Acousto-optic deflector with multiple output beams

Patent metadata

Field	Value
Publication number	US-11409184-B2
Application number	US-201916543691-A
Country	US
Kind code	B2
Filing date	Aug 19, 2019
Priority date	Nov 12, 2014
Publication date	Aug 9, 2022
Grant date	Aug 9, 2022

Abstract

Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.

First claim

The invention claimed is:

1. Optical apparatus, comprising:
an acousto-optic medium, which is configured to receive an input beam of radiation;
at least one piezoelectric transducer attached to the acousto-optic medium; and
a drive circuit, which is coupled to apply to the at least one piezoelectric transducer a drive signal comprising at least three frequency components, having respective frequencies that define a Golomb ruler and are selected so as to cause the acousto-optic medium to split the input beam into multiple output beams at respective beam angles determined by the respective frequencies, wherein the drive signal applied by the drive circuit further comprises one or more harmonic frequency components, having respective amplitudes and phases chosen so as to cancel harmonic waves generated at a multiple of at least one of the respective frequencies of the at least three frequency components in the acousto-optic medium.

2. The apparatus according to claim 1 , wherein the at least three frequency components of the drive signal have different, respective amplitudes that are chosen so that the multiple output beams have equal respective intensities.

3. Optical apparatus, comprising:
an acousto-optic medium, which is configured to receive an input beam of radiation;
at least one piezoelectric transducer attached to the acousto-optic medium; and
a drive circuit, which is coupled to apply to the at least one piezoelectric transducer a drive signal comprising multiple frequency components, which comprise at least:
first and second fundamental components, at respective first and second fundamental frequencies, which are selected so as to cause the acousto-optic medium to split the input beam into first and second output beams at respective beam angles determined by the first and second fundamental frequencies; and
one or more harmonic frequency components, having respective amplitudes and phases chosen so as to cancel harmonic waves at respective multiples of the fundamental frequencies in the acousto-optic medium.

4. An optical method, comprising:
directing an input beam of radiation to be incident on an acousto-optic medium, to which at least one piezoelectric transducer is attached; and
applying to the at least one piezoelectric transducer a drive signal comprising at least three frequency components, having respective frequencies that define a Golomb ruler and are selected so as to cause the acousto-optic medium to split the input beam into multiple output beams at respective beam angles determined by the respective frequencies, wherein applying the drive signal further comprises applying one or more harmonic frequency components, having respective amplitudes and phases chosen so as to cancel harmonic waves generated at a multiple of at least one of the respective frequencies of the at least three frequency components in the acousto-optic medium.

5. The method according to claim 4 , wherein applying the drive signal comprises setting the at least three frequency components of the drive signal to have different, respective amplitudes that are chosen so that the multiple output beams have equal respective intensities.

6. An optical method, comprising:
directing an input beam of radiation to be incident on an acousto-optic medium, to which at least one piezoelectric transducer is attached; and
applying to the at least one piezoelectric transducer a drive signal comprising multiple frequency components, which comprise at least:
first and second fundamental components, at respective first and second fundamental frequencies, which are selected so as to cause the acousto-optic medium to split the input beam into first and second output beams at respective beam angles determined by the first and second fundamental frequencies; and
one or more harmonic frequency components, having respective amplitudes and phases chosen so as to cancel harmonic waves at respective multiples of the fundamental frequencies in the acousto-optic medium.

Assignees

• Orbotech Ltd

Inventors

• Peled Itay
• Kotler Zvi
• Kaminsky Ronald

Classifications

• G02F1/33

  Acousto-optical deflection devices {(circuit or control arrangements therefor G02F1/113)} · CPC title

• G02F1/11 Primary

  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves (acousto-optical deflection G02F1/33) · CPC title

• G02F1/332 Primary

  comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell · CPC title

• G02F2203/24

  beam steering · CPC title