Photoresist stripper

Patent metadata

Field	Value
Publication number	US-11353794-B2
Application number	US-201816222248-A
Country	US
Kind code	B2
Filing date	Dec 17, 2018
Priority date	Dec 22, 2017
Publication date	Jun 7, 2022
Grant date	Jun 7, 2022

Abstract

Improved stripper solutions for removing photoresists from substrates are provided that typically have freezing points below about 0° C. and high loading capacities. The stripper solutions comprise dimethyl sulfoxide, quaternary ammonium hydroxide, and an alkanolamine having at least two carbon atoms, at least one amino substituent and at least one hydroxyl substituent, the amino and hydroxyl substituents attached to two different carbon atoms. Some formulations can additionally contain a secondary solvent. The formulations do not contain tetramethylammonium hydroxide. Methods for use of the stripping solutions are additionally provided.

First claim

What is claimed is:

1. A stripper solution for removing photoresist from substrates comprising:
about 20 wt. % to about 90 wt. % dimethyl sulfoxide;
about 1 wt. % to about 7 wt. % of quaternary ammonium hydroxide having at least one alkanol group comprising choline hydroxide;
about 1 wt. % to about 75 wt. % of alkanolamine;
about 0.001 wt. % to about 7 wt. % of a first corrosion inhibitor comprising copper (II) nitrate hemi (pentahydrate); and
about 1 wt. % to about 8 wt. % water;
wherein the solution exhibits a freezing point below about 0 degrees Celsius; and
wherein the quaternary ammonium hydroxide is free of tetramethylammonium hydroxide.

2. The solution of claim 1 , wherein the quaternary ammonium hydroxide further comprises tri(2-hydroxyethyl)methylammonium hydroxide.

3. The solution of claim 1 , wherein the alkanolamine is present in the amount of about 25 wt. % to about 75 wt. %.

4. The solution of claim 3 , wherein the alkanolamine includes monoethanolamine.

5. The solution of claim 3 , wherein the dimethyl sulfoxide is present in the amount of about 55 wt. % to about 60 wt. %;
wherein the quaternary ammonium hydroxide is present in the amount of about 1.5 wt. % to about 3.5 wt. %;
wherein the alkanolamine is present in the amount of about 30 wt. % to about 40 wt. %; and
wherein the first corrosion inhibitor is present in the amount of about 0.001 wt. % to about 3 wt. %.

6. The solution of claim 5 , wherein the alkanolamine includes monoethanolamine.

7. The solution of claim 1 , wherein the first corrosion inhibitor is present in an amount between about 0.001 wt. % to about 0.1 wt. %.

8. The solution of claim 1 , further comprising about 0.01 wt. % to about 3 wt. % of surfactant.

9. The solution of claim 1 , further comprising about 0.001 wt. % to about 3 wt. % of a second corrosion inhibitor wherein the second corrosion inhibitor is different from the first corrosion inhibitor.

10. The solution of claim 9 , wherein the second corrosion inhibitor is selected from the group consisting of resorcinol, glycerol, and sorbitol.

11. The solution of claim 10 , wherein the dimethyl sulfoxide is present in the amount of about 35 wt. % to about 45 wt. %, the quaternary ammonium hydroxide is present in the amount of about 1.5 wt. % to about 3.5 wt. %, the alkanolamine is present in the amount of about 50 wt. % to about 60 wt. %, the first corrosion inhibitor is present in the amount of about 0.05 wt. % to about 3 wt. %, and, the second corrosion inhibitor is present in the amount of about 0.001 wt. % to about 0.1 wt. %.

12. The solution of claim 11 , wherein the alkanolamine includes monoethanolamine.

13. The solution of claim 1 , wherein the freezing point is below about −15 degrees Celsius.

14. The solution of claim 1 , wherein the freezing point is below about −21 degrees Celsius.

15. A stripper solution for removing photoresist from substrates comprising:
about 20 wt. % to about 90 wt. % dimethyl sulfoxide;
about 1 wt. % to about 7 wt. % of quaternary ammonium hydroxide having at least one alkanol group comprising choline hydroxide;
about 1 wt. % to about 75 wt. % of alkanolamine;
about 0.001 wt. % to about 7 wt. % of a first corrosion inhibitor comprising copper (II) nitrate hemi (pentahydrate); and
water;
wherein a ratio of the amount of the water to the amount of the quaternary ammonium hydroxide is greater than about 1.2;
wherein the solution exhibits a freezing point below about 0 degrees Celsius; and
wherein the quaternary ammonium hydroxide is free of tetramethylammonium hydroxide.

16. A method of cleaning resist from a substrate comprising:
contacting the resist on a substrate with a stripping solution for a time sufficient to remove the desired amount of resist and removing the substrate from the stripping solution wherein the stripping solution comprises:
about 20 wt. % to about 90 wt. % dimethyl sulfoxide;
about 1 wt. % to about 7 wt. % of quaternary ammonium hydroxide having at least one alkanol group comprising choline hydroxide;
about 1 wt. % to about 75 wt. % of alkanolamine;
about 0.001 wt. % to about 7 wt. % of a first corrosion inhibitor comprising copper (II) nitrate hemi (pentahydrate); and
about 1 wt. % to about 8 wt. % water;
wherein the solution exhibits a freezing point below about 0 degrees Celsius; and
wherein the quaternary ammonium hydroxide is free of tetramethylammonium hydroxide.

Assignees

• Versum Mat Us Llc

Inventors

• Peters Richard Dalton
• Phenis Michael T

Classifications

• C11D3/30

  Amines; Substituted amines {; Quaternized amines} · CPC title

• B32B2307/7265

  Non-permeable · CPC title

• G03F7/426 Primary

  containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides · CPC title

• E04F2201/06

  Magnets · CPC title

• C11D3/048

  Nitrates or nitrites · CPC title