Cryogenic on-chip microwave filter for quantum devices

Patent metadata

Field	Value
Publication number	US-11380969-B2
Application number	US-202016943437-A
Country	US
Kind code	B2
Filing date	Jul 30, 2020
Priority date	Sep 19, 2018
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

An on-chip microwave filter circuit includes a substrate formed of a first material that exhibits at least a threshold level of thermal conductivity, wherein the threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates. The filter circuit further includes a dispersive component configured to filter a plurality of frequencies in an input signal, the dispersive component including a first transmission line disposed on the substrate, the first transmission line being formed of a second material that exhibits at least a second threshold level of thermal conductivity, where the second threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates. The dispersive component further includes a second transmission line disposed on the substrate, the second transmission line being formed of the second material.

First claim

What is claimed is:

1. An on-chip microwave filter circuit comprising:
a substrate formed of a first material that exhibits at least a threshold level of thermal conductivity, wherein the threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates; and
a dispersive component configured to filter a plurality of frequencies in an input signal, the dispersive component comprising:
a first transmission line disposed on the substrate and configured to receive a signal from a first fridge stage in a series of fridge stages, the first transmission line being formed of a second material that exhibits at least a second threshold level of thermal conductivity, wherein the second threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates, and wherein a filtered frequency in the plurality of frequencies is a function of a width of the first transmission line, and
a second transmission line disposed on the substrate and configured to receive a reflected signal from a second fridge stage in the series of fridge stages, the second transmission line being formed of the second material.

2. The circuit of claim 1 , further comprising:
a connector coupled to the first transmission line, the connector being formed of a third material that exhibits at least a third threshold level of thermal conductivity, wherein the third threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates.

3. The circuit of claim 2 , further comprising:
a second connector coupled to the second transmission line, the second connector being formed of the third material, the second connector configured to receive the reflected signal.

4. The circuit of claim 2 , wherein the second material and the third material are the same.

5. The circuit of claim 1 , the dispersive component further comprising:
a third transmission line disposed on the substrate, the third transmission line being formed of the second material.

6. The circuit of claim 5 , wherein the third transmission line is disposed on the substrate between the first transmission line and a second transmission line.

7. The circuit of claim 5 , wherein the third transmission line is spaced apart on the substrate from the first transmission line.

8. The circuit of claim 1 , wherein the first transmission line has a thickness of about 10 nm to 1000 nm.

9. The circuit of claim 1 , further comprising:
a housing coupled to the substrate, the housing being formed of a fourth material that exhibits at least a fourth threshold level of thermal conductivity, wherein the fourth threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates.

10. The circuit of claim 1 , wherein the first transmission line has a width of about 0.5 mm.

11. A method comprising:
forming a substrate, the substrate being formed of a first material that exhibits at least a threshold level of thermal conductivity, wherein the threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates; and
forming an on-chip microwave filter on the substrate by assembling a circuit having two ports, the circuit comprising:
a dispersive component to filter a plurality of frequencies in an input signal, the dispersive component comprising:
a first transmission line deposited on the substrate and configured to receive a signal from a first fridge stage in a series of fridge stages, the first transmission line being formed of a second material that exhibits at least a second threshold level of thermal conductivity, wherein the second threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates, and wherein a filtered frequency in the plurality of frequencies is a function of a width of the first transmission line, and
a second transmission line disposed on the substrate and configured to receive a reflected signal from a second fridge stage in the series of fridge stages, the second transmission line being formed of the second material.

12. The method of claim 11 , further comprising:
forming a housing, the housing comprising:
a closable structure in which the circuit is positioned, the structure being formed of a third material that exhibits at least a threshold level of thermal conductivity, wherein the threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates.

13. The method of claim 11 , further comprising:
coupling a first connector to the first transmission line, the first connector being formed of a fourth material that exhibits at least a threshold level of thermal conductivity, wherein the threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates.

14. The method of claim 13 , further comprising:
coupling a second connector to the second transmission line, the second connector being formed of the fourth material, the second connector configured to receive the reflected signal.

15. The method of claim 13 , wherein the fourth material and the second material are the same.

16. The method of claim 11 , wherein the dispersive component further comprises:
a third transmission line being formed of the second material.

17. The method of claim 16 , wherein the third transmission line is disposed between the first transmission line and a second transmission line on the substrate.

18. The method of claim 16 , wherein the third transmission line is spaced apart on the substrate from the first transmission line.

19. The method of claim 11 , wherein the first transmission line has a thickness of about 10 nm to 1000 nm.

20. A fabrication system performing operations comprising:
forming a substrate, the substrate being formed of a first material that exhibits at least a threshold level of thermal conductivity, wherein the threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates; and
forming an on-chip microwave filter on the substrate by assembling a circuit having two ports, the circuit comprising:
a dispersive component to filter a plurality of frequencies in an input signal, the dispersive component comprising:
a first transmission line deposited on the substrate and configured to receive a signal from a first fridge stage in a series of fridge stages, the first transmission line being formed of a second material that exhibits at least a second threshold level of thermal conductivity, wherein the second threshold level of thermal conductivity is achieved at a cryogenic temperature range in which a quantum computing circuit operates, and wherein a filtered frequency in the plurality of frequencies is a function of a width of the first transmission line, and
a second transmission line disposed on the substrate and configured to receive a reflected signal from a second fridge stage in the series of fridge stages, the second transmission line being formed of the second material.

Assignees

• IBM

Inventors

• Gumann Patryk
• Olivadese Salvatore B
• Brink Markus

Classifications

• H10W40/10

  Arrangements for heating · CPC title

• G06N10/20

  Models of quantum computing, e.g. quantum circuits or universal quantum computers · CPC title

• G06N10/40

  Physical realisations or architectures of quantum processors or components for manipulating qubits, e.g. qubit coupling or qubit control · CPC title

• H01P1/20

  Frequency-selective devices, e.g. filters · CPC title

• H04B3/56

  Circuits for coupling, blocking, or by-passing of signals · CPC title