Vacuum pump

Patent metadata

Field	Value
Publication number	US-9453510-B2
Application number	US-201113991069-A
Country	US
Kind code	B2
Filing date	Oct 18, 2011
Priority date	Dec 10, 2010
Publication date	Sep 27, 2016
Grant date	Sep 27, 2016

Abstract

In a rotor blade cylindrical portion or a stator portion in which thread grooves are formed, convex surfaces (thread groove peak surfaces) configuring the peak sections of the thread grooves are cut by a desired amount over the entire circumference (a circumferential direction of the thread grooves) of a certain range in an axial direction. As a result, the gap on the lower side of the thread groove portion can partially be expanded by cutting the thread groove peak surfaces by a desired amount.

First claim

What is claimed is:

1. A vacuum pump comprising:
a casing in which an inlet port and an outlet port are formed;
a stator portion disposed on an inner side surface of the casing;
a rotating shaft enclosed in the casing and supported rotatably;
a rotor portion fixed to the rotating shaft;
a first gas transfer mechanism that has rotor blades disposed radially from an outer circumferential surface of the rotor portion, and stator blades protruding from an inner side surface of the stator portion toward the rotating shaft, and transfers, to the outlet port, gas suctioned from the inlet port by an interaction between the rotor blades and the stator blades; and
a second gas transfer mechanism that is disposed on the outlet port side of the first gas transfer mechanism, has a thread groove on either one of opposing surfaces of the rotor portion and the stator portion, transfers, to the outlet port, the gas suctioned from the inlet port, and forms a clearance between thread groove convex surfaces formed in the thread groove and an opposing surface facing the thread groove convex surfaces,
wherein the second gas transfer mechanism has a product contact avoidance structure in which a portion of the clearance is larger than a clearance between the thread groove convex surfaces formed on the inlet port side of the thread groove and the opposing surface facing the thread groove convex surfaces during rotation of the rotor portion,
the clearance in the region where products accumulate is formed wider.

2. The vacuum pump according to claim 1 , wherein the product contact avoidance structure has a structure in which each of the thread groove convex surfaces is cut by gradually increasing the amount of cutting each of the thread groove convex surfaces, from the thread groove convex surface formed on the inlet port side to the thread groove convex surface formed on the outlet port side.

3. The vacuum pump according to claim 2 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which each of the thread groove convex surfaces, which are formed in a region of ½ of the second gas transfer mechanism in an axial direction, is cut from the outlet port side toward the inlet port side.

4. The vacuum pump according to claim 3 , wherein the product contact avoidance structure has a structure in which the opposing surface facing the thread groove is cut by gradually increasing the amount of cutting the opposing surface, from the inlet port side toward the outlet port side.

5. The vacuum pump according to claim 4 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which the opposing surface, facing the thread groove formed in a region of ½ of the second gas transfer mechanism in the axial direction, is cut from the outlet port side toward the inlet port side.

6. The vacuum pump according to claim 3 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which the opposing surface, facing the thread groove formed in a region of ½ of the second gas transfer mechanism in the axial direction, is cut from the outlet port side toward the inlet port side.

7. The vacuum pump according to claim 2 , wherein the product contact avoidance structure has a structure in which the opposing surface facing the thread groove is cut by gradually increasing the amount of cutting the opposing surface, from the inlet port side toward the outlet port side.

8. The vacuum pump according to claim 7 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which the opposing surface, facing the thread groove formed in a region of ½ of the second gas transfer mechanism in the axial direction, is cut from the outlet port side toward the inlet port side.

9. The vacuum pump according to claim 2 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which the opposing surface, facing the thread groove formed in a region of ½ of the second gas transfer mechanism in the axial direction, is cut from the outlet port side toward the inlet port side.

10. The vacuum pump according to claim 1 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which each of the thread groove convex surfaces, which are formed in a region of ½ of the second gas transfer mechanism in an axial direction, is cut from the outlet port side toward the inlet port side.

11. The vacuum pump according to claim 10 , wherein the product contact avoidance structure has a structure in which the opposing surface facing the thread groove is cut by gradually increasing the amount of cutting the opposing surface, from the inlet port side toward the outlet port side.

12. The vacuum pump according to claim 11 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which the opposing surface, facing the thread groove formed in a region of ½ of the second gas transfer mechanism in the axial direction, is cut from the outlet port side toward the inlet port side.

13. The vacuum pump according to claim 10 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which the opposing surface, facing the thread groove formed in a region of ½ of the second gas transfer mechanism in the axial direction, is cut from the outlet port side toward the inlet port side.

14. The vacuum pump according to claim 1 , wherein the product contact avoidance structure has a structure in which the opposing surface facing the thread groove is cut by gradually increasing the amount of cutting the opposing surface, from the inlet port side toward the outlet port side.

15. The vacuum pump according to claim 14 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which the opposing surface, facing the thread groove formed in a region of ½ of the second gas transfer mechanism in the axial direction, is cut from the outlet port side toward the inlet port side.

16. The vacuum pump according to claim 1 , wherein, in the second gas transfer mechanism, the product contact avoidance structure has a structure in which the opposing surface, facing the thread groove formed in a region of ½ of the second gas transfer mechanism in the axial direction, is cut from the outlet port side toward the inlet port side.

Assignees

• Kawanishi Shinji
• Sudo Takashi
• Edwards Japan Ltd

Inventors

• Kawanishi Shinji
• Sudo Takashi

Classifications

• F04D29/526

  Details of the casing section radially opposing blade tips (ducts F04D29/545) · CPC title

• F04D3/00 Primary

  Axial-flow pumps (priming or boosting F04D9/00) · CPC title

• F04D19/042

  Turbomolecular vacuum pumps · CPC title

• F04D19/044

  Holweck-type pumps · CPC title

• F04D29/642

  by adjusting the clearances between rotary and stationary parts · CPC title