Method for manufacturing a device having a three-dimensional magnetic structure

Patent metadata

Field	Value
Publication number	US-11417448-B2
Application number	US-201715621122-A
Country	US
Kind code	B2
Filing date	Jun 13, 2017
Priority date	Dec 16, 2014
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

A method for manufacturing a device having a three-dimensional magnetic structure includes applying or introducing magnetic particles onto or into a carrier element. A plurality of at least partly interconnected cavities are formed between the magnetic particles, which contact one another at points of contact, by coating the arrangement of magnetic particles and the carrier. The cavities are penetrated at least partly by the layer generated when coating, resulting in the three-dimensional magnetic structure. A conductor loop arrangement is provided on the carrier or a further carrier. When a current flows through the conductor loop, an inductance of the conductor loop is changed by the three-dimensional magnetic structure, or a force acts on the three-dimensional magnetic structure or the conductor loop by a magnetic field caused by the current flow, or when the position of the three-dimensional magnetic structure is changed, a current flow is induced through the conductor loop.

First claim

The invention claimed is:

1. A method for manufacturing a device comprising a three-dimensional magnetic structure, the method comprising:
applying or introducing magnetic particles onto or into a carrier element, the magnetic particles comprising a size between 10 nm and 10 μm, wherein a plurality of at least partly interconnected cavities are formed between the magnetic particles, and wherein the magnetic particles contact one another at points of contact;
connecting the magnetic particles at the points of contact by coating the arrangement of magnetic particles and the carrier element, wherein the cavities are penetrated at least partly by a magnetic layer generated based on coating so that the result is the three-dimensional magnetic structure, wherein coating the arrangement of magnetic particles and the carrier element is performed by atomic layer deposition to form the magnetic layer and comprises depositing a dielectric layer after forming the magnetic layer; and
providing a conductor loop arrangement on the carrier element or a further carrier element, such that:
when a current flows through the conductor loop arrangement, an inductance of the conductor loop arrangement is changed by the three-dimensional magnetic structure; or
when a current flows through the conductor loop arrangement, a force acts on the three-dimensional magnetic structure or the conductor loop arrangement by a magnetic field caused by the current flow; or
when a position of the three-dimensional magnetic structure is changed once or periodically, a current flow is induced through the conductor loop arrangement.

2. The method in accordance with claim 1 , wherein applying or introducing the magnetic particles onto or into the carrier element takes place such that the conductor loop arrangement encloses the magnetic particles at least partly or the magnetic particles enclose the conductor loop arrangement at least partly.

3. The method in accordance with claim 2 , wherein the carrier element comprises a cavity in the region of the conductor loop arrangement, and wherein the magnetic particles are introduced into the cavity such that the conductor loop arrangement encloses the magnetic particles at least partly or the magnetic particles enclose the conductor loop arrangement at least partly.

4. The method in accordance with claim 1 , wherein, when providing the conductor loop arrangement, a plurality of mutually insulated conductor loop arrangements are provided, wherein applying or introducing the magnetic particles takes place such that the plurality of conductor loop arrangements are inductively coupled to one another by means of the magnetic particles.

5. The method in accordance with claim 1 , wherein the conductor loop arrangement is pro-vided on the further carrier element, wherein the carrier element and the further carrier element are coupled to each other by means of spring elements so that a relative deflection between the carrier element and the further carrier element is caused by the force acting on the three-dimensional magnetic structure by a magnetic field caused by the current flow.

6. The method in accordance with claim 5 , wherein the carrier element is arranged to be movable and the further carrier element to be fixed.

7. The method in accordance with claim 5 , wherein the further carrier element is arranged to be movable and the carrier element to be fixed.

8. The method in accordance with claim 1 , wherein coating the arrangement of magnetic particles and the carrier element further comprises:
depositing a magnetic material in an oxidized form; and
reducing the magnetic material in the oxidized form in order to achieve the magnetic layer.

9. The method in accordance with claim 1 , wherein the magnetic particles comprise soft- and/or hard-magnetic materials.

10. The method in accordance with claim 1 , wherein the arrangement of magnetic particles is magnetized to a preferential direction after coating.

11. The method in accordance with claim 1 , wherein the carrier element and/or the further carrier element comprise(s) plastics, silicon, glass or ceramics.

12. The method in accordance with claim 1 , wherein the carrier element and/or the further carrier element are(is) a conductor board.

13. The method in accordance with claim 1 , wherein applying or introducing magnetic particles and/or connecting the magnetic particles take(s) place such that the three-dimensional magnetic structure comprises a circular shape comprising alternating soft- and hard-magnetic portions.

14. The method in accordance with claim 1 , wherein coating the arrangement of magnetic particles and the carrier element further comprises:
depositing a magnetic material in an oxidized form in order to achieve the magnetic layer.

Assignees

• Fraunhofer Ges Forschung

Inventors

• Lisec Thomas
• Quenzer Hans-Joachim
• Reimer Tim

Classifications

• H01F41/046 Primary

  structurally combined with ferromagnetic material · CPC title

• H01F41/301

  for applying ultrathin or granular layers (ultrathin or granular layers H01F10/007) · CPC title

• H02K33/16

  with polarised armatures moving in alternate directions by reversal or energisation of a single coil system · CPC title

• B81B2201/034

  Electrical rotating micromachines · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title