Amorphous carbon multilayer coating with directional protection

Patent metadata

Field	Value
Publication number	US-11437230-B2
Application number	US-202016841010-A
Country	US
Kind code	B2
Filing date	Apr 6, 2020
Priority date	Apr 6, 2020
Publication date	Sep 6, 2022
Grant date	Sep 6, 2022

Abstract

Disclosed herein is a high throughput method for providing directional protection to a three dimensional feature on a substrate by forming a multi-layer amorphous carbon-containing coating with tunable conformality thereon. Forming the multi-layer amorphous carbon-containing coating with tunable conformality includes depositing a base layer onto a horizontal surface of the three dimensional features, and a second layer over the base layer and onto a first portion of a vertical or inclined surface of the three dimensional feature. The base layer includes a first material with a first sticking coefficient and the second layer includes a second material with a second sticking coefficient that is smaller than the first sticking coefficient. The first material includes no fluorine or less fluorine than the second material. Also disclosed herein is a method of manufacturing a three dimensional device as well as three dimensional devices.

First claim

What is claimed is:

1. A method for providing directional protection to a three dimensional feature on a substrate, the method comprising:
forming a multi-layer amorphous carbon-containing coating with tunable conformality on the three dimensional feature by:
depositing a base layer onto a horizontal surface of the three dimensional feature, the base layer comprising a first material having a first sticking coefficient; and
depositing a second layer over the base layer and onto a first portion of a vertical or inclined surface of the three dimensional feature, the second layer comprising a second material having a second sticking coefficient that is smaller than the first sticking coefficient,
wherein the first material comprises no fluorine or less fluorine than the second material.

2. The method of claim 1 , wherein the first material that forms the base layer comprises one or more of SiCl 4 , CH 4 , CH 3 F, CH 2 F 2 , C 4 F 6 , C 4 F 8 .

3. The method of claim 1 , wherein the second material that forms the second layer comprises one or more of CH 4 , CH 3 F, CH 2 F 2 , C 4 F 6 , C 4 F 8 , and wherein the first portion of the vertical or inclined surface of the three dimensional feature correlates to an aspect ratio of up to 10:1.

4. The method of claim 1 , wherein the three dimensional feature has an aspect ratio ranging from about 10:1 to about 500:1
wherein the multi-layer amorphous carbon-containing coating comprises from 2 to 10 layers,
wherein the base layer has a first thickness,
wherein each second layer to tenth layer, if present, independently have a corresponding second thickness to tenth thickness, and
wherein a ratio of the first thickness to each of the corresponding second thickness to tenth thickness independently ranges from about 200:1 to about 1:1.

5. The method of claim 1 , wherein forming the multi-layer amorphous carbon-containing coating further comprises depositing a third layer over the second layer and onto a second portion of the vertical or inclined surface of the three dimensional feature, the second portion reaching deeper along the vertical or inclined surface of the three dimensional feature than the first portion, wherein the third layer comprises a third material having a third sticking coefficient that is smaller than the second sticking coefficient, and wherein the second material having the second sticking coefficient comprise less fluorine than the third material having the third sticking coefficient.

6. The method of claim 5 , wherein the third material that forms the third layer comprises one or more of CH 3 F, CH 2 F 2 , C 4 F 6 , C 4 F 8 , and wherein the second portion of the vertical or inclined surface of the three dimensional feature correlates to an aspect ratio of about 10:1 to about 50:1.

7. The method of claim 5 , wherein forming the multi-layer amorphous carbon-containing coating further comprises repeating deposition of at least one additional layer, wherein each additional layer is deposited over a preceding layer and onto a portion of the vertical or inclined surface of the three dimensional feature that reaches deeper along the vertical surface of the three dimensional feature than a preceding portion covered by the preceding layer, wherein each additional layer is formed of an additional material having an additional sticking coefficient that is smaller than a sticking coefficient of the preceding layer, and wherein each preceding material comprises less fluorine than the additional material.

8. The method of claim 7 ,
wherein a fourth material that forms a fourth layer comprises one or more of CH 2 F 2 , C 4 F 6 , C 4 F 8 , BTBAS-ALD, BDEAS-ALD, and wherein a third portion of the vertical or inclined surface of the three dimensional feature that would be coated with the fourth layer correlates to an aspect ratio of about 50:1 to about 100:1,
wherein a fifth material that forms a fifth layer, if present, comprises one or more of C 4 F 6 , C 4 F 8 , BTBAS-ALD, BDEAS-ALD, and wherein a fourth portion of the vertical or inclined surface of the three dimensional feature that would be coated with the fifth layer correlates to an aspect ratio of about 100:1 to about 300:1, and
wherein a sixth material that forms a sixth layer, if present, comprises one or more of BTBAS-ALD, BDEAS-ALD, and wherein a fifth portion of the vertical surface of the three dimensional feature that would be coated with the sixth layer correlates to an aspect ratio of about 300:1 or greater.

9. The method of claim 1 , further comprising depositing, via atomic layer deposition, a conformal barrier coating layer directly onto the three dimensional feature, prior to forming the multi-layer amorphous carbon-containing coating.

10. The method of claim 1 , wherein the base layer and the second layer are deposited via plasma-enhanced chemical vapor deposition.

11. The method of claim 1 , wherein the multi-layer amorphous carbon-containing coating is deposited with RF back-to-back technique.

12. A three dimensional device comprising:
a substrate having a three dimensional feature thereon, the three dimensional feature having a horizontal surface and a vertical or inclined surface; and
a multi-layer amorphous carbon-containing coating with tunable conformality coated over the three dimensional feature, the multi-layer amorphous carbon-containing coating comprising:
a base layer coated onto the horizontal surface of the three dimensional feature, the base layer comprising a first material having a first sticking coefficient; and
a second layer coated over the base layer and over a first portion of the vertical or inclined surface of the three dimensional feature, the second layer comprising a second material having a second sticking coefficient that is smaller than the first sticking coefficient,
wherein the first material comprises no fluorine or less fluorine than the second material.

13. The three dimensional device of claim 12 , wherein the first material that forms the base layer comprises one or more of SiCl 4 , CH 4 , CH 3 F, CH 2 F 2 , C 4 F 6 , C 4 F 8 .

14. The three dimensional device of claim 12 , wherein the second material that forms the second layer comprises one or more of CH 4 , CH 3 F, CH 2 F 2 , C 4 F 6 , C 4 F 8 , and wherein the first portion of the vertical or inclined surface of the three dimensional feature correlates to an aspect ratio of up to 10:1.

15. The three dimensional device of claim 12 , wherein the three dimensional feature has an aspect ratio ranging from about 10:1 to about 500:1,
wherein the multi-layer amorphous carbon-containing coating comprises from 2 to 10 layers,
wherein the base layer has a first thickness,
wherein each second layer to tenth layer, if present, independently have a corresponding second thickness to tenth thickness, and
wherein a ratio of the first thickness to each of the corresponding second thickness to tenth thickness independently ranges from about 200:1 to about 1:1.

16. The three dimensional device of claim 12 ,
wherein the multi-layer amorphous carbon-containing coating further comprises a third layer coated over the second layer and over a second portion of the vertical or inclined surface of the three dimensional feature, the second portion reaching deeper along the vertical or inclined surface of the three dimensional feature than the first portion,
wherein the third layer comprises a third material having a third sticking coefficient that is smaller than the second sticking coefficient,
wherein the second material comprises less fluorine than the third material,
wherein the third material

Assignees

• Applied Materials Inc

Inventors

• Wu Wei
• Zhang Feng
• Yang Xiawan
• Choi Jinhan
• Khan Anisul Haque

Classifications

• H10P14/6339

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title

• H10P14/662

  Laminate layers, e.g. stacks of alternating high-k metal oxides (adhesion layers or buffer layers H10P14/6508, H10P14/6548) · CPC title

• H10P14/687 Primary

  the materials being fluorocarbon compounds, e.g. (CHxFy) n or polytetrafluoroethylene · CPC title

• H10P76/405

  characterised by their composition, e.g. multilayer masks · CPC title