazadiene)cobalt compound exists at least in a liquid phase at a temperature greater than, or equal to, 40° C.

16. A method of depositing a Co containing film on a substrate in a reactor, comprising:
providing the substrate to the reactor;
providing a Co precursor to the reactor;
contacting the substrate with the Co precursor; and
forming the Co containing film on the substrate;
wherein the substrate is selected from the group consisting of metal, metal oxide, metal nitride, metal silicide, silicon, silicon oxide, silicon nitride, fluorosilicate glass (FSG), organosilicate glass (OSG), carbon doped oxide (CDO), porous low-K material, and combinations thereof; and
wherein the Co precursor is a bis(diazadiene)cobalt compound having a structure selected from the group consisting of:
(a)

wherein R is tert-amyl;
wherein the bis(diazadiene)cobalt compound comprises a non-volatile residue of less than, or equal to, 1.1 weight percent.

17. The method of claim 16 , wherein the Co containing film is selected from a group consisting of cobalt film, cobalt oxide film, cobalt silicide film, cobalt nitride film, and combinations thereof; and the Co containing film is deposited by a method selected from a group consisting of thermal CVD, thermal ALD, plasma-enhanced ALD (PEALD), plasma enhanced chemical vapor deposition (PECVD), and plasma enhanced cyclic chemical vapor deposition (PECCVD).

18. The method of claim 16 wherein the bis(diazadiene)cobalt compound has a melting point less than, or equal to, 80° C.

19. The method of claim 16 , further comprising a step selected from the group consisting of a pre-treatment to remove contaminates from surface of the substrate, annealing with heating the Co containing film to 300-500° C. in the flow of a hydrogen containing gas, and a combination thereof.

20. The method of claim 16 , wherein the Co containing film contains less than 2.5 atomic percent of carbon or nitrogen.

21. The method of claim 16 , wherein the bis(diazadiene)cobalt compound exists at least in a liquid phase at a temperature greater than, or equal to, 40° C.

22. A method of selectively depositing cobalt on a substrate in a reactor, comprising:
providing the substrate to the reactor wherein the substrate comprises at least one patterned dielectric layer and at least one patterned metal containing layer;
providing a Co precursor to the reactor;
contacting the substrate with the Co precursor; and
forming Co containing film on the substrate;
wherein the at least one patterned dielectric layer is selected from the group consisting of silicon dioxide, fluorosilicate glass (FSG), organosilicate glass (OSG), carbon doped oxide (CDO), porous low-K materials, and combinations thereof;
wherein at least one patterned metal containing layer is selected from the group consisting of conductive metal layer selected from the group consisting of copper or copper alloy, cobalt or cobalt alloy, ruthenium or ruthenium alloy; and combinations thereof; metal oxide; metal nitride; metal silicate layer; and combinations thereof;
wherein the Co containing film is selectively formed on the at least one patterned conductive metal layer with ratio of thickness of cobalt containing film formed on the at least one patterned conductive metal layer vs. formed on the at least one patterned dielectric layer >1; and
wherein th

Assignees

• Versum Mat Us Llc

Inventors

• Cooper Alan C
• Ivanov Sergei V
• Hopkins Christopher David
• Kim Moo-Sung

Classifications

• C23C16/18

  from metallo-organic compounds · CPC title

• C23C16/45553

  characterized by the use of precursors specially adapted for ALD · CPC title

• C07C251/04

  having carbon atoms of imino groups bound to hydrogen atoms or to acyclic carbon atoms · CPC title

• C23C16/4481

  by evaporation using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title

• C07F15/065 Primary

  without a metal-carbon linkage · CPC title