Buk acoustic wave resonator with guard rings having recessed space from electrode edge and periodic designs

Patent metadata

Field	Value
Publication number	US-11394361-B2
Application number	US-201916284831-A
Country	US
Kind code	B2
Filing date	Feb 25, 2019
Priority date	Feb 25, 2019
Publication date	Jul 19, 2022
Grant date	Jul 19, 2022

Abstract

A micromechanical system (MEMS) acoustic wave resonator is formed on a base substrate. A piezoelectric member is mounted on the base substrate. The piezoelectric member has a first electrode covering a first surface of the piezoelectric member and a second electrode covering a second surface of the piezoelectric member opposite the first electrode, the second electrode being bounded by a perimeter edge. A first guard ring is positioned on the second electrode spaced apart from the perimeter edge of the second electrode.

First claim

The invention claimed is:

1. A micromechanical system (MEMS) resonator comprising:
a base substrate;
a piezoelectric member mounted on the base substrate, the piezoelectric member having a first electrode attached to a first surface of the piezoelectric member and a second electrode attached to a second surface of the piezoelectric member opposite the first electrode, the second electrode being bounded by a perimeter edge; and
a guard ring attached to the second electrode spaced apart from the perimeter edge of the second electrode.

2. The MEMS resonator of claim 1 , wherein the guard ring is a first guard ring, further comprising a second guard ring attached to the second electrode, wherein the second guard ring is concentric with and surrounded by the first guard ring and spaced periodically from the first guard ring.

3. The MEMS resonator of claim 1 , wherein the MEMS resonator is a thin film bulk acoustic resonator.

4. The MEMS resonator of claim 1 , wherein the MEMS resonator is a solidly mounted resonator.

5. The MEMS resonator of claim 1 , further comprising an acoustic reflector attached to the first electrode.

6. The MEMS resonator of claim 5 , further comprising another acoustic reflector attached to the second electrode.

7. The MEMS resonator of claim 1 , wherein the guard ring has a width having a range of 5-7 um and wherein the guard ring is spaced apart from the perimeter edge of the second electrode by a space having a range of 1.6-2.4 um.

8. The MEMS resonator of claim 2 , wherein the first guard ring has a thickness and a width, and the second guard ring has the same thickness and the same width as the first guard ring.

9. The MEMS resonator of claim 2 , wherein the first guard ring has a thickness and a width, and the second guard ring has width that is different from the width of the first guard ring.

10. The MEMS resonator of claim 1 , wherein the first guard ring is a dielectric material.

11. A micromechanical system (MEMS) resonator comprising:
a base substrate;
a piezoelectric member mounted on the base substrate, the piezoelectric member having a first electrode attached to a first surface of the piezoelectric member and a second electrode attached to a second surface of the piezoelectric member opposite the first electrode, the second electrode being bounded by a perimeter edge;
a first guard ring positioned on the second electrode adjacent to the perimeter edge of the second electrode; and
a second guard ring positioned on the second electrode, wherein the second guard ring is concentric with and surrounded by the first guard ring and spaced periodically from the first guard ring.

12. The MEMS resonator of claim 11 , wherein the first guard ring has a thickness and a width, and the second guard ring has the same thickness and the same width as the first guard ring.

13. The MEMS resonator of claim 11 , wherein the first guard ring has a thickness and a width, and the second guard ring has a width that is different from the width of the first guard ring.

14. The MEMS resonator of claim 11 , wherein the MEMS resonator is a thin film bulk acoustic resonator.

15. The MEMS resonator of claim 11 , wherein the MEMS resonator is a solidly mounted resonator.

16. The MEMS resonator of claim 11 , further comprising an acoustic reflector attached to the first electrode.

17. The MEMS resonator of claim 11 , further comprising another acoustic reflector attached to the second electrode.

18. A method for designing a micromechanical system (MEMS) resonator, the method comprising:
selecting a piezoelectric material and material for a top electrode and bottom electrode for a simulated MEMS resonator;
selecting an initial thickness and width for a guard ring placed on the top electrode, and selecting a space to a perimeter edge of the top electrode from the outside edge of the guard ring;
simulating operation of the simulated MEMS resonator using a three-dimensional finite element simulator; and
adjusting the thickness, width and space to the perimeter edge and repeating simulating operation of the simulated MEMS resonator.

19. The method of claim 18 , further comprising adjusting the thickness, width and space to the perimeter edge and repeating simulating operation of the simulated MEMS resonator until the simulated MEMS resonator operates in piston mode.

20. The method of claim 18 , further comprising adjusting the thickness, width and space to the perimeter edge and repeating simulating operation of the simulated MEMS resonator until variation in impedance of the simulated MEMS resonator around a selected parallel resonance frequency is less than a selected threshold value.

Assignees

• Texas Instruments Inc

Inventors

• Yen Ting-Ta
• Goodlin Brian
• Jackson Ricky Alan
• Dellas Nicholas Stephen

Classifications

• G06F30/20

  Design optimisation, verification or simulation (optimisation, verification or simulation of circuit designs G06F30/30) · CPC title

• H03H9/175 Primary

  Acoustic mirrors · CPC title

• H03H9/0547

  consisting of a vertical arrangement (H03H9/0566 takes precedence) · CPC title

• H03H9/02157

  Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness · CPC title

• H03H9/0211

  of reflections · CPC title