Systems and methods for reducing power reflected towards a higher frequency rf generator during a period of a lower rf generator and for using a relationship to reduce reflected power
US-2016308560-A1 · Oct 20, 2016 · US
US11382190B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11382190-B2 |
| Application number | US-201815923455-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 16, 2018 |
| Priority date | Dec 20, 2017 |
| Publication date | Jul 5, 2022 |
| Grant date | Jul 5, 2022 |
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A defrosting system includes an RF signal source, two electrodes proximate to a cavity within which a load to be defrosted is positioned, a transmission path between the RF signal source and the electrodes, and an impedance matching network electrically coupled along the transmission path between the output of the RF signal source and the electrodes. The system also includes power detection circuitry coupled to the transmission path and configured to detect reflected signal power along the transmission path. A system controller is configured to modify, based on the reflected signal power, a value of a variable passive component of the impedance matching network to reduce the reflected signal power. The impedance matching network may be a single-ended network or a double-ended network.
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What is claimed is: 1. A thermal increase system coupled to a cavity for containing a load, the thermal increase system comprising: a radio frequency (RF) signal source configured to supply an RF signal; a transmission path electrically coupled between the RF signal source and first and second electrodes that are positioned across the cavity; a double-ended impedance matching network electrically coupled along the transmission path, wherein the double-ended impedance matching network comprises first and second inputs, a network of variable passive components including a variable inductance coupled between the first and second inputs, a first output coupled to the first electrode and configured to produce a first balanced RF signal based on the RF signal, and a second output coupled to the second electrode and configured to produce a second balanced RF signal based on the RF signal, wherein the first balanced RF signal and the second balanced RF signal are referenced against each other to have a phase difference between 120 and 240 degrees; power detection circuitry configured to detect reflected signal power along the transmission path; and a controller configured to modify, based on the reflected signal power, one or more values of one or more of the variable passive components of the impedance matching network to reduce the reflected signal power, wherein the one or more values includes an inductance of the variable inductance. 2. The thermal increase system of claim 1 , wherein the RF signal source is configured to produce an unbalanced RF signal, and the system further comprises: a conversion apparatus with an input coupled to an output of the RF signal source and two outputs coupled through the double-ended impedance matching network to the first and second electrodes, wherein the conversion apparatus is configured to receive the unbalanced RF signal at the input, to convert the unbalanced RF signal into a balanced RF signal comprised of the first and second balanced RF signals, and to produce the first and second balanced RF signals at the two outputs. 3. The thermal increase system of claim 2 , wherein the conversion apparatus comprises a balun. 4. The thermal increase system of claim 1 , wherein the RF signal source includes a balanced amplifier configured to produce the first and second balanced RF signals at two outputs of the RF signal source, wherein the two outputs are coupled through the double-ended impedance matching network to the first and second electrodes. 5. The thermal increase system of claim 1 , wherein the double-ended variable impedance matching network comprises: a first variable impedance circuit connected between the first input and the first output; and a second variable impedance circuit connected between the second input and the second output. 6. The thermal increase system of claim 5 , wherein: the first variable impedance circuit includes a plurality of first passive components connected in series between the first input and the first output, and a plurality of first bypass switches, wherein each of the first bypass switches is connected in parallel across terminals of one of the first passive components, and an electrically conductive state of each of the first bypass switches is controlled through a control signal from the controller; and the second variable impedance circuit includes a plurality of second passive components connected in series between the second input and the second output, and a plurality of second bypass switches, wherein each of the second bypass switches is connected in parallel across terminals of one of the second passive components, and an electrically conductive state of each of the second bypass switches is controlled through a control signal from the controller. 7. The thermal increase system of claim 6 , wherein: the first passive components include at least a first inductor coupled in series with a second inductor; the second passive components include at least a third inductor coupled in series with a fourth inductor; the first and third inductors constitute a first set of paired inductors with equal values and, during operation of the system, the operational states of a first bypass switch connected across the first inductor and a third bypass switch connected across the third inductor are controlled to be the same; and the second and fourth inductors constitute a second set of paired inductors with equal values and, during operation of the system, the operational states of a second bypass switch connected across the second inductor and a fourth bypass switch connected across the fourth inductor are controlled to be the same. 8. The thermal increase system of claim 6 , wherein: the first passive components comprises a plurality of inductors coupled in series between the first input and the first output. 9. The thermal increase system of claim 8 , wherein at least some of the plurality of inductors have different inductance values. 10. The thermal increase system of claim 1 , wherein: the power detection circuitry is further configured to detect the forward signal power along the transmission path; and the controller is configured to modify the one or more values of the one or more of the variable passive components based on the reflected signal power and the forward signal power. 11. A method of operating a thermal increase system that includes a cavity, the method comprising: supplying, by a radio frequency (RF) signal source, one or more RF signals to a transmission path that is electrically coupled between the RF signal source and first and second electrodes that are positioned across the cavity; detecting, by power detection circuitry, reflected signal power along the transmission path; and modifying, by a controller, one or more values of one or more of variable passive components of an impedance matching network that is electrically coupled along the transmission path to reduce the reflected signal power, wherein the impedance matching network is a double-ended impedance matching network electrically coupled along the transmission path, wherein the double-ended impedance matching network comprises first and second inputs, a network of variable passive components including a variable inductance coupled between the first and second inputs, a first output coupled to the first electrode and configured to produce a first balanced RF signal based on the RF signal, and a second output coupled to the second electrode and configured to produce a second balanced RF signal based on the RF signal, wherein the first balanced RF signal and the second balanced RF signal are referenced against each other to have a phase difference between 120 and 240 degrees, wherein the one or more values includes an inductance of the variable inductance. 12. The method of claim 11 , wherein the RF signal source is configured to produce an unbalanced RF signal, and the method further comprises: converting, by a conversion apparatus, the unbalanced RF signal into a balanced RF signal comprised of first and second balanced RF signals; and conveying the first balanced RF signal to the first electrode; and conveying the second balanced signal to the second electrode. 13. The method of claim 11 , wherein the double-ended variable impedance matching network includes first and second outputs, a first variable impedance circuit connected between the first input and the first output, and a second variable impedance circuit connected between the second input and the second output, and wherein the method further comprises: sending control signals to a plurality of first bypass switches to control electr
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