Coating nozzle, coating device and corresponding coating method

Patent metadata

Field	Value
Publication number	US-11401606-B2
Application number	US-201816306308-A
Country	US
Kind code	B2
Filing date	Jan 17, 2018
Priority date	Jul 28, 2017
Publication date	Aug 2, 2022
Grant date	Aug 2, 2022

Abstract

The present disclosure proposes a coating nozzle, a coating device and a corresponding coating method. The nozzle includes: a first reactant spout configured to spray a first reactant; a second reactant spout configured to spray a second reactant; and a first air curtain spout configured to spray shielding gas, so that the sprayed shielding gas forms an air curtain which isolates the first reactant from the second reactant. The device includes: one or more coating nozzles described above; and a transport mechanism configured to transport an object to be coated, so that the object to be coated sequentially passes through a first reaction region of the first reactant and a second reaction region of the second reactant for each of the one or more nozzles.

First claim

We claim:

1. A coating nozzle, comprising:
a first reactant spout configured to spray a first reactant;
a second reactant spout configured to spray a second reactant; and
a first air curtain spout configured to spray shielding gas, so that the sprayed shielding gas forms an air curtain which isolates the first reactant from the second reactant, wherein the first air curtain spout has a closed configuration surrounding the first reactant spout, so that the air curtain formed causes the first reactant to be completely constrained in a first reaction region, and isolates the first reaction region from a second reaction region of the second reactant,
wherein a spraying pressure for the first air curtain spout is greater than that for at least one of the first reactant spout and the second reactant spout.

2. The coating nozzle according to claim 1 , further comprising:
a first outlet configured to discharge at least one of an excessive portion of the first reactant and a reaction by-product; and
a second outlet configured to discharge at least one of an excessive portion of the second reactant and a reaction by-product.

3. The coating nozzle according to claim 1 , further comprising:
a reaction medium spout configured to spray a reaction medium which catalyzes a reaction of the first reactant with the second reactant.

4. The coating nozzle according to claim 3 , wherein the reaction medium is plasma.

5. A coating device, comprising:
one or more coating nozzles according to claim 3 ; and
a transport mechanism configured to transport an object to be coated, so that the object to be coated sequentially passes through the first reaction region of the first reactant and the second reaction region of the second reactant for each of the one or more coating nozzles.

6. The coating nozzle according to claim 1 , comprising multiple serial connected groups of spouts, wherein each group of spouts comprises at least the first reactant spout, the second reactant spout, and the first air curtain spout.

7. A coating device, comprising:
one or more coating nozzles according to claim 1 ; and
a transport mechanism configured to transport an object to be coated, so that the object to be coated sequentially passes through the first reaction region of the first reactant and the second reaction region of the second reactant for each of the one or more coating nozzles.

8. The device according to claim 7 , wherein the transport mechanism is configured to transport the object to be coated in a linear reciprocating manner.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Zhang Song
• Sun Tao

Classifications

• C23C16/45519 Primary

  Inert gas curtains · CPC title

• C23C16/45551 Primary

  for relative movement of the substrate and the gas injectors or half-reaction reactor compartments · CPC title

• C23C16/45542

  Plasma being used non-continuously during the ALD reactions · CPC title

• C23C16/4408

  by purging residual gases from the reaction chamber or gas lines · CPC title

• C23C16/45574 Primary

  Nozzles for more than one gas · CPC title