Nitride capping layer for spin torque transfer (STT) magnetoresistive random access memory (MRAM)

Patent metadata

Field	Value
Publication number	US-11417835-B2
Application number	US-202016877066-A
Country	US
Kind code	B2
Filing date	May 18, 2020
Priority date	Jan 26, 2018
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

A magnetic tunnel junction (MTJ) is disclosed wherein first and second interfaces of a free layer (FL) with a first metal oxide (Hk enhancing layer) and second metal oxide (tunnel barrier), respectively, produce perpendicular magnetic anisotropy (PMA) to increase thermal stability. In some embodiments, a capping layer that is a conductive metal nitride such as MoN contacts an opposite surface of the Hk enhancing layer with respect to the first interface to reduce interdiffusion of oxygen and nitrogen compared with a TiN capping layer and maintain an acceptable resistance x area (RA) product. In other embodiments, the capping layer may comprise an insulating nitride such as AlN that is alloyed with a conductive metal to minimize RA. Furthermore, a metallic buffer layer may be inserted between the capping layer and Hk enhancing layer. As a result, electrical shorts are reduced and the magnetoresistive ratio is increased.

First claim

What is claimed is:

1. A perpendicular magnetic tunnel junction (p-MTJ), comprising:
a tunnel barrier layer that is a first metal oxide layer;
a Hk enhancing layer that is a second metal oxide layer or a first metal oxynitride layer;
a free layer with a first surface that forms a first interface with the tunnel barrier layer, a second surface that forms a second interface with the Hk enhancing layer, and wherein each of the first and second interfaces generate perpendicular magnetic anisotropy in the free layer; and
a second metal oxynitride layer that contacts a side of the Hk enhancing layer that is opposite with respect to the second interface.

2. The p-MTJ of claim 1 , wherein the free layer includes a material selected from the group consisting of Co, Fe, CoFe, CoFeB, CoB, FeB, CoFeNi, and CoFeNiB, and alloys thereof.

3. The p-MTJ of claim 1 , wherein the free layer includes a material selected from the group consisting of a Heusler alloy, an ordered L1 0 or L1 1 material, and a rare-earth alloy,
wherein the Heusler alloys is one of Ni 2 MnZ, Pd 2 MnZ, Co 2 MnZ, Fe 2 MnZ, Co 2 FeZ, Mn 3 Ge, and Mn 2 Ga, wherein Z is one of Si, Ge, Al, Ga, In, Sn, or Sb,
wherein the ordered L1 0 or L1 1 material is one of MnAl, MnGa, or RT, wherein R is Rh, Pd, Pt, Ir, or an alloy thereof, and T is Fe, Co, Ni or an alloy thereof, and
wherein the rare-earth alloy is one of TbFeCo, GdCoFe, FeNdB, or SmCo.

4. The p-MTJ of claim 1 , wherein the metal in the Hk enhancing layer is one or more of Mg, Si, Ti, Ba, Ca, La, Al, Mn, V, and Hf.

5. The p-MTJ of claim 1 , wherein the second metal oxynitride layer has a M1ON composition, wherein M1 is a metal or alloy that includes a material selected from the group consisting of Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W.

6. The p-MTJ of claim 1 , wherein the second metal oxynitride layer has a M2M3ON composition, wherein M2 is selected from the group consisting of B, Al, Si, Ga, In and Tl, and wherein M3 is selected from the group consisting of Pt, Au, Ag, Mg, Ca, Sr, Ba, Sc, Y, La, Co, Fe, Mn, Ru, Rh, Ir, Ni, Pd, Zn, Cu, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta and W.

7. The p-MTJ of claim 1 , wherein the second metal oxynitride layer is comprised of a M2ON matrix having conductive paths of a M3 metal formed therein, wherein M2 is selected from the group consisting of B, Al, Si, Ga, In, and Tl, and wherein M3 is selected from the group consisting of Pt, Au, Ag, Mg, Ca, Sr, Ba, Sc, Y, La, Co, Fe, Mn, Ru, Rh, Ir, Ni, Pd, Zn, Cu, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W.

8. The p-MTJ of claim 1 , wherein the free layer has a thickness from about 5 to 30 Angstroms.

9. The p-MTJ of claim 1 , wherein the tunnel barrier layer includes a material selected from the group consisting of MgO, Al 2 O 3 , MgAlO, TiOx, AlTiO, MgZnO, Al 2 O 3 , ZnO, ZrOx, HfOx, and MgTaO.

10. The p-MTJ of claim 1 , further comprising a pinned layer that adjoins the tunnel barrier layer, and wherein the p-MTJ is part of a Magnetic Random Access Memory (MRAM), spin torque (STT)-MRAM, spin torque oscillator, spin hall effect device, magnetic sensor, or a biosensor.

11. The p-MTJ of claim 1 , wherein the second metal oxynitride layer includes a first metal (M1) and a second metal (M2) that is different than M1, wherein the second metal oxynitride is comprised of a M2ON matrix having conductive paths of a M1 metal formed therein.

12. A method of forming a perpendicular magnetic tunnel junction (p-MTJ), comprising:
forming a barrier layer on a substrate, wherein the barrier layer is a metal nitride or metal oxynitride layer, wherein the barrier layer includes a first metal (M1) and a second metal (M2), wherein M1 is selected from the group consisting of B, Al, Si, Ga, In, and Tl, and wherein M2 is selected from the group consisting of Pt, Au, Ag, Mg, Ca, Sr, Ba, Sc, Y, La, Co, Fe, Mn, Ru, Rh, Ir, Ni, Pd, Zn, Cu, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W;
forming a Hk enhancing layer that is a metal oxide or metal oxynitride layer on the barrier layer;
forming a free layer on the Hk enhancing layer; and
forming a tunnel barrier layer on the free layer.

13. The method of claim 12 , wherein the metal in the Hk enhancing layer is selected from the group consisting of Mg, Si, Ti, Ba, Ca, La, Al, Mn, V, and Hf.

14. The method of claim 12 , wherein the barrier layer is comprised of a M2N or M2ON matrix having conductive paths of a M1 metal or alloy formed therein.

15. The method of claim 12 , wherein the Hk enhancing layer interfaces with the barrier layer after the forming of the Hk enhancing layer on the barrier layer.

16. A method of forming a perpendicular magnetic tunnel junction (p-MTJ), comprising:
forming a barrier layer on a substrate, the barrier layer including a metal nitride layer or a first metal oxynitride layer;
forming a metallic buffer layer on the barrier layer;
forming a Hk enhancing layer on the metallic buffer layer, the Hk enhancing layer including a metal oxide layer or a second metal oxynitride layer;
forming a free layer on the Hk enhancing layer; and
forming a tunnel barrier layer on the free layer.

17. The method of claim 16 , wherein the barrier layer has a M1N or M1ON composition, wherein M1 is a metal or alloy that includes a material selected from the group consisting of Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W.

18. The method of claim 16 , wherein the barrier layer has a M2M3N or M2M3ON composition, wherein M2 is selected from the group consisting of B, Al, Si, Ga, In, and Tl, and wherein M3 is selected from the group consisting of Pt, Au, Ag, Mg, Ca, Sr, Ba, Sc, Y, La, Co, Fe, Mn, Ru, Rh, Ir, Ni, Pd, Zn, Cu, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W.

19. The method of claim 16 , wherein the barrier layer is comprised of a M2N or M2ON matrix having conductive paths of a M3 metal or alloy formed therein, wherein M2 is selected from the group consisting of B, Al, Si, Ga, In, and Tl, and wherein M3 is selected from the group consisting of Pt, Au, Ag, Mg, Ca, Sr, Ba, Sc, Y, La, Co, Fe, Mn, Ru, Rh, Ir, Ni, Pd, Zn, Cu, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W.

20. The method of claim 16 wherein the metallic buffer layer is one or more of Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• IWATA Jodi Mari
• Jan Guenole
• Tong Ru-Ying
• Sundar Vignesh
• Zhu Jian
• Liu Huanlong

Classifications

• H10B61/00

  Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices · CPC title

• H10N50/85

  Materials of the active region · CPC title

• H01F41/302

  for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices (spin-exchange-coupled multilayers H01F10/32) · CPC title

• H01F10/3286

  Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy · CPC title

• G11C11/161 Primary

  details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell · CPC title