Transport fixing jig

Patent metadata

Field	Value
Publication number	US-11420832-B2
Application number	US-201716084628-A
Country	US
Kind code	B2
Filing date	Mar 14, 2017
Priority date	Mar 18, 2016
Publication date	Aug 23, 2022
Grant date	Aug 23, 2022

Abstract

Provided is a transport fixing jig that has a high gripping force, hardly contaminates an object to be processed (object to be transported), and is excellent in heat resistance. The transport fixing jig of the present invention includes: a first base material; a carbon nanotube aggregate; and an adhesive layer arranged between the first base material and the carbon nanotube aggregate, wherein the first base material and the carbon nanotube aggregate are bonded to each other via the adhesive layer, and wherein a ratio (adhesive layer/base material) between a linear expansion coefficient of the first base material and a linear expansion coefficient of the adhesive layer is from 0.7 to 1.8.

First claim

The invention claimed is:

1. A transport fixing jig, comprising:
a first base material;
a carbon nanotube aggregate; and
an adhesive layer arranged between the first base material and the carbon nanotube aggregate,
wherein the first base material and the carbon nanotube aggregate are bonded to each other via the adhesive layer, and
wherein a ratio (adhesive layer/base material) between a linear expansion coefficient of the first base material and a linear expansion coefficient of the adhesive layer is from 0.7 to 1.8.

2. The transport fixing jig according to claim 1 , further comprising a second base material,
wherein the carbon nanotube aggregate is formed on the second base material, and
wherein the first base material and the second base material are bonded to each other via the adhesive layer.

3. The transport fixing jig according to claim 1 , wherein an adhesive forming the adhesive layer comprises an inorganic adhesive or a carbon-based adhesive.

4. The transport fixing jig according to claim 3 , wherein the inorganic adhesive comprises a ceramic adhesive.

5. The transport fixing jig according to claim 1 , wherein when the transport fixing jig is left to stand under 450° C. for 1 hour, a change in modulus of elasticity of the adhesive layer is 50% or less.

6. The transport fixing jig according to claim 1 , wherein the adhesive layer has a linear expansion coefficient of from 5 ppm/° C. to 12 ppm/° C.

7. The transport fixing jig according to claim 1 , wherein a material forming the first base material comprises alumina.

8. The transport fixing jig according to claim 1 , wherein a surface of the carbon nanotube aggregate has a coefficient of static friction against a glass surface at 23° C. of from 1 to 50.

9. A method of producing a transport fixing jig of claim 1 , comprising:
applying an adhesive onto a first base material to form an applied layer;
arranging a carbon nanotube aggregate on the applied layer;
curing the applied layer to form an adhesive layer; and
bonding the first base material and the carbon nanotube aggregate to each other via the adhesive layer,
wherein a ratio (adhesive layer/base material) between a linear expansion coefficient of the first base material and a linear expansion coefficient of the adhesive layer is from 0.7 to 1.8.

Assignees

• Nitto Denko Corp

Inventors

• Masuda shotaro
• Ichikawa Tomoaki
• Maeno Yohei
• Hatakeyama Yoshiharu

Classifications

• H10P72/7602 Primary

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/135 Primary

  characterised by a material, a roughness, a coating or the like · CPC title

• H10P72/74

  using temporarily an auxiliary support · CPC title

• H10P72/30

  for conveying, e.g. between different workstations · CPC title

• B32B7/12

  using interposed adhesives or interposed materials with bonding properties · CPC title