Method for producing a nanofilm, sensor arrangement comprising a nanofilm, and nanosieve comprising a nanofilm

Patent metadata

Field	Value
Publication number	US-11378536-B2
Application number	US-201916433289-A
Country	US
Kind code	B2
Filing date	Jun 6, 2019
Priority date	Jun 7, 2018
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

A method for producing a nanofilm includes providing a microsieve having a first and a second opposite surface region, wherein micropores are formed between the first and second surface regions; applying a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles; and creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to the wall regions of the micropores and form the nanofilm.

First claim

What is claimed is:

1. A method for producing a nanofilm, the method comprising:
providing a microsieve having a first and a second opposite surface region, wherein micropores are formed extending through the first and second surface regions;
applying a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles; and
creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to wall regions of the micropores and form the nanofilm,
wherein the nanofilm comprises a self-supporting horizontal portion spanning the micropores.

2. The method as claimed in claim 1 , wherein the nanomaterial suspension is moved by the pressure difference into the micropores, which are mechanically connected to one another by webs, in order to form the nanofilm furthermore regionally in the micropores and in a manner spanning the micropores between the webs and on the webs at the microsieve.

3. The method as claimed in claim 1 , wherein the pressure difference exerted between the first and second surface regions of the microsieve is exerted uniformly on the plurality of micropores of the microsieve.

4. The method as claimed in claim 1 , wherein the nanomaterial suspension comprises a solvent having the nanomaterial particles, the method further comprising heating the nanofilm adhering to the microsieve in order to densify the nanofilm and/or to remove residual solvent of the applied nanomaterial suspension.

5. The method as claimed in claim 1 , wherein the microsieve is formed as a substrate having micropores arranged therein, and wherein the substrate has an edge region surrounding the micropores formed in the substrate.

6. The method as claimed in claim 1 , wherein the microsieve is integrated in a semiconductor wafer in order to produce the nanofilm at the wafer level.

7. The method as claimed in claim 1 , wherein the microsieve has a pore diameter of 0.1 to 20 μm and a pore length of 200 to 2000 nm, and wherein the nanomaterial particles have an average lateral extent of 0.1 to 50 μm.

8. The method as claimed in claim 1 , wherein the nanomaterial particles are formed as nanomaterial platelets or nanomaterial flakes, and wherein the nanomaterial particles have an average lateral extent of 0.1 to 50 μm.

9. The method as claimed in claim 1 , wherein the nanomaterial particles comprise carbon to form a carbon nanofilm or a graphene nanofilm.

10. The method as claimed in claim 1 , wherein the micropores are mechanically connected to one another by webs, wherein the nanofilm further comprises nanopores in regions spanning the micropores, in order to form a nanosieve having the nanopores.

11. The method as claimed claim 1 , wherein creating a pressure difference comprises exerting a reduced pressure on a plurality of the micropores at the second surface region of the microsieve in order to draw the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to wall regions of the micropores and form the nanofilm.

12. The method as claimed in claim 1 , wherein creating a pressure difference comprises exerting an excess pressure on a plurality of the micropores at the first surface region of the microsieve in order to press the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to wall regions of the micropores and form the nanofilm.

13. A sensor arrangement comprising a nanofilm configured as a sensor element, wherein the nanofilm comprises:
a microsieve having a first and a second opposite surface region, wherein micropores are formed extending through the first and second surface regions; and
a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles,
wherein the nanofilm is configured for creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to wall regions of the micropores and form the nanofilm, wherein the nanofilm comprises a self-supporting horizontal portion spanning the micropores, and wherein the nanofilm is configured for detecting a measurement variable.

14. The sensor arrangement as claimed in claim 13 , wherein the nanofilm is electrically conductive and is configured such that at least regional deformation of the nanofilm brings about a change in an electrical property of the nanofilm.

15. The sensor arrangement as claimed in claim 13 , wherein the nanofilm is configured in a manner spanning the micropores between webs of the microsieve, wherein a deflection of the microsieve with the nanofilm arranged thereon brings about a detectable change in an electrical property of the nanofilm.

16. The sensor arrangement as claimed in claim 13 , wherein the micropores are configured in a honeycomb-shaped fashion, wherein the nanofilm is configured as a honeycomb array in a manner spanning the micropores formed in a honeycomb-shaped fashion between webs of the microsieve, and wherein a deflection of one or more nanofilm honeycombs brings about a detectable change in the conductivity of the nanofilm.

17. The sensor arrangement as claimed in claim 13 , wherein the nanofilm is configured to adsorb a target substance or a target gas, and wherein a change in an electrical property of the nanofilm is brought about in the event of the target substance or target gas binding to the nanofilm.

18. A nanosieve comprising a nanofilm, wherein the nanofilm comprises:
a microsieve having a first and a second opposite surface region, wherein micropores are formed extending through the first and second surface regions; and
a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles,
wherein the nanofilm is configured for creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to wall regions of the micropores and form the nanofilm, wherein the nanomaterial suspension is moved by the pressure difference into the micropores, which are mechanically connected to one another by webs, in order to form the nanofilm furthermore regionally in the micropores and in a manner spanning the micropores between the webs and on the webs at the microsieve, wherein the nanofilm comprises a self-supporting horizontal portion spanning the micropores, and wherein the nanofilm has nanopores in the regions spanning the webs, in order to form a nanosieve.

Assignees

• Infineon Technologies Ag

Inventors

• Debie Derek
• Zoepfl Alexander

Classifications

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B05D7/22

  to internal surfaces, e.g. of tubes · CPC title

• G01N27/227

  Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors (G01N27/225 takes precedence) · CPC title

• B05D3/12

  by mechanical means · CPC title

• G01N27/127 Primary

  comprising nanoparticles · CPC title