Magnetic levitation system, base of a magnetic levitation system, vacuum system, and method of contactlessly holding and moving a carrier in a vacuum chamber

Patent metadata

Field	Value
Publication number	US-11377310-B2
Application number	US-201817272582-A
Country	US
Kind code	B2
Filing date	Sep 19, 2018
Priority date	Sep 19, 2018
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

A magnetic levitation system for contactlessly holding and moving a carrier in a vacuum chamber, including a base defining a transportation track, a carrier movable above the base along the transportation track, and at least one magnetic bearing for generating a magnetic levitation force between the base and the carrier. The at least one magnetic bearing includes a first magnet unit arranged at the base and a second magnet unit arranged at the carrier. The magnetic levitation system further includes a magnetic side stabilization device for stabilizing the carrier in a lateral direction, the magnetic side stabilization device comprising a stabilization magnet unit arranged at the base, wherein at least one of the first magnet unit and the first stabilization magnet unit is arranged in a housing space of the base, the housing space being separated from an inner volume of the vacuum chamber by a separation wall.

First claim

The invention claimed is:

1. A magnetic levitation system for contactlessly holding and moving a carrier in a vacuum chamber, comprising:
a base defining a transportation track;
a carrier movable above and relative to the base along the transportation track;
at least one magnetic bearing for generating a magnetic levitation force (F) between the base and the carrier, the at least one magnetic bearing comprising a first magnet unit arranged at the base and a second magnet unit arranged at the carrier; and
a magnetic side stabilization device for stabilizing the carrier in a lateral direction, the magnetic side stabilization device comprising a stabilization magnet unit arranged at the base;
wherein at least one of the first magnet unit and the stabilization magnet unit is arranged in a housing space of the base, the housing space being separated from an inner volume of the vacuum chamber by a separation wall.

2. The magnetic levitation system of claim 1 , wherein the first magnet unit and the second magnet unit are permanent magnets with poles of the same polarity facing each other.

3. The magnetic levitation system of claim 1 , wherein the separation wall provides a vacuum-tight sealing between the inner volume of the vacuum chamber and the housing space of the base.

4. The magnetic levitation system of claim 1 , wherein the separation wall is provided as a flat cover covering the base and extending along the transportation track.

5. The magnetic levitation system of claim 1 , wherein the separation wall is provided as a non-magnetic metal sheet.

6. The magnetic levitation system of claim 1 , wherein the separation wall has a thickness of 0.5 mm or more and 5 mm or less.

7. The magnetic levitation system of claim 1 , wherein the stabilization magnet unit of the magnetic side stabilization device is actively controlled and arranged in the housing space of the base, the magnetic side stabilization device further comprising a magnetic counterpart arranged at the carrier and configured to magnetically interact with the stabilization magnet unit.

8. The magnetic levitation system of claim 1 , wherein the magnetic side stabilization device comprises a Lorentz actuator.

9. The magnetic levitation system of claim 1 , further comprising a linear motor for moving the carrier along the transportation track, the linear motor comprising drive coils arranged in the housing space.

10. The magnetic levitation system of claim 1 , wherein the carrier is configured as a passive mover which does not carry an actively controlled magnetic component.

11. The magnetic levitation system of claim 1 , wherein the base comprises a movable track portion configured to change a movement direction of a carrier that is contactlessly held above the movable track portion.

12. The magnetic levitation system of claim 11 , wherein the movable track portion is a rotatable track portion configured to change the movement direction of the carrier that is contactlessly held above the rotatable track portion.

13. The magnetic levitation system of claim 11 , wherein the movable track portion includes a movable housing space separated from the inner volume of the vacuum chamber and housing at least one magnet unit of the magnetic levitation system.

14. A base of a magnetic levitation system for contactlessly holding and moving a carrier in a vacuum chamber, wherein the base defines a transportation track along which a carrier can be contactlessly moved above and relative to the base, wherein the base comprises a housing space separated from an inner volume of the vacuum chamber by a separation wall and wherein the housing space houses at least one of a first magnet unit of at least one magnetic bearing and a stabilization magnet unit of a magnetic side stabilization device.

15. The magnetic levitation system of claim 7 , wherein the magnetic counterpart comprises a permanent magnet and the stabilization magnet unit comprises a coil.

16. A vacuum system, comprising:
a transport vacuum chamber;
a first vacuum processing chamber and a second vacuum processing chamber; and
a magnetic levitation system for contactlessly holding and moving a carrier in the transport vacuum chamber from the first vacuum processing chamber to the second vacuum processing chamber along a transportation track, the magnetic levitation system comprising:
a base defining the transportation track;
the carrier movable above and relative to the base along the transportation track;
at least one magnetic bearing for generating a magnetic levitation force (F) between the base and the carrier, the at least one magnetic bearing comprising a first magnet unit arranged at the base; and
a magnetic side stabilization device for stabilizing the carrier in a lateral direction, the magnetic side stabilization device comprising a stabilization magnet unit arranged at the base, wherein at least one of the first magnet unit and the stabilization magnet unit is arranged in a housing space of the base which is separated from an inner volume of the transport vacuum chamber by a separation wall.

17. A method of contactlessly holding and moving a carrier in a vacuum chamber, comprising:
providing a base defining a transportation track and a carrier movable above and relative to the base along the transportation track;
generating a magnetic levitation force (F) between the base and the carrier with at least one magnetic bearing comprising a first magnet unit arranged at the base and a second magnet unit arranged at the carrier; and
stabilizing the carrier in a lateral direction with a magnetic side stabilization device comprising a stabilization magnet unit arranged at the base, the carrier being arranged in an inner volume of the vacuum chamber provided at a first pressure (P 1 ) and at least one of the first magnet unit and the stabilization magnet unit being arranged in a housing space of the base provided at a second pressure (P 2 ) different from the first pressure (P 1 ).

18. The method of claim 17 , wherein the magnetic levitation force (F) is generated in a purely passive way.

19. The method of claim 17 , wherein the magnetic side stabilization device is actively controlled.

20. The method of claim 17 , wherein the magnetic side stabilization device comprises a Lorentz actuator.

Assignees

• Applied Materials Inc
• Aust Henning
• Meiss Thorsten

Inventors

• Aust Henning
• Meiss Thorsten

Classifications

• H10P72/30

  for conveying, e.g. between different workstations · CPC title

• H10P72/3208

  Changing the direction of the conveying path · CPC title

• H10P72/3204 Primary

  using magnetic elements · CPC title

• B65G2201/022

  Flat · CPC title

• B65G39/08

  the rollers being magnetic · CPC title