Vacuum pump, main sensor, and thread groove stator

Patent metadata

Field	Value
Publication number	US-11346349-B2
Application number	US-201816495296-A
Country	US
Kind code	B2
Filing date	Mar 2, 2018
Priority date	Mar 23, 2017
Publication date	May 31, 2022
Grant date	May 31, 2022

Abstract

A vacuum pump includes: a rotating portion and a stator portion between which an internal flow path is formed; an exhaust mechanism which sends gas from a suction port toward an outlet port through the internal flow path; and a main sensor for detecting that a deposited material has reached a prescribed thickness at a detection object position of the internal flow path, wherein the main sensor includes at least a pair of electrodes disposed in the internal flow path at an interval corresponding to the prescribed thickness, and a capacitance detection circuit which is connected to the pair of electrodes and which detects a capacitance between the pair of electrodes, and the capacitance detection circuit detects that a deposited material in the internal flow path has reached the prescribed thickness on the basis of a drop in an increase rate of the capacitance.

First claim

What is claimed is:

1. A vacuum pump, comprising: a rotating portion and a stator portion between which an internal flow path is formed; an exhaust mechanism which sends gas from a suction port toward an outlet port through the internal flow path; and a main sensor for detecting that a deposited material has reached a prescribed thickness at a detection object position of the internal flow path, wherein
the main sensor includes:
at least a pair of electrodes disposed in the internal flow path at an interval corresponding to the prescribed thickness; and
a capacitance detection circuit which is connected to the pair of electrodes and which detects a capacitance between the pair of electrodes, and
the capacitance detection circuit is configured to determine a rate of change of the capacitance between the pair of electrodes and to detect that a deposited material in the internal flow path has reached the prescribed thickness on the basis of a drop in the rate of change of the capacitance.

2. The vacuum pump according to claim 1 , wherein the interval of the pair of electrodes is set to one to two times an interval between the rotating portion and the stator portion at the detection object position.

3. The vacuum pump according to claim 1 , wherein the pair of electrodes have a flat plate shape and are disposed in parallel.

4. The vacuum pump according to claim 1 , wherein the pair of electrodes have a cylindrical shape and are disposed concentrically and coaxially.

5. The vacuum pump according to claim 1 , wherein the main sensor is disposed inside an outlet port-side flow path which connects an outlet of the exhaust mechanism and an outlet port of the vacuum pump to each other.

6. The vacuum pump according to claim 5 , wherein the main sensor is disposed at a portion farthest from the outlet port of the vacuum pump in the outlet port-side flow path.

7. The vacuum pump according to claim 1 , wherein the pair of electrodes are disposed so as to extend in a flow direction of gas that flows inside the internal flow path.

8. The vacuum pump according to claim 1 , wherein
the exhaust mechanism includes a thread groove pump in a rearmost stage thereof, and
a gas vent hole is provided in a vicinity of an outlet of the thread groove pump.

9. The vacuum pump according to claim 1 , further comprising an auxiliary sensor including a pair of electrodes which are disposed inside the internal flow path and which are connected to the capacitance detection circuit, wherein
an interval between the pair of electrodes of the auxiliary sensor is set shorter than the interval between the pair of electrodes of the main sensor.

10. The vacuum pump according to claim 1 , being configured such that an applied voltage between the pair of electrodes of the main sensor is equal to or lower than 100 V.

11. The vacuum pump according to claim 1 , wherein an insulating layer is formed on a surface of the pair of electrodes of the main sensor.

12. The vacuum pump according to claim 1 , wherein the capacitance detection circuit and the pair of electrodes of the main sensor are only energized during detection.

13. A main sensor comprising:
at least a pair of electrodes disposed in an internal flow path formed between a rotating portion and a stator portion of a vacuum pump at an interval corresponding to a prescribed thickness for deposited material;
a capacitance detection circuit which is connected to the pair of electrodes and which detects a capacitance between the pair of electrodes, and
wherein the capacitance detection circuit is configured to determine a rate of change of the capacitance between the pair of electrodes and to detect that deposited material in the internal flow path has reached the prescribed thickness on the basis of a drop in the rate of change of the capacitance.

14. A thread groove stator of a thread groove pump in a vacuum pump, the thread groove stator comprising a gas vent hole in a vicinity of an outlet of the thread groove pump wherein the gas vent hole is positioned proximate a main sensor that comprises:
at least a pair of electrodes disposed at an interval corresponding to a prescribed thickness for a deposited material; and
a capacitance detection circuit which is connected to the pair of electrodes and which detects a capacitance between the pair of electrodes, wherein the capacitance detection circuit is configured to determine a rate of change of the capacitance between the pair of electrodes and to detect that the deposited material has reached the prescribed thickness on the basis of a drop in the rate of change of the capacitance.

Assignees

• Edwards Japan Ltd

Inventors

• Kabasawa Takashi

Classifications

• G01B7/08

  using capacitive means · CPC title

• G01B7/06

  for measuring thickness {(measuring during the manufacture of coatings C23C14/54)} · CPC title

• F04D27/00 Primary

  Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids · CPC title

• F04D19/046

  Combinations of two or more different types of pumps · CPC title

• F05D2260/607

  Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles · CPC title