Electrostatic chuck

Patent metadata

Field	Value
Publication number	US-11393708-B2
Application number	US-201916723064-A
Country	US
Kind code	B2
Filing date	Dec 20, 2019
Priority date	Dec 21, 2018
Publication date	Jul 19, 2022
Grant date	Jul 19, 2022

Abstract

An electrostatic chuck includes a base plate and a ceramic dielectric substrate. The ceramic dielectric substrate has a first major surface. The first major surface includes at least a first region and a second region. At least one first gas introduction hole connected to at least one of multiple first grooves. The first grooves include a first boundary groove, and at least one first in-region groove. Multiple second grooves and at least one second gas introduction hole are provided in the second region. The second grooves are include a second boundary groove extending along the first boundary and are provided to be most proximal to the first boundary. A groove end portion-end portion distance between the first boundary groove and the second boundary groove is smaller than a groove end portion-end portion distance between the first boundary groove and the first in-region groove.

First claim

What is claimed is:

1. An electrostatic chuck, comprising:
a base plate; and
a ceramic dielectric substrate having a first major surface and being provided on the base plate, the first major surface being exposed externally,
the first major surface including at least a first region, and a second region adjacent to the first region, the second region being directly adjacent and connected to the first region without any seal therebetween,
the first region of the first major surface having a plurality of first grooves and at least one first gas introduction hole provided in the first region, the at least one first gas introduction hole being connected to at least one of the plurality of first grooves,
the plurality of first grooves including
a first boundary groove extending along a first boundary and being provided to be most proximal to the first boundary, the first boundary being between the first region and the second region, and
a plurality of first in-region grooves different from the first boundary groove,

the second region of the first major surface having a plurality of second grooves and at least one second gas introduction hole provided in the second region, the at least one second gas introduction hole being connected to at least one of the plurality of second grooves,
the plurality of second grooves including a second boundary groove provided to be most proximal to the first boundary, the second boundary groove extending along the first boundary,
a distance between the first boundary groove and the second boundary groove being shorter than a distance between the first boundary groove and the first in-region groove adjacent to the first boundary groove, and also shorter than a distance between adjacent in-region grooves of the plurality of first in-region grooves.

2. The chuck according to claim 1 , wherein when projected onto a plane perpendicular to a first direction, at least a portion of the first gas introduction hole overlaps the first boundary groove, the first direction being from the base plate toward the ceramic dielectric substrate.

3. The chuck according to claim 1 , wherein when projected onto a plane perpendicular to a first direction, at least a portion of the second gas introduction hole overlaps the second boundary groove, the first direction being from the base plate toward the ceramic dielectric substrate.

4. The chuck according to claim 3 , wherein the first gas introduction hole is provided to be configured to supply a gas to the first boundary groove, and at least two first gas introduction holes are provided.

5. The chuck according to claim 4 , the second gas introduction hole is provided to be configured to supply the gas to the second boundary groove, and at least two second gas introduction holes are provided.

6. The chuck according to claim 1 , wherein an angle between a tangent line intersecting the first boundary and a joining line connecting a center of the first gas introduction hole and a center of the second gas introduction hole, where the tangent line intersects the boundary at a point closest to the joining line, is less than 90°.

7. The chuck according to claim 1 , wherein an angle between a tangent line intersecting the first boundary and a joining line connecting a center of the first gas introduction hole and a center of the second gas introduction hole, where the tangent line intersects the boundary at a point on the boundary closest to the joining line, is 90°.

8. The chuck according to claim 1 , wherein
the first major surface further has a lift pin hole provided in the first major surface, and
a distance between the lift pin hole and the first boundary groove is greater than a distance between the lift pin hole and the first in-region groove most proximal to the lift pin hole.

9. The chuck according to claim 1 , wherein
the first major surface includes at least the first region, the second region positioned outward of the first region, and a third region adjacent to the second region and positioned outward of the second region,
the plurality of second grooves includes a second outer boundary groove extending along a second boundary and being provided to be most proximal to the second boundary, the second boundary being between the second region and the third region,
the third region has a third boundary groove extending along the second boundary and being provided to be adjacent to the second boundary, and
a distance between the second outer boundary groove and the third boundary groove is greater than the distance between the first boundary groove and the second boundary groove.

10. The chuck according to claim 9 , further comprising an outer seal provided to surround a peripheral edge of the first major surface, at least a portion of the outer seal being configured to contact a chucking object,
in a second direction orthogonal to a first direction, a distance between the second boundary and the outer seal being shorter than a distance between the first boundary and the second boundary, the first direction being from the base plate toward the ceramic dielectric substrate.

11. An electrostatic chuck, comprising:
a base plate; and
a ceramic dielectric substrate having a first major surface and being provided on the base plate, the first major surface being exposed externally,
the first major surface including at least a first region, and a second region adjacent to the first region, the second region being directly adjacent and connected to the first region without any seal therebetween,
the first region of the first major surface having a plurality of first grooves and at least one first gas introduction hole provided in the first region, the at least one first gas introduction hole being connected to at least one of the plurality of first grooves,
the plurality of first grooves including
a first boundary groove extending along a first boundary and being provided to be most proximal to the first boundary, the first boundary being between the first region and the second region, and
a plurality of first in-region grooves different from the first boundary groove,

the second region of the first major surface having a plurality of second grooves and at least one second gas introduction hole provided in the second region, the at least one second gas introduction hole being connected to at least one of the plurality of second grooves,
the plurality of second grooves including a second boundary groove extending along the first boundary and being provided to be most proximal to the first boundary,
a boundary groove occupancy ratio in a first area being larger than an in-region groove occupancy ratio in a second area, the first area having a prescribed unit area and including the first boundary, the first boundary groove, and the second boundary groove, the second area having the same configuration and the same dimensions as the first area and including the first in-region groove,
wherein a distance between the first boundary groove and the second boundary groove is shorter than a distance between adjacent in-region grooves of the plurality of first in-region grooves.

12. The chuck according to claim 11 , wherein when projected onto a plane perpendicular to a first direction, at least a portion of the first gas introduction hole overlaps the first boundary groove, the first direction being from the base plate toward the ceramic dielectric substrate.

13. The chuck according to claim 11 , wherein when projected onto a plane perpendicular to a first direction, at least a portion of the second gas introduction hole overlaps the second boundary groove, the first direction being from the ba

Assignees

• Toto Ltd

Inventors

• Ikeguchi Masafumi
• Itoyama Tetsuro
• Saigan Shuichiro
• Shiraishi Jun

Classifications

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title