Ultra-thin conductor based semi-transparent electromagnetic interference shielding

Patent metadata

Field	Value
Publication number	US-11382245-B2
Application number	US-202017435540-A
Country	US
Kind code	B2
Filing date	Feb 28, 2020
Priority date	Mar 1, 2019
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

Electromagnetic interference (EMI) shields and methods for broadband EMI shielding are provided. An EMI shield disposed in a path of electromagnetic radiation blocks a broad range of frequencies (>about 800 MHz to <about 90 GHz) to a shielding efficiency of >to 20 dB, while transmitting wavelengths in a visible range to an average transmission efficiency of >about 85% through the electromagnetic shield. The shield includes a flexible stack comprising a continuous ultrathin metal film comprising silver (Ag) and copper (Cu) and two antireflection dielectric layers disposed on either side of the ultrathin metal film. The shield may also include multiple stacks or an optional graphene layer that may be spaced apart from the flexible stack to achieve radiofrequency (RE) absorption, which provides additional form of EMI shielding. The EMI shield can be made via roll-to-roll sputtering.

First claim

What is claimed is:

1. A method for broadband electromagnetic interference (EMI) shielding comprising:
disposing an electromagnetic shield in a transmission path of electromagnetic radiation for blocking a range of frequencies of greater than or equal to about 600 MHz to less than or equal to about 90 GHz to a shielding efficiency of greater than or equal to 20 dB, while transmitting a range of wavelengths in a visible range of greater than or equal to about 390 nm to less than or equal to about 740 nm to an average visible transmission efficiency of greater than or equal to about 65% through the electromagnetic shield, wherein the electromagnetic shield includes a flexible stack comprising:
a continuous metal film defining a first side and an opposite second side and comprising silver (Ag) at greater than or equal to about 80 atomic % and copper (Cu) at less than or equal to about 20 atomic % having a thickness of less than or equal to about 10 nm, a sheet resistance of less than or equal to about 20 Ohm/square, that is substantially transparent to the range of wavelengths;
a first conductive layer disposed adjacent to the first side of the continuous metal film, wherein the first conductive layer comprises a conductive dielectric material selected from the group consisting of: indium tin oxide, aluminum tin oxide, indium zinc oxide, fluorine-doped tin oxide, poly(3,4-ethylenedioxythiophene) (PEDOT), and mixtures thereof; and
a second conductive layer disposed adjacent to the opposite second side of the continuous metal film, wherein the second conductive layer comprises a conductive dielectric material selected from the group consisting of: indium tin oxide, aluminum tin oxide, indium zinc oxide, fluorine-doped tin oxide, poly(3,4-ethylenedioxythiophene) (PEDOT), and mixtures thereof.

2. The method of claim 1 , wherein the electromagnetic shield further comprises a graphene layer.

3. The method of claim 2 , wherein the graphene layer comprises at least one dopant.

4. The method of claim 2 , wherein the electromagnetic shield further comprises at least one spacer layer comprising a dielectric material disposed between the graphene layer and the second conductive layer of the flexible stack.

5. The method of claim 4 , wherein the at least one spacer layer has a thickness corresponding to a quarter of peak wavelength of electromagnetic radiation in the range of frequencies of greater than or equal to about 800 MHz to less than or equal to about 90 GHz.

6. The method of claim 1 , wherein the blocking is for the range of frequencies of greater than or equal to about 8 GHz to less than or equal to about 40 GHz to a shielding efficiency of greater than or equal to 26 dB.

7. The method of claim 1 , wherein the electromagnetic shield further comprises a graphene layer that together with the flexible stack defines a resonator cavity, so that the blocking comprises absorbing the range of frequencies of greater than or equal to about 800 MHz to less than or equal to about 90 GHz within the resonator cavity so that a reflectivity of the electromagnetic shield is less than or equal to about 1%.

8. The method of claim 1 , wherein the shielding efficiency is greater than or equal to 20 dB while the average visible transmission efficiency is greater than or equal to about 85%.

9. The method of claim 1 , wherein the shielding efficiency is greater than or equal to 30 dB while the average visible transmission efficiency is greater than or equal to about 80%.

10. The method of claim 1 , wherein the shielding efficiency is greater than or equal to 50 dB while the average visible transmission efficiency is greater than or equal to about 65%.

11. The method of claim 1 , wherein the first conductive layer has a thickness of less than or equal to about 45 nm and the second conductive layer has a thickness of less than or equal to about 45 nm.

12. The method of claim 1 , wherein the flexible stack further comprises a substrate that is transmissive to the range of wavelengths.

13. The method of claim 1 , wherein the flexible stack has a sheet resistance (R s ) of less than or equal to 20 Ohm/square after greater than or equal to about 250 cycles of bending.

14. A method for broadband electromagnetic shielding comprising:
disposing an electromagnetic shield in a transmission path of electromagnetic radiation to block a range of frequencies of greater than or equal to about 800 MHz to less than or equal to about 90 GHz to a shielding efficiency of greater than or equal to 20 dB while transmitting a range of wavelengths in a visible range of greater than or equal to about 390 nm to less than or equal to about 740 nm to an average visible transmission efficiency of greater than or equal to about 65% through the electromagnetic shield, wherein the electromagnetic shield comprises:
a first flexible stack comprising:
a first continuous metal film defining a first side and an opposite second side and comprising silver (Ag) at greater than or equal to about 80 atomic % and copper (Cu) at less than or equal to about 20 atomic % having a thickness of less than or equal to about 10 nm, a sheet resistance of less than or equal to about 20 Ohm/square, that is substantially transparent to the range of wavelengths;
a first conductive layer disposed on the first side of the first continuous metal film, wherein the first conductive layer comprises a conductive dielectric material selected from the group consisting of: indium tin oxide, aluminum tin oxide, indium zinc oxide, fluorine-doped tin oxide, poly(3,4-ethylenedioxythiophene) (PEDOT), and mixtures thereof;
a second conductive layer disposed on the opposite second side of the first continuous metal film, wherein the second conductive layer comprises a conductive dielectric material selected from the group consisting of: indium tin oxide, aluminum tin oxide, indium zinc oxide, fluorine-doped tin oxide, poly(3,4-ethylenedioxythiophene) (PEDOT), and mixtures thereof;

a second flexible stack comprising:
a second continuous metal film defining a first side and an opposite second side and comprising silver (Ag) at greater than or equal to about 80 atomic % and copper (Cu) at less than or equal to about 20 atomic % having a thickness of less than or equal to about 10 nm, a sheet resistance of less than or equal to about 20 Ohm/square, that is substantially transparent to the range of wavelengths;
a third layer disposed on the first side of the second continuous metal film, wherein the third layer comprises a conductive dielectric material selected from the group consisting of: indium tin oxide, aluminum tin oxide, indium zinc oxide, fluorine-doped tin oxide, poly(3,4-ethylenedioxythiophene) (PEDOT), and mixtures thereof;
a fourth layer disposed on the opposite second side of the second continuous metal film, wherein the fourth layer comprises a conductive dielectric material selected from the group consisting of: indium tin oxide, aluminum tin oxide, indium zinc oxide, fluorine-doped tin oxide, poly(3,4-ethylenedioxythiophene) (PEDOT), and mixtures thereof; and

a spacing layer comprising a dielectric material disposed between the first flexible stack and the second flexible stack.

15. The method of claim 14 , wherein the spacing layer has a thickness corresponding to a quarter of peak wavelength of electromagnetic radiation in the range of frequencies of greater than or equal to about 800 MHz to less than or equal to about 90 GHz.

16. The method of claim 14 , wherein the shielding efficiency is greater than or equal to 30 dB while the average visible transmission efficiency is greater than

Assignees

• Univ Michigan Regents

Inventors

• Guo Lingjie Jay
• Wang Heyan

Classifications

• H05K9/0084 Primary

  comprising a single continuous metallic layer on an electrically insulating supporting structure, e.g. metal foil, film, plating coating, electro-deposition, vapour-deposition · CPC title

• H01B1/02

  mainly consisting of metals or alloys · CPC title

• H05K9/0094 Primary

  being light-transmitting, e.g. transparent, translucent · CPC title

• H05K9/0088

  comprising a plurality of shielding layers; combining different shielding material structure · CPC title

• H05K1/02

  Details · CPC title